A multi-slide chuck structure

Abstract

This utility model provides a multi-wafer chuck structure, relating to the field of silicon wafer transfer technology. The multi-wafer chuck structure includes a first lateral movement mechanism, a second lateral movement mechanism, a first bonding mechanism, and a second bonding mechanism. The first lateral movement mechanism is connected to a first bonding chuck group and a second bonding chuck group. The second lateral movement mechanism is connected to a first fixed chuck group and a second fixed chuck group. The first bonding mechanism is connected to the first bonding chuck group, and the second bonding mechanism is connected to the second bonding chuck group. This embodiment of the multi-wafer chuck structure not only increases the total loading capacity of the chuck structure by increasing the number of chucks, but also achieves high transfer efficiency and high silicon wafer production capacity through the movement of the first bonding chuck group to combine with the first fixed chuck group, the movement of the second bonding chuck group to combine with the second fixed chuck group, or the mutual combination of the first and second bonding chuck groups.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer transfer technology, and in particular to a multi-wafer chuck structure. Background Technology

[0002] In the silicon wafer manufacturing process, silicon wafers are transferred and unloaded between baskets and aluminum boats via a suction cup structure. The speed of loading and unloading directly determines the process efficiency and equipment capacity of silicon wafer production.

[0003] However, the traditional suction cup structure has limited transfer efficiency, resulting in low silicon wafer production capacity.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] To address the issues of limited transfer efficiency and low silicon wafer production capacity of multi-wafer chuck mechanisms, the purpose of this invention is to provide a multi-wafer chuck structure with high transfer efficiency and high production capacity.

[0006] To achieve the above objectives, the present invention employs the following technical means:

[0007] This utility model provides a multi-plate suction cup structure, including:

[0008] A first lateral movement mechanism is connected to a first adhesive suction cup group and a second adhesive suction cup group to drive the first adhesive suction cup group and the second adhesive suction cup group to move closer to or further away from each other in a first direction.

[0009] The second lateral movement mechanism is connected to the first fixed suction cup group and the second fixed suction cup group, so as to drive the first fixed suction cup group and the second fixed suction cup group to move closer or further away from each other in a first direction.

[0010] A first bonding mechanism is connected to the first bonding suction cup assembly to drive the first bonding suction cup assembly to move in the second direction;

[0011] The second bonding mechanism is connected to the second bonding suction cup assembly to drive the second bonding suction cup assembly to move in the second direction;

[0012] Wherein, the first direction and the second direction are perpendicular to each other.

[0013] Optionally, the multi-plate suction cup structure can switch between a first combined state and a second combined state;

[0014] In the first combined state, the first adhesive suction cup group and the first fixed suction cup group are combined with each other, and the second adhesive suction cup group and the second fixed suction cup group are combined with each other; in the second combined state, the first adhesive suction cup group and the second adhesive suction cup group are combined with each other, and the first fixed suction cup group and the second fixed suction cup group are set independently.

[0015] Optionally, the first and second adhesive suction cup groups are diagonally distributed, as are the first and second fixed suction cup groups.

[0016] Optionally, the first lateral movement mechanism includes a first driving member, a first supporting member, and a first transmission belt. The first driving member and the first supporting member are spaced apart in the first direction, and the first transmission belt is sleeved on the first driving member and the first supporting member. The first transmission belt includes a first transmission segment and a second transmission segment. The first adhesion suction cup assembly is disposed in the first transmission segment, and the second adhesion suction cup assembly is disposed in the second transmission segment.

[0017] Optionally, both the first and second adhesive suction cup groups are provided with suction cup connecting parts, which are fixedly connected to the first conveyor belt.

[0018] Optionally, the second lateral movement mechanism includes a second driving member, a second support member, and a second transmission belt. The second driving member and the second support member are spaced apart in the first direction, and the second transmission belt is sleeved on the second driving member and the second support member. The second transmission belt includes a third transmission segment and a fourth transmission segment. The first fixed suction cup group is disposed in the third transmission segment, and the second fixed suction cup group is disposed in the fourth transmission segment.

[0019] Optionally, the first bonding mechanism includes a third driving member and a first grinding screw, the third driving member being connected to the first grinding screw; the second bonding mechanism includes a fourth driving member and a second grinding screw, the fourth driving member being connected to the second grinding screw.

