Radio frequency generator (AST3013)
CN309843245SActive Publication Date: 2026-03-13SHANGHAI IAN AI SEMICON TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-04
- Publication Date
- 2026-03-13
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Figure 000001_ABST
Abstract
1. Name of the product in this design: Radio Frequency Generator (AST3013). 2. Application of this design: This design is mainly used to generate plasma to achieve key processes in semiconductor applications such as etching, thin film deposition, and cleaning. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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