Vertical flow control ring body
CN309137398SActive Publication Date: 2025-02-25ASM IP HLDG BV
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Patent Information
- Application Number
- CN202430091984.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2023-08-28
- Filing Date
- 2024-02-23
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2039-02-23
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Figure 000008_ABST
Abstract
1. The name of this design product: the main body of the vertical flow control ring. 2. Purpose of the product with this design: The product with this design as a whole is a vertical flow control ring used to improve the uniformity of gas flow in the reaction chamber, and the part of the product is the main body of the vertical flow control ring. 3. The key point of the design of this product lies in the shape of the solid line part. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1. 5. Other situations that need to be explained Other explanations: The dotted part in the figure is the content that is not requested for protection.
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