Vertical flow control ring body

CN309137398SActive Publication Date: 2025-02-25ASM IP HLDG BV
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202430091984.3
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2023-08-28
Filing Date
2024-02-23
Publication Date
2025-02-25
Estimated Expiration
2039-02-23

Smart Images

  • Figure 000008_ABST
    Figure 000008_ABST
Patent Text Reader

Abstract

1. The name of this design product: the main body of the vertical flow control ring. 2. Purpose of the product with this design: The product with this design as a whole is a vertical flow control ring used to improve the uniformity of gas flow in the reaction chamber, and the part of the product is the main body of the vertical flow control ring. 3. The key point of the design of this product lies in the shape of the solid line part. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1. 5. Other situations that need to be explained Other explanations: The dotted part in the figure is the content that is not requested for protection.
Need to check novelty before this filing date? Find Prior Art