[0020] Optionally, the maximum sheet capacity of the first bonding suction cup and the second bonding suction cup are the same, and the maximum sheet capacity of the first fixing suction cup and the second fixing suction cup are the same; the ratio of the maximum sheet capacity of the first fixing suction cup to the maximum sheet capacity of the first bonding suction cup is 2:1.

[0021] Optionally, the first traversing mechanism and the second traversing mechanism are arranged in parallel to each other.

[0022] Optionally, the first driving component includes a servo motor and a reducer, wherein the servo motor is connected to the reducer.

[0023] Compared with the prior art, this utility model brings at least the following technical effects:

[0024] 1. This utility model's multi-wafer-carrying suction cup structure comprises a first bonding suction cup group, a second bonding suction cup group, a first fixed suction cup group, and a second fixed suction cup group. A first lateral movement mechanism drives the first and second bonding suction cup groups to move closer to or further apart in a first direction, and a second lateral movement mechanism drives the first and second fixed suction cup groups to move closer to or further apart in the same first direction. The first bonding mechanism drives the first bonding suction cup group to move linearly back and forth in a second direction, and the second bonding mechanism drives the second bonding suction cup group to move linearly back and forth in the same second direction. Thus, not only does increasing the number of suction cups increase the total loading capacity of the suction cup structure, but the movement of the first bonding suction cup group to combine with the first fixed suction cup group, and the movement of the second bonding suction cup group to combine with the second fixed suction cup group, and the mutual combination of the first and second bonding suction cup groups, allows the suction cup structure to provide different loading capacities of silicon wafers to downstream baskets. This adapts to scenarios where aluminum boats and baskets have different maximum wafer storage capacities, resulting in high transfer efficiency and high silicon wafer production capacity.

[0025] 2. Integrating the first and second adhesive suction cups into the first transverse mechanism, and integrating the first and second fixed suction cup groups into the second transverse mechanism, can simplify the structure, reduce the volume, reduce the weight, and lower the assembly difficulty.

[0026] 3. By modularizing the suction cups of the multi-plate suction cup structure, the plates can be flexibly configured to be placed in different storage compartments of the flower basket. This makes it well-suited for situations where the upper limit of the plates in the storage compartments of the aluminum boat and the flower basket is inconsistent, greatly improving the versatility of the multi-plate suction cup structure. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 The diagram shows a structural schematic of the multi-plate suction cup structure according to some embodiments of the present invention;

[0029] Figure 2 The diagram shows a structural schematic of the multi-plate suction cup structure according to some embodiments of the present invention;

[0030] Figure 3This diagram shows a schematic diagram of the multi-plate suction cup structure of some embodiments of the present invention in a second combined state;

[0031] Figure 4 This diagram shows a schematic diagram of the multi-plate suction cup structure of some embodiments of the present invention in a first combined state;

[0032] Figure 5 A schematic diagram of the structure of the first transverse mechanism according to some embodiments of the present invention is shown;

[0033] Figure 6 A schematic diagram of the structure of the second transverse movement mechanism according to some embodiments of the present invention is shown.

[0034] Explanation of key component symbols:

[0035] 100 - Multi-plate suction cup structure; 10 - First transverse movement mechanism; 11 - First driving component; 12 - First conveyor belt; 13 - First support component; 20 - Second transverse movement mechanism; 21 - Second driving component; 22 - Second conveyor belt; 23 - Second support component; 30 - First bonding mechanism; 40 - Second bonding mechanism; 51 - First bonding suction cup group; 52 - Second bonding suction cup group; 53 - First fixed suction cup group; 54 - Second fixed suction cup group; 200 - Aluminum boat; 300 - Flower basket. Detailed Implementation

[0036] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0037] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0038] Please see Figures 1-6 This utility model provides a multi-sheet suction cup structure 100. The multi-sheet suction cup structure 100 is a device that uses multiple suction cups to transfer sheets between an aluminum boat 200 and a basket 300. The sheets can be photovoltaic cells or semiconductor silicon wafers.

[0039] Please see Figure 2 The multi-carrying plate suction cup structure 100 includes a first transverse movement mechanism 10, a second transverse movement mechanism 20, a first bonding mechanism 30, and a second bonding mechanism 40.

