Anti-fall fence section of wafer cleaning equipment

CN310236844SActive Publication Date: 2026-09-29SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
CN202630119149.5
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2025-12-18
Filing Date
2026-03-18
Publication Date
2026-09-29
Estimated Expiration
2041-03-18

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Abstract

1. Name of the product in this design: Anti-fall fence section of a wafer cleaning device. 2. Application of this design: This design is intended to be used as a wafer cleaning device as a whole, and the part for which protection is sought is intended to be used as a barrier to prevent wafers from falling into the wafer cleaning device. 3. The key design features of this product are the shape of the part shown by the solid line. 4. The image or photograph that best illustrates the key design points: Enlarged view of section A. 5. Other situations requiring explanation: The part of the product for which protection is sought is indicated by solid lines in the design drawings.
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