Load port section of wafer cleaning apparatus

Abstract

1. The name of the design product: wafer cleaning device's loading port part. 2. The use of the design product: the design product as a whole is used as a wafer cleaning device, and the claimed part is used as a wafer cleaning device's loading port part. 3. The design points of the design product: the shape of the part shown in solid lines. 4. The picture or photo that best indicates the design points: the enlarged view of part A. 5. Other circumstances that need to be explained: the partial design of the claimed design product is requested, and the claimed part is shown in solid lines in the design picture.

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