Process kit ring for substrate processing chamber
CN310265540SActive Publication Date: 2026-10-20APPLIED MATERIALS INC
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202630120423.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-09-25
- Filing Date
- 2026-03-18
- Publication Date
- 2026-10-20
- Estimated Expiration
- 2041-03-18
Smart Images
Figure 000007_ABST
Abstract
1. The name of the design product: processing sleeve ring for substrate processing chamber. 2. The use of the design product: for substrate processing chamber. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1.
Need to check novelty before this filing date? Find Prior Art