Search area of a process recipe search graphical user interface for an electronic device

Abstract

1. Name of the product in this design: Search area of ​​the graphical user interface for searching the process formula of electronic equipment. 2. Purpose of the product: The product of this design is an electronic device. 3. The key design features of this product are the parts of the graphical user interface that require protection. 4. The picture or photo that best illustrates the key design points: Design 1 main view. 5. Design 1 is designated as the basic design. 6. Purpose of the graphical user interface: This GUI is used to search for running process recipes and display the wafer temperature distribution results associated with the selected process recipe in the form of line graphs and / or wafer diagrams. 7. Other situations requiring explanation: Purpose of the protected area: The interactive line drawing display area at the bottom of Design 1-4 is clickable by the user. In designs 1 and 2-4, hovering the cursor over the line graph at the axis of the line graph in the aforementioned display area causes the information to be displayed. In Design 2, the temperature distribution window adjacent to the line graph updates automatically as the user moves the cursor along the line graph. The lower right corner of Design 1-3 contains a clickable display area with one or more chip diagrams, tables, and legends. In designs 1, 2, and 3, hovering the cursor over the wafer plot in the display area triggers presentation information; a legend for visualization of one or more wafer plots is displayed to the right of the wafer plot; and a table below shows the data from the selected process run used to generate the wafer plot and line graph is displayed. In designs 3 and 4, the collapsible window on the left is used for display; the circular icon at the top of the collapsible window can be selected to expand the collapsible window. 8. Dashed lines do not constitute part of the design for which protection is required.

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