Electrostatic chuck

Abstract

1. Name of the product in this design: Electrostatic Chuck. 2. Application of this design: This product is installed, for example, in the vacuum chamber of a vacuum processing device, for adsorbing a rectangular glass substrate that is the object of vacuum processing. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key features: the front view. 5. The bottom view is symmetrical to the top view, so the bottom view is omitted; the right view is symmetrical to the left view, so the right view is omitted. 6. Other situations requiring explanation: In the main view, part E is the upper right part bounded by A-A and B-B in the main view reference drawing.

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