[0040] The first lateral movement mechanism 10 is connected to a first adhesive suction cup group 51 and a second adhesive suction cup group 52, so as to drive the first adhesive suction cup group 51 and the second adhesive suction cup group 52 to move closer or further apart in a first direction. The second lateral movement mechanism 20 is connected to a first fixed suction cup group 53 and a second fixed suction cup group 54, so as to drive the first fixed suction cup group 53 and the second fixed suction cup group 54 to move closer or further apart in a first direction. The first adhesive mechanism 30 is connected to the first adhesive suction cup group 51, so as to drive the first adhesive suction cup group 51 to move in a second direction. The second adhesive mechanism 40 is connected to the second adhesive suction cup group 52, so as to drive the second adhesive suction cup group 52 to move in a second direction. The first direction and the second direction are perpendicular to each other.

[0041] In this way, not only is the total loading capacity of the suction cup structure increased by increasing the number of suction cups, but also the first bonding suction cup group 51 moves to combine with the first fixed suction cup group 53, and the second bonding suction cup group 52 moves to combine with the second fixed suction cup group 54. The first bonding suction cup group 51 and the second bonding suction cup group 52 combine with each other so that the suction cup structure can provide different loading capacities of silicon wafers to the downstream basket 300. The silicon wafer transfer efficiency is high and the production capacity is high.

[0042] In addition, since the first adhesive suction cup group 51 and the second adhesive suction cup group 52 are integrated into the first transverse mechanism 10, and the first fixed suction cup group 53 and the second fixed suction cup group 54 are integrated into the second transverse mechanism 20, the structure can be simplified, the volume can be reduced, the weight can be reduced, and the assembly difficulty can be lowered.

[0043] Furthermore, by modularizing the suction cups of the multi-plate suction cup structure 100, the plates can be flexibly configured to be placed in different storage compartments of the flower basket 300, thus adapting well to situations where the upper limit of the plates in the storage compartments of the aluminum boat 200 and the storage compartments of the flower basket 300 is inconsistent, greatly improving the versatility of the multi-plate suction cup structure 100.

[0044] Please combine Figure 1 In the transfer scenario of the multi-sheet suction cup structure 100, the multi-sheet suction cup structure 100 first picks up sheets from the upstream aluminum boat 200, and then places the sheets into the downstream basket 300. The direction of sheet transfer is shown below. Figure 1 As indicated by the arrow direction. The basket 300, the multi-wafer suction cup structure 100, and the aluminum boat 200 are arranged parallel to each other, and the silicon wafers in the basket 300 and the aluminum boat 200 are arranged perpendicular to each other. The first direction of the multi-wafer suction cup structure 100 is parallel to the basket 300 and the aluminum boat 200, and the second direction of the multi-wafer suction cup structure 100 is perpendicular to the basket 300 and the aluminum boat 200. See [reference needed] for the first and second directions. Figure 1 and Figure 2 The coordinate axes in the diagram.

[0045] In one specific embodiment, the multi-plate suction cup structure 100 is capable of switching between a first combined state and a second combined state.

[0046] Please see Figure 3 In the second combined state, the first adhesive suction cup group 51 and the second adhesive suction cup group 52 are combined with each other, while the first fixed suction cup group 53 and the second fixed suction cup group 54 are set independently. Please refer to [link / reference]. Figure 4 In the first combined state, the first adhesive suction cup group 51 and the first fixed suction cup group 53 are combined with each other, and the second adhesive suction cup group 52 and the second fixed suction cup group 54 are combined with each other.

[0047] Both the aluminum boat 200 and the flower basket 300 are configured with multiple storage compartments, which are used for temporary storage of silicon wafers. Each storage compartment in both the aluminum boat 200 and the flower basket 300 has a maximum storage capacity. If the maximum storage capacity of the storage compartments in the aluminum boat 200 and the flower basket 300 is inconsistent, a multi-wafer suction cup structure 100 is required to adjust the storage capacity between the aluminum boat 200 and the flower basket 300.

[0048] To improve the working efficiency of the multi-plate suction cup structure 100, all the plates that are picked up from the aluminum boat 200 at one time need to be placed on the flower basket 300.

