Wafer front side scrubbing robot
CN310259275SActive Publication Date: 2026-10-16YUHONGYAN TECH (SUZHOU) CO LTD
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Patent Information
- Application Number
- CN202630107498.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2026-03-11
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2041-03-11
Smart Images
Figure 000001_ABST
Abstract
1. Name of the design product: wafer front surface scrubbing mechanical arm. 2. Use of the design product: suitable for machine equipment cleaning. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view.
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