A suction cup and a wafer cassette opening device having the same.

Abstract

This utility model relates to the field of wafer transport technology, and discloses a suction cup and a wafer cassette opening device having the same. The suction cup includes a main body and a vacuum channel disposed within the main body. One side of the main body forms an arc-shaped adsorption surface for adsorbing the cassette cover. A separation mechanism includes multiple first protrusions spaced apart around the vacuum channel. This utility model, through the arc-shaped adsorption surface and vacuum channel, ensures the sealing and stability of the cassette cover during adsorption. Simultaneously, the multiple first protrusions spaced apart around the vacuum channel can be compressed during vacuum adsorption of the cassette cover to avoid interfering with the adsorption process. When the vacuum channel breaks and releases the cassette cover, the first protrusions provide elastic separation force through their own restoring deformation. This separation force can directly act on the cassette cover, effectively overcoming the adhesion problems caused by vacuum release delay or material surface adhesion effects, allowing the cassette cover to separate from the arc-shaped adsorption surface promptly and cleanly.

Description

Technical Field

[0001] This utility model relates to the field of wafer transportation technology, specifically to a suction cup and a wafer cassette opening device having the same. Background Technology

[0002] A wafer is a silicon chip used to fabricate silicon semiconductor circuits. It is typically made of high-purity single-crystal silicon and is a thin, circular sheet. Its surface requires precision circuit patterning, thus demanding extremely high cleanliness and integrity. To improve loading efficiency and strictly avoid environmental contamination during production, wafers are placed in dedicated sealed containers during storage and transport. These transport containers enable batch, standardized movement of wafers. Throughout this process, the container lid remains mechanically locked to maintain an ultra-clean microenvironment. During the loading stage, the lid must be safely opened to allow a robotic arm to grasp the wafer.

[0003] Currently, a common method used in the industry for opening lids is to use a suction cup connected to a vacuum device, which uses negative pressure to adhere the lid to its outer surface. However, because the suction cup relies on vacuum pressure to generate suction force, high pressure is often required to ensure sealing and stability, which can easily lead to the lid being overly firmly adhered. When the lid needs to be released after opening, slight delays in vacuum release or slight adhesion effects on the material surface often cause a "sticking" phenomenon, where the lid fails to separate from the suction cup promptly and cleanly. This sticking can not only interfere with the smoothness and positioning accuracy of the opening action, affecting efficiency in fast-paced production, but also pose a potential risk to the sealing of precision-packaged boxes in the long term due to unconventional stresses or micro-vibrations. Utility Model Content

[0004] In view of this, the present invention provides a suction cup and a wafer cassette opening device having the same, to solve the problem that in the existing vacuum suction cup type wafer cassette opening device, the suction cup is prone to sticking to the cassette cover due to vacuum release delay or material surface adhesion effect.

[0005] In a first aspect, this utility model provides a suction cup, comprising: The main body and the vacuum channel disposed within the main body, wherein one side of the main body forms an arc-shaped adsorption surface for adsorbing the lid; The separation mechanism includes a plurality of first protrusions spaced around the vacuum channel. The plurality of first protrusions are arranged on the same distributed ring centered on the opening of the vacuum channel. The first protrusions protrude outward from the arc-shaped adsorption surface, and their protrusion height is compressed when the vacuum channel is evacuated and adsorbs the box cover, and recovers when the vacuum channel is ruptured and released, so as to provide an elastic separation force to push the box cover away from the arc-shaped adsorption surface.

[0006] Optionally, the separation mechanism further includes: Multiple second protrusions are spaced apart on the arc-shaped adsorption surface and located radially outside the distribution ring formed by the first protrusions. The second protrusions are adapted to contact the first protrusions together and support the lid in the adsorption state.

[0007] Optionally, a plurality of the second protrusions are arranged circumferentially along the arc-shaped adsorption surface to form a first annular array and a second annular array located radially outside the first protrusion, wherein the first annular array and the second annular array are coaxially arranged.

[0008] Optionally, the plurality of first protrusions are staggered with the second protrusions in the first annular array and the second annular array, such that any one of the first protrusions is located in the gap region between two adjacent second protrusions in the circumferential projection.

