The main body of a semiconductor processing nozzle
CN309314387SActive Publication Date: 2025-05-30LAM RES CORP
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Patent Information
- Application Number
- CN202330728479.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2023-05-12
- Filing Date
- 2023-11-08
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2038-11-08
Smart Images
Figure 000007_ABST
Abstract
1. Name of the design product: Main body of a semiconductor processing nozzle. 2. Use of the design product: The whole product is a nozzle of a semiconductor processing device, and the part to be protected is the main body of the nozzle. 3. Design key points of the design product: Lies in the shape of the product. 4. Picture or photograph that best shows the design key points: Perspective view of Design 1. 5. Design 1 is designated as the basic design.
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