Pre-cleaning device for sputtering coating machine

CN309281895SActive Publication Date: 2025-05-09SUZHOU YOULUN VACUUM EQUIP TECH CO LTD
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Patent Information

Application Number
CN202430576295.1
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2024-09-10
Publication Date
2025-05-09
Estimated Expiration
2039-09-10

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Abstract

1. The name of the product of this design: Pre-cleaning device for sputtering coating machine. 2. Purpose of the product of this design: used for pre-cleaning of substrates to be coated. 3. The design key point of this appearance design product lies in the combination of shape and pattern. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 2.
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