MAGNETIC SENSOR ELEMENT AND METHOD FOR DETERMINING A ROTATIONAL SPEED, A ROTATIONAL DIRECTION AND / OR A ROTATIONAL ANGLE OF A MAGNETIC COMPONENT ABOUT A ROTATIONAL AXIS

DE102017121467B4Active Publication Date: 2026-08-06INFINEON TECHNOLOGIES AG
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Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
INFINEON TECHNOLOGIES AG
Filing Date
2017-09-15
Publication Date
2026-08-06

AI Technical Summary

Technical Problem

Existing magnetic sensor technologies for determining rotational speed, direction, and angle are susceptible to external stray magnetic fields and require complex back-bias magnets and cumbersome connection routing, leading to large sensor dimensions and reduced robustness.

Method used

A magnetic sensor device with a rotationally symmetrical magnet and two magnetic sensor elements within a recess, using a differential sensing principle to eliminate magnetic offset and external stray fields, allowing for compact design and improved performance.

Benefits of technology

The device provides enhanced sensitivity, reduced size, and robustness against external stray fields, enabling True Power On capability and efficient determination of rotational parameters with minimal drift and sensitivity to torsion.

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Abstract

A magnetic sensor element (100) for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component (170) about an axis of rotation, comprising: a magnet (110) that is rotationally symmetric with respect to an axis of symmetry (120), wherein a recess (130) is formed within the magnet (110) along the axis of symmetry (120); a first magnetic sensor element (140) that is arranged within the recess and on the axis of symmetry (120); a second magnetic sensor element (150) that is arranged within the recess and on the axis of symmetry (120); and an integrated circuit (160) that is arranged within the recess and configured to determine the rotational speed,to determine the direction of rotation and / or the angle of rotation of the magnetic component (170) based on a first output signal of the first magnetic sensor element (140) and a second output signal of the second magnetic sensor element (150), wherein an orthogonal projection of the magnet (110) onto the axis of symmetry (120) extends from a first point (P1) on the axis of symmetry (120) to a second point (P2) on the axis of symmetry (120), wherein a minimum distance (d1) from the first magnetic sensor element (140) to the first point (P1) on the axis of symmetry (120) is equal to a minimum distance (d2) from the second magnetic sensor element (150) to the second point (P2) on the axis of symmetry (120),and wherein the minimum distance (d1) from the first magnetic sensor element (140) to the first point (P1) on the axis of symmetry (120) is less than 5% of the distance from the first point (P1) on the axis of symmetry (120) to the second point (P2) on the axis of symmetry (120), wherein at least one of the first magnetic sensor element (140) and the second magnetic sensor element (150) has a magnetoresistive structure, the magnetoresistive structure comprising: a magnetic free layer configured to generate a closed-flux magnetization pattern in the magnetic free layer; and a magnetic reference layer having a reference magnetization pattern with open-flux.
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Description

Area

[0001] Examples refer to a magnetic sensor component and a method for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component about a rotational axis. background

[0002] In some automotive applications (e.g., camshaft detection, wheel speed detection), reverse-biased sensors comprising a Hall effect monocell are used to detect an iron-containing target wheel rotating in front of the sensor. However, such solutions are not robust against external stray magnetic fields. Furthermore, the backbias magnet requires a complex shape (design) to achieve a zero magnetic field at the position of the detecting Hall effect monocell. Additionally, connecting leads for contacting the Hall effect monocell or other sensor components typically have to be routed around large sections of the sensor housing, resulting in large overall sensor module dimensions. Therefore, there is a need for improved magnetic detection techniques. Summary

[0003] Such a need can be met by the examples described herein.

[0004] An example relates to magnetic sensor devices for determining the rotational speed, direction of rotation, and / or angle of rotation of a magnetic component about an axis of rotation. The magnetic sensor device comprises a magnet that is rotationally symmetric with respect to an axis of symmetry, wherein a recess is formed within the magnet along the axis of symmetry. Furthermore, the magnetic sensor device comprises a first magnetic sensor element located within the recess and on the axis of symmetry, and a second magnetic sensor element located within the recess and on the axis of symmetry.The magnetic sensor component additionally includes an integrated circuit that is arranged within the recess and is designed to determine the direction of rotation, the rotational speed and / or the rotational angle of the magnetic component based on a first output signal from the first magnetic sensor element and a second output signal from the second magnetic sensor element.