[0049] For example, the aluminum boat 200 has two storage compartments with a maximum capacity of 180 pieces, and the flower basket 300 has three storage compartments with a maximum capacity of 120 pieces. The multi-piece suction cup structure 100 is configured with a total storage capacity of 360 pieces to transfer the sheets from the two storage compartments of the aluminum boat 200 to the three storage compartments of the flower basket 300 in one go. Specifically, the first and second adhesive suction cup groups 51 and 52 of the multi-piece suction cup structure 100 each have a maximum capacity of 60 pieces, while the first and second fixed suction cup groups 53 and 54 each have a maximum capacity of 120 pieces.

[0050] When a sheet is retrieved from the aluminum boat 200, the multi-sheet suction cup structure 100 enters the first combined state. The first lateral movement mechanism 10 drives the first and second adhesive suction cup groups 51 and 52 to move closer to each other, so that the first and second adhesive suction cup groups 51 and 52 are respectively aligned with the two storage compartments of the aluminum boat 200 in the second direction. The second lateral movement mechanism 20 drives the first and second fixed suction cup groups 53 and 54 to move closer to each other in the first direction, until the first fixed suction cup group 53 is aligned with the first adhesive suction cup group 51 in the second direction, and the second fixed suction cup group 54 is aligned with the second adhesive suction cup group 52 in the second direction.

[0051] Thus, the first fixed suction cup group 53 and the first adhesive suction cup group 51 combine to form a suction cup with a maximum sheet capacity of 180°. The second fixed suction cup group 54 and the second adhesive suction cup group 52 combine to form a suction cup with a maximum sheet capacity of 180°. This allows for the retrieval of sheets from the two storage compartments of the aluminum boat 200.

[0052] When the silicon wafer is placed in the basket 300, the multi-wafer suction cup structure 100 enters the second combination state. The first lateral movement mechanism 10 drives the first bonding suction cup group 51 and the second bonding suction cup group 52 to move closer to each other until the first bonding suction cup group 51 and the second bonding suction cup group 52 are aligned with the second storage compartment of the basket 300 in the second direction.

[0053] The first bonding mechanism 30 drives the first bonding suction cup group 51 to move towards the aluminum boat 200 in the second direction, and the second bonding mechanism 40 drives the second bonding suction cup group 52 to move towards the flower basket 300 in the second direction, so that the first bonding suction cup group 51 and the second bonding suction cup group 52 combine to form a suction cup with a maximum capacity of 120 pieces. This suction cup is aligned with the second storage compartment of the flower basket 300 in the second direction. The first fixed suction cup group 53 and the second fixed suction cup group 54 are respectively aligned with the first and third storage compartments of the flower basket 300 in the second direction. In this way, through the combination of the first fixed suction cup group 53, the second fixed suction cup group 54, and the first bonding suction cup group 51 and the second bonding suction cup group 52, 120 pieces are simultaneously loaded into each of the three storage compartments of the flower basket 300. Repeating this process twice will completely fill the three storage compartments of the flower basket 300.

[0054] In summary, the multi-plate suction cup structure 100 of this utility model, without changing the plate capacity of a single suction cup, changes the maximum plate capacity of the combined suction cup by combining and deforming the suction cups, so as to adapt to the scenarios where the flower basket 300 and the aluminum boat 200 have storage compartments with different plate capacities.

[0055] Please see Figure 5 In one specific embodiment, the first lateral movement mechanism 10 includes a first driving member 11, a first support member 13 and a first transmission belt 12. The first driving member 11 and the first support member 13 are spaced apart from each other in a first direction, and the first transmission belt 12 is sleeved on the first driving member 11 and the first support member 13.

[0056] The first conveyor belt 12 includes a first conveyor section and a second conveyor section. The first conveyor section is provided with a first suction cup assembly 51, and the second conveyor section is provided with a second suction cup assembly 52. ​​When the first driving member 11 rotates clockwise, the first conveyor section drives the first suction cup assembly 51 to move towards the first driving member 11 in a second direction, and the second conveyor section drives the second suction cup assembly 52 to move towards the first support member 13 simultaneously. When the first driving member 11 rotates counterclockwise, the first conveyor section drives the first suction cup assembly 51 to move towards the first support member 13 in a second direction, and the second conveyor section drives the second suction cup assembly 52 to move towards the first driving member 11 simultaneously.

