Epitaxial apparatus (MOCVD)

CN310177417SActive Publication Date: 2026-08-28YINGHANSI (WUHAN) TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202630033427.5
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2026-01-22
Publication Date
2026-08-28
Estimated Expiration
2041-01-22

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Abstract

1. Name of the designed product: epitaxial equipment (MOCVD). 2. Use of the designed product: used for the preparation of semiconductor materials. 3. Design points of the designed product: the combination of shape and pattern. 4. Picture or photo best showing the design points: perspective view.
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