Dynamic vacuum sealing system seals and bodies for physical vapor deposition sputtering applications

Abstract

1. The name of the product of this design: Dynamic vacuum sealing system seal ring and its body suitable for physical vapor deposition sputtering application. 2. Purpose of the product of this design: The entirety of Design 1 and Design 3 of this design is used to be placed between the target material and the isolation ring to seal the chamber (for example, to prevent the atmosphere from entering the chamber and the plasma from leaving the chamber), and the parts claimed for protection in Design 2 and Design 4 are used for the main body of the sealing ring of a dynamic vacuum sealing system suitable for physical vapor deposition sputtering applications. 3. The key design point of this design product lies in the shape expressed by non-dotted lines. 4. The picture or photo that best illustrates the key points of the design: Design 1 Stereoscopic drawing 1. 5. Designate Design 1 as the base design. 6. Other situations that need explanation: Since the rear view, left view and right view of Design 1 are symmetrical with the main view of Design 1, the rear view, left view and right view of Design 1 are omitted. Since the rear view, left view and right view of Design 2 are symmetrical with the main view of Design 2, the rear view, left view and right view of Design 2 are omitted. Since the rear view, left view and right view of Design 3 are symmetrical with the main view of Design 3, the rear view, left view and right view of Design 3 are omitted. Since the rear view, left view and right view of Design 4 are symmetrical with the main view of Design 4, the rear view, left view and right view of Design 4 are omitted. The parts indicated by dotted lines in Design 2 and Design 4 are not subject to protection.

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