[0057] In this embodiment, the first lateral movement mechanism 10 achieves the synchronous movement of the first and second adhesive suction cup groups 51 and 52 towards each other in the first direction using only two components: the first conveyor belt 12 and the first support member 13. This results in a highly integrated, simple, and compact structure. Furthermore, compared to gear and rack mechanisms or swing wheel and lever mechanisms, the central space is not occupied, allowing for smooth alignment of the first and second adhesive suction cup groups 51 and 52 in the second direction.

[0058] Furthermore, the first driving component 11 includes a servo motor and a reducer, with the servo motor connected to the reducer. The servo motor enables precise control of the output power, while the reducer amplifies the output power to meet transmission requirements, ensuring stable and reliable movement of the first transmission belt 12. The first support component 13 can be an optical shaft, a roller, or a gear. The first transmission belt 12 can be a belt with internally arranged transmission teeth.

[0059] Please see Figure 6 In one specific embodiment, the second lateral movement mechanism 20 includes a second driving member 21, a second support member 23, and a second transmission belt 22. The second driving member 21 and the second support member 23 are spaced apart in a first direction, and the second transmission belt 22 is sleeved on the second driving member 21 and the second support member 23; the second transmission belt 22 is provided with a third transmission segment and a fourth transmission segment, a first fixed suction cup group 53 is provided in the third transmission segment, and a second fixed suction cup group 54 is provided in the fourth transmission segment.

[0060] The structure of the second transverse mechanism 20 is largely the same as that of the first transverse mechanism 10, except that the first transverse mechanism 10 is equipped with a first adhesive suction cup group 51 and a second adhesive suction cup group 52. The second transverse mechanism 20 is equipped with a first fixed suction cup group 53 and a second fixed suction cup group 54.

[0061] The second transverse mechanism 20 in this embodiment can realize the synchronous approach or departure of the first fixed suction cup group 53 and the second fixed suction cup group 54 in the first direction through two parts: the second transmission belt 22 and the second support member 23. It has a high degree of structural integration and is simple and compact.

[0062] In one specific embodiment, the first adhesive suction cup group 51 and the second adhesive suction cup group 52 are diagonally distributed, and the first fixed suction cup group 53 and the second fixed suction cup group 54 are diagonally distributed.

[0063] This design employs a diagonal arrangement to reduce the number of axes required in the second direction for the four suction cup groups, resulting in a simplified, unconventional layout. With this layout, only two of the bonding suction cup groups need to be designed with a second-direction movement structure to achieve the requirement of transforming two rows of 180 wafers each into three rows of 120 wafers each. Furthermore, since the two interlocking suction cup groups are connected to the same transverse conveyor belt, the transverse travel of the first bonding suction cup group 51 and the second bonding suction cup group 52 is designed to be the same, as are the transverse travel of the first fixed suction cup group 53 and the second fixed suction cup group 54. However, the transverse travel of the fixed suction cup group and the bonding suction cup group is different (the outward opening travel of the fixed suction cup is greater than the inward bonding travel of the bonding suction cup), hence the diagonal arrangement of the suction cup groups.

[0064] Please refer to it again. Figure 2 In one specific embodiment, the first bonding mechanism 30 includes a third driving member and a first grinding screw, with the third driving member connected to the first grinding screw. Thus, the third driving member drives the first grinding screw to rotate, and the first grinding screw drives the first bonding suction cup to move linearly back and forth in the second direction. In this way, the movement of the first bonding suction cup in the second direction is achieved through the third driving member and the first grinding screw, resulting in a simple and reliable structure.

[0065] In one specific embodiment, the second bonding mechanism 40 includes a fourth driving member and a second grinding screw, with a third driving member connected to the second grinding screw. Thus, the fourth driving member drives the second grinding screw to rotate, and the second grinding screw drives the first bonding suction cup assembly 51 to move linearly back and forth in the second direction. In this way, the second bonding suction cup assembly 52 moves in the second direction via the fourth driving member and the second grinding screw, resulting in a simple and reliable structure.

[0066] Please refer to it again. Figure 5 In one specific embodiment, both the first suction cup assembly 51 and the second suction cup assembly 52 are provided with suction cup connecting parts, and the connecting parts of the two suction cup assemblies are fixedly connected to the first conveyor belt 12. Thus, the first suction cup assembly 51 and the second suction cup assembly 52 are fixed to the first conveyor belt 12 through the suction cup connecting parts, so that the first suction cup assembly 51 moves synchronously with the first conveyor belt 12, and the second suction cup assembly 52 moves synchronously with the first conveyor belt 12, ensuring stable and reliable movement of both the first suction cup assembly 51 and the second suction cup assembly 52.

