A combined tube of a scanning electron microscope

Abstract

A combined scanning electron microscope tube located in a device (1) with at least one charged particle beam, comprising at least one tube (2) containing a charged particle source (7) producing charged particles, elements for shaping and directing charged particles, an objective (13) at a potential forming an objective lens (15) formed by a magnetic field emanating from the sample, and further a potential tube (18) at a potential different from the potential of the objective (13), located along the optical axis of the tube (2). The upper end of the potential tube (18) is located behind the charged particle source (7) in the direction of the charged particle flow, and the lower end of the potential tube (18) is located in the tube (2) behind the charged particle source (7) in the direction of the charged particle flow and at the same time in front of the objective lens (15) in the direction of the charged particle flow.Between the lower end of the potential tube (18) and the objective lens (15) there is a deceleration electrostatic field arising due to the difference in electric potential between the potential tube (18) and the objective lens (13).