Substrate moving device for substrate processing apparatus

CN310222464SActive Publication Date: 2026-09-22KOKUSAI DENKI KK
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Patent Information

Application Number
CN202330060260.8
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2022-09-14
Filing Date
2023-02-20
Publication Date
2026-09-22
Estimated Expiration
2038-02-20

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Abstract

1. Name of the product in this design: Substrate moving device for substrate processing apparatus. 2. Application of this design: It is used to move multiple substrates up and down by installing it inside a substrate holder in the reaction chamber of a substrate processing apparatus. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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