[0009] Optionally, the first protrusion is an elastic cylindrical structure with a flat top. When the vacuum channel is evacuated, its cylindrical side can expand radially, thereby enhancing its elastic separation force to push the lid away along the direction perpendicular to the arc-shaped adsorption surface when it returns to its original shape.

[0010] Optionally, the second protrusion is a strip-shaped elastic cylindrical structure with a flat top, its length direction is parallel to the circumferential direction of the arc-shaped adsorption surface, and its overall protrusion height is equal to or lower than the protrusion height of the first protrusion in its natural state. The second protrusion is adapted to contact the lid together with the first protrusion during adsorption, and to avoid hindering the elastic recovery stroke of the first protrusion when the vacuum is broken and released.

[0011] Optionally, the main body, the first protrusion, and the second protrusion are integrally formed from the same elastic material.

[0012] Beneficial effects The suction cup provided by this utility model includes a main body and a vacuum channel disposed within the main body. One side of the main body forms an arc-shaped adsorption surface for adsorbing a box lid. The separation mechanism includes a plurality of first protrusions spaced around the vacuum channel. The plurality of first protrusions are disposed on the same distributed ring centered on the opening of the vacuum channel. The first protrusions protrude outward from the arc-shaped adsorption surface, and their protrusion height is compressed when the vacuum channel is evacuated and adsorbs the box lid, and recovers when the vacuum channel is released, so as to provide an elastic separation force to push the box lid away from the arc-shaped adsorption surface.

[0013] The suction cup provided by this utility model, through its arc-shaped adsorption surface and vacuum channel, ensures the sealing and stability of the lid during adsorption. Multiple first protrusions spaced around the vacuum channel can be compressed during vacuum adsorption of the lid to avoid interfering with the adsorption process. When the vacuum channel breaks and releases the lid, the first protrusions provide elastic separation force through their self-recovery deformation. This separation force acts directly on the lid, effectively overcoming adhesion problems caused by vacuum release delay or material surface adhesion effects. This allows the lid to separate from the arc-shaped adsorption surface promptly and cleanly, ensuring smooth opening and accurate positioning, avoiding impact on production cycle time due to adhesion, and reducing the generation of unconventional stress or micro-vibrations, thus lowering the potential risk to the box's sealing. Furthermore, the multiple first protrusions are located on the same distributed ring centered on the vacuum channel opening, ensuring that the elastic separation force is applied evenly to the lid, preventing damage or decreased adsorption stability caused by uneven force on the lid, thus balancing adsorption reliability and separation effectiveness.

[0014] Secondly, this utility model also provides a wafer cassette opening device, comprising: The suction cup as described in any of the above.

[0015] Optionally, the vacuum channel is connected to a vacuum generating device and a control valve. When the control valve performs a vacuum release action, the separation mechanism is linked with the control valve, so that when the vacuum release action is triggered, the first protrusion synchronously begins its elastic recovery stroke. Attached Figure Description

[0016] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a suction cup according to an embodiment of the present utility model; Explanation of reference numerals in the attached figures: 1. Main body component; 11. Vacuum channel; 12. Arc-shaped adsorption surface; 21. First protrusion; 22. Second protrusion; Detailed Implementation To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0018] The following is combined Figure 1 The following describes embodiments of the present invention.

[0019] According to an embodiment of the present invention, a suction cup is provided, comprising: The main body 1 and the vacuum channel 11 disposed in the main body 1, and an arc-shaped adsorption surface 12 for adsorbing the box cover is formed on one side of the main body 1. The separation mechanism includes multiple first protrusions 21 spaced around the vacuum channel 11. The multiple first protrusions 21 are arranged on the same distributed ring centered on the opening of the vacuum channel 11. The first protrusions 21 protrude outward from the arc-shaped adsorption surface 12, and their protrusion height is compressed when the vacuum channel 11 is evacuated and adsorbs the box cover, and recovers when the vacuum channel 11 is released from vacuum, so as to provide an elastic separation force to push the box cover away from the arc-shaped adsorption surface 12.

