Single wafer cleaning machine
CN310104950SActive Publication Date: 2026-07-21WEICHENG SEMICONDUCTOR EQUIPMENT (SUZHOU) CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- WEICHENG SEMICONDUCTOR EQUIPMENT (SUZHOU) CO LTD
- Filing Date
- 2025-11-06
- Publication Date
- 2026-07-21
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Figure 000005_ABST
Abstract
1. Name of the design product: single wafer cleaning machine. 2. Use of the design product: used for cleaning wafers and drying the wafers after cleaning. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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