Active shock absorbers
CN309135608SActive Publication Date: 2025-02-25苏州盛拓半导体科技有限公司
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Patent Information
- Application Number
- CN202430293483.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-17
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2039-05-17
Smart Images
Figure 000001_ABST
Abstract
1. The name of this design product: active shock absorber. 2. Purpose of the product of this design: The shock absorber is a device used to isolate the vibration of the mask workpiece table. Its function is to ensure that the lithography machine is not disturbed by external vibrations during operation, ensuring the accurate transmission and positioning of the pattern. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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