Inlet adapter

CN310131907SActive Publication Date: 2026-08-04LAM RES CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
LAM RES CORP
Filing Date
2022-06-17
Publication Date
2026-08-04

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Abstract

1. Name of the product in this design: Inlet Adapter. 2. Application of this design: It is used in semiconductor processing equipment, specifically placed at the entrance of the substrate processing chamber, and the holes on it can be used to deliver gas into the processing chamber. 3. The key design elements of this product are its shape, pattern, and their combination. 4. The image or photograph that best illustrates the design's key points: 3D model 7.
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