Top Heater for Substrate Processing Equipment
CN309315207SActive Publication Date: 2025-05-30KOKUSAI DENKI KK
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Patent Information
- Application Number
- CN202130113797.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2020-09-24
- Filing Date
- 2021-03-02
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2031-03-02
Smart Images
Figure 000007_ABST
Abstract
1. Name of the design product: Top heater for substrate processing apparatus. 2. Use of the design product: Installed at the top of the heater unit in a substrate processing apparatus for processing substrates, and used to heat the processing chamber of the substrate processing apparatus. 3. Design key points of the design product: Lies in the shape. 4. Picture or photograph that best shows the design key points: Perspective view.
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