Integrated chemical mechanical polishing apparatus (300 mm brush unit)
CN310105134SActive Publication Date: 2026-07-21HANGZHOU ZHONGGUI ELECTRONICS TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- HANGZHOU ZHONGGUI ELECTRONICS TECH CO LTD
- Filing Date
- 2025-12-31
- Publication Date
- 2026-07-21
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Figure 000006_ABST
Abstract
1. The name of the design product: integrated chemical mechanical polishing equipment (300mm brush unit). 2. The use of the design product: for cleaning process of 300mm wafer. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1. 5. The bottom of the design product is not easy to see or not visible during use, omit the top view.
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