Anti-fall fence section of wafer cleaning equipment
CN310236844SActive Publication Date: 2026-09-29SCREEN HOLDINGS CO LTD
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Patent Information
- Application Number
- CN202630119149.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-12-18
- Filing Date
- 2026-03-18
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2041-03-18
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Figure 000008_ABST
Abstract
1. Name of the product in this design: Anti-fall fence section of a wafer cleaning device. 2. Application of this design: This design is intended to be used as a wafer cleaning device as a whole, and the part for which protection is sought is intended to be used as a barrier to prevent wafers from falling into the wafer cleaning device. 3. The key design features of this product are the shape of the part shown by the solid line. 4. The image or photograph that best illustrates the key design points: Enlarged view of section A. 5. Other situations requiring explanation: The part of the product for which protection is sought is indicated by solid lines in the design drawings.
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