Wafer handling self-centering metal fork
CN310247683SActive Publication Date: 2026-10-09YUHONGYAN TECH (SUZHOU) CO LTD
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Patent Information
- Application Number
- CN202630090358.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2026-02-27
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2041-02-27
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Figure 000001_ABST
Abstract
1. The name of the design product: wafer handling self-centering metal fork. 2. The use of the design product: contact part for receiving or transmitting wafer on wafer handling robot in semiconductor process equipment. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.
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