Heating Chamber and Process Chamber of Atomic Layer Deposition Equipment
CN309314435SActive Publication Date: 2025-05-30TRINA SOLAR CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202430595103.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-18
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2039-09-18
Smart Images
Figure 000007_ABST
Abstract
1. Name of the Design Product: Heating Chamber and Process Chamber of Atomic Layer Deposition Equipment. 2. Use of the Design Product: This product is used for the heating chamber and process chamber on atomic layer deposition equipment. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph that Best Illustrates the Design Key Points: Perspective View 1.
Need to check novelty before this filing date? Find Prior Art