Tube sheet for gas introduction portion
CN310237566SActive Publication Date: 2026-09-29NUFLARE TECH INC
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Patent Information
- Application Number
- CN202630040248.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-08-08
- Filing Date
- 2026-01-26
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2041-01-26
Smart Images
Figure 000011_ABST
Abstract
1. Name of the designed product: pipe plate for gas introduction part 2. Use of the designed product: pipe plate for gas introduction part provided in a gas introduction part in order to flow gas in a semiconductor manufacturing device or the like 3. Design points of the designed product: in shape 4. Picture or photograph best showing the design points: perspective view 1
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