[0020] The suction cup provided in this embodiment, through the arc-shaped adsorption surface 12 and the vacuum channel 11, can ensure the sealing and stability of the box lid during adsorption. At the same time, the multiple first protrusions 21 arranged at intervals around the vacuum channel 11 can be compressed during vacuum adsorption of the box lid to avoid interfering with the adsorption process. When the vacuum channel 11 breaks the vacuum and releases the box lid, the first protrusions 21 provide elastic separation force through their own recovery deformation. This separation force can act directly on the box lid, effectively overcoming the adhesion problem caused by vacuum release delay or material surface adhesion effect, so that the box lid can separate from the arc-shaped adsorption surface 12 in a timely and crisp manner, ensuring the smoothness and positioning accuracy of the opening action, avoiding the impact of adhesion on the production cycle, and reducing the generation of unconventional stress or micro-vibration, thus reducing the potential risk to the sealing of the box. Moreover, the multiple first protrusions 21 are located on the same distributed ring centered on the opening of the vacuum channel 11, which can make the elastic separation force act evenly on the box lid, avoiding damage or decreased adsorption stability caused by uneven force on the box lid, thus taking into account both adsorption reliability and separation effectiveness.

[0021] Furthermore, the separation mechanism also includes: Multiple second protrusions 22 are spaced apart on the arc-shaped adsorption surface 12 and located radially outside the distribution ring formed by the first protrusions 21. The second protrusions 22 are adapted to contact the first protrusions 21 together and support the lid in the adsorption state.

[0022] In a straightforward manner, the additional second protrusions 22 in the separation mechanism are arranged radially and radially outwardly in a circular pattern on the first protrusion 21 of the arc-shaped adsorption surface 12. This creates a two-layer support structure between the second protrusions 22 and the first protrusion 21 during the adsorption state, allowing them to contact and support the lid together. On one hand, this increases the contact support points between the lid and the arc-shaped adsorption surface 12, and the supporting force is evenly distributed radially along the arc-shaped adsorption surface 12. This prevents the lid from not fitting tightly against the arc-shaped adsorption surface 12 due to uneven local force, further ensuring the stability and sealing of the negative pressure environment during adsorption, while also preventing the lid from shifting during opening. On the other hand, the two-layer support structure, in conjunction with the elastic separation force of the first protrusion 21, allows the separation force to be transmitted more evenly radially along the lid during vacuum release, preventing local force concentration on the lid. This ensures the structural integrity of the lid and further promotes rapid and stable separation between the lid and the arc-shaped adsorption surface 12. It also enhances the load-bearing stability of the lid during the adsorption state, providing further assurance for the smoothness and positioning accuracy of the opening action.

[0023] Furthermore, multiple second protrusions 22 are arranged circumferentially along the arc-shaped adsorption surface 12 to form a first annular array and a second annular array located radially outside the first protrusion 21, with the first annular array and the second annular array being coaxially arranged.

[0024] In a straightforward manner, multiple second protrusions 22 are arranged circumferentially to form a first annular array and a second annular array coaxially, located radially outside the first protrusion 21. This results in a multi-layered, evenly distributed ring-shaped support point for the lid and the arc-shaped adsorption surface 12 along the circumferential direction. The coaxial design ensures that the support force and separation force are evenly transmitted radially and circumferentially along the lid. On one hand, this further improves the sealing performance of the lid and the arc-shaped adsorption surface 12 during adsorption, preventing localized negative pressure leakage due to uneven distribution of support points and ensuring adsorption stability. On the other hand, the multi-layered annular array support structure can work synergistically with the elastic separation force of the first protrusion 21 when the vacuum is released, allowing all positions of the lid to receive synchronous and balanced separation driving force. This effectively prevents tilting, jamming, or localized force concentration during lid separation, ensuring the integrity of the lid structure and further improving the smoothness and positioning accuracy of the opening action. At the same time, the multi-layered annular support also enhances the load-bearing stability of the lid during adsorption, making it suitable for lids of different sizes and specifications.

[0025] Specifically, in this embodiment, multiple second protrusions 22 form three annular arrays; in other alternative embodiments, multiple second protrusions 22 can also be arranged circumferentially along the arc-shaped adsorption surface 12 to form a single-layer annular array or three or more coaxial annular arrays. The number of annular arrays can be flexibly adjusted according to the size, weight and adsorption requirements of the lid; in addition, the first annular array and the second annular array can also be set as arc segment arrays that are not complete annular arrays, and each arc segment array is evenly distributed circumferentially along the arc-shaped adsorption surface 12 to ensure that the lid is subjected to balanced circumferential force, which can also achieve stable support and rapid and smooth separation of the lid, meeting the usage requirements of different application scenarios.

