Test platform (aluminum nitride heater and electrostatic adsorption)
CN310146919SActive Publication Date: 2026-08-14LIGHT-SEMI CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2026-04-01
- Publication Date
- 2026-08-14
Smart Images
Figure 000008_ABST
Abstract
1. Name of the product in this design: Test Platform (Aluminum Nitride Heater and Electrostatic Adsorption). 2. Purpose of this design: To test the uniformity of thermal field distribution and other electrical properties of aluminum nitride heaters under simulated semiconductor vacuum process conditions. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
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