Wafer handling self-centering metal fork

CN310247683SActive Publication Date: 2026-10-09YUHONGYAN TECH (SUZHOU) CO LTD
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Patent Information

Application Number
CN202630090358.1
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Filing Date
2026-02-27
Publication Date
2026-10-09
Estimated Expiration
2041-02-27

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Abstract

1. The name of the design product: wafer handling self-centering metal fork. 2. The use of the design product: contact part for receiving or transmitting wafer on wafer handling robot in semiconductor process equipment. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.
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