coating apparatus (process chamber)

CN310034060SActive Publication Date: 2026-06-16江苏先导微电子科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
江苏先导微电子科技有限公司
Filing Date
2025-09-26
Publication Date
2026-06-16

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Abstract

1. The name of the design product: coating equipment (process chamber). 2. The use of the design product: the design product is used for product coating. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.
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