Chamber backplate (PECVD)
CN310258660SActive Publication Date: 2026-10-16AIJIBAO ELECTRONIC IND EQUIP (GUANGZHOU) CO LTD
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Patent Information
- Application Number
- CN202630138722.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2026-03-27
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2041-03-27
Smart Images
Figure 000001_ABST
Abstract
1. The name of the design product: chamber backplate (PECVD). 2. The use of the design product: used for the core group backplate of the vacuum chamber in the forming of liquid crystal panel. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view. 5. The design product is a thin product, and the rear view, left view and right view are omitted.
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