[0067] Specifically, the suction cup connection can be glued, snapped, or clamped to the first conveyor belt 12.

[0068] In one specific embodiment, the first lateral movement mechanism 10 and the second lateral movement mechanism 20 are arranged parallel to each other. Both the first lateral movement mechanism 10 and the second lateral movement mechanism 20 are arranged along a first direction. In this way, the operation of the first lateral movement mechanism 10 and the second lateral movement mechanism 20 does not interfere with each other, and the operation is stable and reliable.

[0069] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A multi-plate suction cup structure, characterized in that, include: A first lateral movement mechanism is connected to a first adhesive suction cup group and a second adhesive suction cup group to drive the first adhesive suction cup group and the second adhesive suction cup group to move closer to or further away from each other in a first direction. The second lateral movement mechanism is connected to the first fixed suction cup group and the second fixed suction cup group, so as to drive the first fixed suction cup group and the second fixed suction cup group to move closer or further away from each other in a first direction. A first bonding mechanism is connected to the first bonding suction cup assembly to drive the first bonding suction cup assembly to move in the second direction; The second bonding mechanism is connected to the second bonding suction cup assembly to drive the second bonding suction cup assembly to move in the second direction; Wherein, the first direction and the second direction are perpendicular to each other.

2. The multi-plate suction cup structure according to claim 1, characterized in that, The multi-plate suction cup structure can switch between a first combined state and a second combined state; In the first combined state, the first adhesive suction cup group and the first fixed suction cup group are combined with each other, and the second adhesive suction cup group and the second fixed suction cup group are combined with each other; in the second combined state, the first adhesive suction cup group and the second adhesive suction cup group are combined with each other, and the first fixed suction cup group and the second fixed suction cup group are set independently.

3. The multi-plate suction cup structure according to claim 1, characterized in that, The first and second adhesive suction cup groups are diagonally distributed, as are the first and second fixed suction cup groups.

4. The multi-plate suction cup structure according to claim 1, characterized in that, The first lateral movement mechanism includes a first driving member, a first supporting member, and a first transmission belt. The first driving member and the first supporting member are spaced apart in the first direction, and the first transmission belt is sleeved on the first driving member and the first supporting member. The first transmission belt includes a first transmission segment and a second transmission segment. The first adhesion suction cup assembly is disposed in the first transmission segment, and the second adhesion suction cup assembly is disposed in the second transmission segment.

5. The multi-plate suction cup structure according to claim 4, characterized in that, Both the first and second adhesive suction cup groups are provided with suction cup connecting parts, which are fixedly connected to the first conveyor belt.

6. The multi-plate suction cup structure according to claim 1, characterized in that, The second lateral movement mechanism includes a second driving member, a second support member, and a second transmission belt. The second driving member and the second support member are spaced apart in the first direction, and the second transmission belt is sleeved on the second driving member and the second support member. The second transmission belt includes a third transmission segment and a fourth transmission segment. The first fixed suction cup group is disposed in the third transmission segment, and the second fixed suction cup group is disposed in the fourth transmission segment.

7. The multi-plate suction cup structure according to claim 1, characterized in that, The first bonding mechanism includes a third driving member and a first grinding screw, wherein the third driving member is connected to the first grinding screw; the second bonding mechanism includes a fourth driving member and a second grinding screw, wherein the fourth driving member is connected to the second grinding screw.

8. The multi-plate suction cup structure according to claim 1, characterized in that, The first and second bonding suction cups have the same maximum sheet capacity, and the first and second fixed suction cups have the same maximum sheet capacity; the ratio of the maximum sheet capacity of the first fixed suction cup to the maximum sheet capacity of the first bonding suction cup is 2:

1.

9. The multi-plate suction cup structure according to claim 1, characterized in that, The first traverse mechanism and the second traverse mechanism are arranged in parallel to each other.

10. The multi-plate suction cup structure according to claim 4, characterized in that, The first driving component includes a servo motor and a reducer, wherein the servo motor is connected to the reducer.

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