[0026] Furthermore, the multiple first protrusions 21 are staggered with the second protrusions 22 in the first and second annular arrays, such that any first protrusion 21 is located in the gap region between two adjacent second protrusions 22 in the circumferential projection.

[0027] In a straightforward manner, the first protrusion 21 and the second protrusions 22 in the first and second annular arrays are circumferentially staggered, so that the circumferential projection of any first protrusion 21 falls on the gap between two adjacent second protrusions 22. This allows the support points of the arc-shaped adsorption surface 12 to form a uniform distribution without overlap or blind spots along the circumference. On the one hand, this avoids the localized force superposition on the lid caused by the concentrated distribution of support points, ensuring that the adhesion pressure between the lid and the arc-shaped adsorption surface 12 is evenly transmitted along the circumference during adsorption, reducing the risk of localized negative pressure leakage, and further improving adsorption. It features excellent sealing and stability. On the other hand, when the vacuum is broken, the elastic separation force of the staggered first protrusion 21 and second protrusion 22 can act on different circumferential areas of the lid, forming a separation driving force without dead angles. This prevents the lid from tilting or getting stuck due to a lack of separation force support in some areas, ensuring that all positions of the lid separate synchronously. This not only ensures the stability and speed of the separation process, but also avoids damage to the lid caused by localized force concentration. At the same time, it does not affect the independent support and elastic recovery function of each protrusion, thus taking into account both adsorption reliability and separation effectiveness.

[0028] Furthermore, the first protrusion 21 is an elastic cylindrical structure with a flat top. When the vacuum channel 11 is evacuated, its cylindrical side can expand radially, thereby enhancing its elastic separation force to push the lid away in a direction perpendicular to the arc-shaped adsorption surface 12 when it returns to its original shape.

[0029] In a straightforward manner, the first protrusion 21 adopts an elastic cylindrical structure with a flat top. The flat top design increases the contact area with the lid, preventing damage to the lid caused by local pressure concentration during adsorption or separation, while also improving the support stability during adsorption. When the vacuum channel 11 is evacuated, the elastic cylinder is compressed while its side expands radially, allowing more elastic potential energy to accumulate inside the elastic body. When the vacuum is released, the cylinder can not only recover through axial deformation to generate a basic separation force perpendicular to the arc-shaped adsorption surface 12, but also further enhance this vertical separation force through the rebound effect of radial contraction. This enhanced separation force can more efficiently overcome the adhesion problem caused by vacuum release delay or material surface adhesion effect, ensuring that the lid separates from the arc-shaped adsorption surface 12 quickly and cleanly. At the same time, the synergistic effect of axial and radial deformation can make the separation force transmission more stable, avoiding tilting or jamming when the lid separates, thus taking into account support stability, lid protection, and separation effectiveness.

[0030] In other alternative embodiments, the first protrusion 21 can be an elastic cylindrical structure with an arc-shaped top. The arc-shaped design can adapt to the microscopic morphology of the lid surface, improving the fit during adsorption, while still achieving radial expansion of the cylindrical side during compression to enhance the separation force. Alternatively, the first protrusion 21 can be configured as an elastic frustum structure (the top cross-sectional area is smaller than the bottom cross-sectional area). This structure can improve the load-bearing stability of the protrusion itself, and can also accumulate elastic potential energy through radial expansion of the side, generating enhanced vertical separation force upon recovery. In addition, an elastic hollow cylindrical structure can also be used. The hollow design allows for a larger radial expansion amplitude during vacuuming, accumulating more elastic potential energy and resulting in a stronger separation force upon release. As long as the protrusion has elastic deformation capability and can enhance the separation force through radial expansion of the side during compression, the same support and separation effect can be achieved, adapting to the usage requirements of different adsorption pressures and lid materials.

[0031] Furthermore, the second protrusion 22 is a strip-shaped elastic cylindrical structure with a flat top. Its length direction is parallel to the circumference of the arc-shaped adsorption surface 12, and its overall protrusion height is equal to or lower than the protrusion height of the first protrusion 21 in its natural state. The second protrusion 22 is suitable to contact the lid together with the first protrusion 21 during adsorption, and avoids hindering the elastic recovery stroke of the first protrusion 21 when the vacuum is broken and released.

