Substrate stage mounting unit with temperature measurement function

Abstract

1. The name of the product of this design: A substrate stage mounting portion with a temperature measuring function. 2. Purpose of the product of this design: This product is used to place a substrate such as a semiconductor wafer via an electrostatic chuck portion in a processing chamber of a semiconductor manufacturing device and has the function of measuring temperature. 3. The design key point of this appearance design product lies in the combination of shape and pattern. 4. The picture or photo that best illustrates the design points: three-dimensional picture. 5. Other circumstances that require explanation: The portion indicated by the solid line is the portion for which protection is sought as a partial design. The dot-dash line represents the boundary between the portion for which protection is claimed and the portion for which protection is not claimed.

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