Exhaust port of the inner tube of the reaction tube for semiconductor manufacturing equipment

Abstract

1. Name of the product in this design: Exhaust port of the inner tube of a reaction tube for a semiconductor manufacturing apparatus. 2. Purpose of this design: This product is an inner tube installed inside a reaction tube used in a semiconductor manufacturing apparatus. The solid line indicates the exhaust port of the inner tube of the reaction tube used in the semiconductor manufacturing apparatus. 3. The key design features of this product are the shape of the portion shown by the solid line. 4. The image or photograph that best illustrates the key design points: Design 1 3D view. 5. Design 1 is designated as the basic design. 6. Other situations requiring explanation: Other explanation: The parts shown by solid lines in the view are the parts that require protection. The dashed line is used to distinguish the protected part from other parts.

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