Wafer holding unit of a transport unit for a wafer cleaning device

Abstract

1. The name of the product of this design: Wafer holding part of a transport unit for a wafer cleaning device. 2. Purpose of this product design: This product as a whole is installed in a wafer cleaning device and is used to transport wafers. The portion that is desired to be protected is a wafer holding portion for holding the wafer during transportation. 3. The key design point of this design product lies in the shape of the part shown by the solid line. 4. The picture or photo that best illustrates the design points: enlarged view of part A. 5. Other circumstances that require explanation: The portion indicated by the solid line is the portion that you wish to protect. The dot-dash line is a boundary line used to distinguish the portion to be protected from other portions.

Images