Atomic layer deposition equipment (desktop 4 inches)

CN309004799SActive Publication Date: 2024-12-13JIANGSU PENGJU SEMICON EQUIP TECH CO LTD
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Patent Information

Application Number
CN202430237766.6
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-04-25
Publication Date
2024-12-13
Estimated Expiration
2039-04-25

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Abstract

1. The name of the product of this design: Atomic layer deposition equipment (desktop 4 inches). 2. Purpose of the product of this design: to accommodate vacuum chambers, pipelines, electronic controls and other components to achieve atomic layer deposition. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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