[0032] Intuitively, the second protrusion 22 adopts a strip-shaped elastic cylindrical structure with a flat top, and its length direction is parallel to the circumference of the arc-shaped adsorption surface 12. The flat top increases the contact support area with the lid, and the strip-shaped structure extends circumferentially to further improve the continuity and stability of the circumferential support of the lid during adsorption, avoiding damage to the lid caused by localized force concentration. Its protrusion height is equal to or lower than the protrusion height of the first protrusion 21 in its natural state, ensuring that the second protrusion 22 can contact the lid together with the first protrusion 21 during adsorption, forming a cooperative support to ensure a tight adsorption. It has good sealing and load-bearing stability, and can avoid the first protrusion 21 from being hindered by its own height during vacuum release, ensuring that the separation force of the first protrusion 21 can be fully transmitted to the lid; at the same time, the strip elastic structure has a certain deformation capability, and can deform slightly with the lid's fit during adsorption, further improving the fit and sealing. During release, it can also assist the lid's separation through its own elastic rebound, forming a synergistic effect with the first protrusion 21, which not only ensures the reliability of adsorption, but also ensures the smoothness of the separation process, avoiding adhesion problems while taking into account the structural integrity of the lid.

[0033] In other embodiments, the second protrusion 22 can be configured as a strip-shaped elastomer structure with a micro-arc surface at the top. The micro-arc surface design can adapt to the micro-morphology of the lid surface, improving the fit during adsorption while still ensuring sufficient support area. Alternatively, the length direction of the second protrusion 22 can be inclined at a preset angle to the circumference of the arc-shaped adsorption surface 12, and multiple inclined strip-shaped second protrusions 22 are evenly distributed along the circumference to ensure balanced circumferential support force. In addition, the second protrusion 22 can adopt a multi-segment strip structure, arranged at intervals along the circumference of the arc-shaped adsorption surface 12 to form a complete circumferential support band. Its protrusion height can be adaptively adjusted according to the elastic recovery stroke of the first protrusion 21, as long as it can contact the lid together during adsorption and does not hinder the recovery of the first protrusion 21 during release. Alternatively, the second protrusion 22 can be configured as an elastic rectangular strip structure, the width and length of which can be flexibly set according to the size of the arc-shaped adsorption surface 12 and the support requirements of the lid. This can also achieve the core effect of stable support and non-obstruction of separation, adapting to the use scenarios of lids of different materials and sizes.

[0034] Furthermore, the main body 1, the first protrusion 21, and the second protrusion 22 are integrally formed from the same elastic material.

[0035] Specifically, the main body 1, the first protrusion 21, and the second protrusion 22 are made of the same elastic material through an integrated injection molding process. The selected elastic material must meet the cleanliness requirements of the wafer production environment, have no particle shedding, and possess suitable elastic deformation capacity and wear resistance. During the molding process, the distribution ring position of the first protrusion 21, the ring array arrangement of the second protrusion 22, and the dimensional parameters of each protrusion are precisely positioned by a precision mold. This ensures that the integrated structure requires no additional assembly steps, directly guaranteeing the positional accuracy and connection stability of the first protrusion 21 and the second protrusion 22 on the arc-shaped adsorption surface 12, and avoiding problems such as protrusion detachment or displacement during use. At the same time, the integrated structure of the same elastic material ensures that the elastic deformation characteristics of each protrusion are consistent, making the transmission of support force during adsorption and separation force during release more balanced. The seamless structural design reduces contaminant residue, meets the ultra-clean operating environment required by the wafer cassette, and balances production efficiency and reliability.

[0036] According to an embodiment of the present invention, another aspect provides a wafer cassette opening device, comprising: Such as the suction cups mentioned above.

[0037] Furthermore, the vacuum channel 11 is connected to a vacuum generating device and a control valve. When the control valve performs the vacuum breaking and release action, the separation mechanism is linked with the control valve, so that when the vacuum breaking and release action is triggered, the first protrusion 21 simultaneously begins its elastic recovery stroke.

