Gas distributor
CN310206928SActive Publication Date: 2026-09-15SHANGHAI NUOFUBAN SEALING TECH CO LTD
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Patent Information
- Application Number
- CN202630200473.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2026-04-24
- Publication Date
- 2026-09-15
- Estimated Expiration
- 2041-04-24
Smart Images
Figure 000001_ABST
Abstract
1. The name of the design product: gas distributor. 2. The use of the design product: the design product is used for the gas distribution system of the wafer etching, deposition, cleaning and other process equipment, for realizing the uniform and stable distribution and transmission of process gas and purge gas. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: front view.
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