Isolators for semiconductor manufacturing equipment
CN309843214SActive Publication Date: 2026-03-13KOKUSAI DENKI KK
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2022-03-31
- Publication Date
- 2026-03-13
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Figure 000007_ABST
Abstract
1. Name of the product in this design: Isolator for semiconductor manufacturing equipment. 2. Application of this design: In a substrate processing apparatus that processes multiple wafers, it is located in a processing chamber and separates the flow of gas between multiple wafers. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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