[0038] Specifically, the operation of this wafer cassette opening device is briefly described below: In the initial state, the arc-shaped adsorption surface 12 of the suction cup faces the wafer cassette lid, the control valve is closed, the vacuum channel 11 does not form a negative pressure, and both the first protrusion 21 and the second protrusion 22 are in a naturally protruding state; when it is necessary to open the lid, the vacuum generator is activated, and the control valve opens simultaneously to connect the vacuum channel 11. A negative pressure is quickly formed in the vacuum channel 11, causing the arc-shaped adsorption surface 12 to tightly adhere to the outer surface of the lid. At this time, the first protrusion 21 is compressed by the pressure of the lid, and the side of the column expands radially to accumulate elastic potential energy. The second protrusion 22 and the first protrusion 21 together connect... The lid is supported to ensure adsorption stability. Then, the lid opening device moves the suction cup along a preset trajectory, detaching the lid from the material box and transferring it to the designated release position. When the lid needs to be released, the control valve is triggered to perform a vacuum release action. The control valve opens the vacuum breaking channel 11 and works in conjunction with the separation mechanism, causing the first protrusion 21 to start its elastic recovery stroke simultaneously. Through the synergistic effect of axial rebound and radial contraction, it provides elastic separation force. The second protrusion 22 provides auxiliary support and rebounds simultaneously. With the air pressure balance after vacuum breaking, the lid quickly detaches from the arc-shaped adsorption surface 12. After the release is completed, the lid opening device drives the suction cup to reset, waiting for the next lid opening operation.

[0039] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A suction cup, characterized in that, include: The main body (1) and the vacuum channel (11) disposed in the main body (1) have an arc-shaped adsorption surface (12) formed on one side of the main body (1) for adsorbing the box cover. The separation mechanism includes a plurality of first protrusions (21) spaced around the vacuum channel (11). The plurality of first protrusions (21) are arranged on the same distributed ring centered on the opening of the vacuum channel (11). The first protrusions (21) protrude outward from the arc-shaped adsorption surface (12), and their protrusion height is compressed when the vacuum channel (11) is evacuated and adsorbs the box cover, and is restored when the vacuum channel (11) is ruptured and released, so as to provide an elastic separation force to push the box cover away from the arc-shaped adsorption surface (12).

2. The suction cup according to claim 1, characterized in that, The separation mechanism further includes: Multiple second protrusions (22) are spaced apart on the arc-shaped adsorption surface (12) and located radially outside the distribution ring formed by the first protrusion (21). The second protrusions (22) are adapted to contact the first protrusion (21) together and support the box cover in the adsorption state.

3. The suction cup according to claim 2, characterized in that, Multiple second protrusions (22) are arranged circumferentially along the arc-shaped adsorption surface (12) to form a first annular array and a second annular array located radially outside the first protrusion (21), with the first annular array and the second annular array being coaxially arranged.

4. The suction cup according to claim 3, characterized in that, Multiple first protrusions (21) are misaligned with the second protrusions (22) in the first and second annular arrays, such that any first protrusion (21) is located in the gap region between two adjacent second protrusions (22) in the circumferential projection.

5. The suction cup according to any one of claims 2-4, characterized in that, The first protrusion (21) is an elastic cylindrical structure with a flat top. When the vacuum channel (11) is evacuated, its cylindrical side can expand radially, thereby enhancing its elastic separation force to push the box cover away in a direction perpendicular to the arc-shaped adsorption surface (12) when it returns to its original state.

6. The suction cup according to claim 5, characterized in that, The second protrusion (22) is a strip-shaped elastic cylindrical structure with a flat top. Its length direction is parallel to the circumferential direction of the arc-shaped adsorption surface (12), and its overall protrusion height is equal to or lower than the protrusion height of the first protrusion (21) in its natural state. The second protrusion (22) is suitable to contact the box cover together with the first protrusion (21) during adsorption, and avoids hindering the elastic recovery stroke of the first protrusion (21) when the vacuum is broken and released.

7. The suction cup according to any one of claims 2-4, characterized in that, The main body (1), the first protrusion (21) and the second protrusion (22) are integrally formed from the same elastic material.

8. A wafer cassette opening device, characterized in that, include: The suction cup as described in any one of claims 1-7.

9. The wafer cassette opening device according to claim 8, characterized in that, The vacuum channel (11) is connected to a vacuum generating device and a control valve. When the control valve performs a vacuum release action, the separation mechanism is linked with the control valve so that when the vacuum release action is triggered, the first protrusion (21) simultaneously begins its elastic recovery stroke.

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