Top Heater for Substrate Processing Equipment
CN309315208SActive Publication Date: 2025-05-30KOKUSAI DENKI KK
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Patent Information
- Application Number
- CN202130138318.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2020-09-24
- Filing Date
- 2021-03-15
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2031-03-15
Smart Images
Figure 000007_ABST
Abstract
1. Name of the design product: Top heater for substrate processing equipment. 2. Use of the design product: Installed at the top of the heater unit in the substrate processing equipment for processing substrates to heat the processing chamber of the substrate processing equipment. 3. Design key points of the design product: Lies in the shape. 4. Picture or photograph that best shows the design key points: Perspective view.
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