Electrostatic chuck power supply (dual channel)

CN310192857SActive Publication Date: 2026-09-08SHENZHEN HUAXIN SEMICON EQUIP TECH CO LTD
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Patent Information

Application Number
CN202630145989.9
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2026-03-31
Publication Date
2026-09-08
Estimated Expiration
2041-03-31

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Abstract

1. Name of the designed product: electrostatic chuck power supply (double channel). 2. Use of the designed product: electrostatic chuck power supply. 3. Design points of the designed product: in shape. 4. Picture or photo that best shows the design points: perspective view.
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