Main body of semiconductor substrate holder

Abstract

1. Name of the product in this design: Body of a semiconductor substrate holder. 2. Purpose of this design: The overall purpose of this product is to hold semiconductor wafers and other substrates, and the part that needs to be protected is the main body of the semiconductor substrate holder. 3. The key design features of this product are the shape of the part for which protection is sought. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. Design 1 is designated as the basic design. 6. Other situations requiring explanation: This design requests partial design protection. The parts indicated by solid lines are the parts for which protection is requested, and the parts indicated by dashed lines are the parts for which protection is not requested. As shown in the usage reference diagram, this product is installed in the processing chamber of a substrate processing device, and the substrate is held in place by the protrusions.

Images