Plasma output device
CN309142388SActive Publication Date: 2025-02-28SHENZHEN CSL VACUUM SCI & TECH CO LTD
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Patent Information
- Application Number
- CN202430394966.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2039-06-26
Smart Images
Figure 000007_ABST
Abstract
1. The name of the product of this design: plasma output device. 2. Purpose of the product with this appearance design: The product with this appearance design is used in combination with a gas source and a power source to generate plasma and provide plasma to other equipment (such as photoresist removal equipment, atomic layer deposition equipment, etching equipment, material dry cleaning equipment, etc.). 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the key points of the design: Design 1 Stereoscopic drawing 1. 5. Designate Design 1 as the base design.
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