Atomic layer deposition equipment (desktop 4 inches)
CN309004799SActive Publication Date: 2024-12-13JIANGSU PENGJU SEMICON EQUIP TECH CO LTD
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Patent Information
- Application Number
- CN202430237766.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-25
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2039-04-25
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Figure 000001_ABST
Abstract
1. The name of the product of this design: Atomic layer deposition equipment (desktop 4 inches). 2. Purpose of the product of this design: to accommodate vacuum chambers, pipelines, electronic controls and other components to achieve atomic layer deposition. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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