[0005] Another example relates to a method for determining the rotational speed, direction of rotation, and / or angle of rotation of a magnetic component about an axis of rotation. The method includes determining a first measurement of a magnetic field at a first measurement position within a recess formed in a magnet. The magnet is rotationally symmetric with respect to an axis of symmetry, with the first measurement position located on the axis of symmetry. The method further includes determining a second measurement of the magnetic field at a second measurement position within the recess, with the second measurement position also located on the axis of symmetry. The method additionally includes determining the rotational speed, direction of rotation, and / or angle of rotation of the magnetic component based on the first and second measurements. List of characters

[0006] The following are some examples of devices and / or methods, described solely by way of example and with reference to the accompanying figures, in which Fig. 1 represents an example of a magnetic sensor component for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component about a rotational axis; Fig. 2 represents another example of a magnetic sensor component for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component about a rotational axis; Fig. 3 presents an exemplary comparison of magnetic field strengths along the axis of symmetry; Fig. 4 presents an exemplary comparison of different signals for different distances between a magnetic sensor component and a rotating magnetic component; Fig. Figure 5 shows a flowchart of an example of a method for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component about a rotational axis. Detailed description

[0007] Several examples will now be described in more detail with reference to the accompanying drawings, which illustrate some of these examples. For the sake of clarity, the thickness dimensions of lines, layers, and / or regions in the figures may be exaggerated.

[0008] While further examples of various modifications and alternative forms are possible, some specific examples are shown in the figures and are described in detail below. However, this detailed description does not limit further examples to the specific forms described. Further examples may encompass all modifications, correspondences, and alternatives that fall within the scope of revelation. Throughout the description of the figures, "same reference signs" refer to identical or similar elements that, upon comparison, may be implemented identically or in a modified form while providing the same or a similar function.

[0009] It is understood that when an element is described as "connected" or "coupled" to another element, the elements may be connected or coupled directly or via one or more intermediate elements. When two elements A and B are combined using "or," this is to be understood as revealing all possible combinations, i.e., only A, only B, and A and B. An alternative formulation for the same combinations is "at least one of A and B." The same applies to combinations of more than two elements.

[0010] The terminology used here to describe certain examples is not intended to be limiting for other examples. Where a singular form, e.g., "a" and "the," "a," is used, and the use of only a single element is neither explicitly nor implicitly defined as mandatory, further examples may also use plural elements to implement the same function. Similarly, where a function is subsequently described as being implemented using multiple elements, further examples may implement the same function using a single element or a single processing entity.It is further understood that the terms “include”, “comprehensive”, “exhibit”, and / or “exhibit” when used specify the presence of the indicated features, integers, steps, operations, processes, elements and / or components thereof, but do not exclude the presence or addition of one or more other features, integers, steps, operations, processes, elements, components, and / or a group thereof.

[0011] Unless otherwise defined, all terms (including technical and scientific terms) are used here in their usual meaning within the field to which examples belong.

[0012] Fig. 1 represents a magnetic sensor component 100 to determine the rotational speed, direction of rotation and / or angle of rotation of a magnetic component 170 around an axis of rotation. In the example of Fig. 1. The magnetic component rotates 170 about an axis of rotation that is perpendicular to the plane of the drawing. The magnetic component 170 , which in Fig. Figure 1 is a gear. That is, the magnetic component 170 includes at least one tooth and an adjacent groove. For example, the magnetic component 170 be made of a ferromagnetic material.

[0013] The magnetic sensor component 100 includes a magnet 110 , which is rotationally symmetric with respect to an axis of symmetry 120 is. A cross-sectional view of a ring magnet is shown as an example in Fig. Figure 1 is shown for illustrative purposes. However, it should be noted that any type of rotationally symmetrical magnet can be used (e.g., one in the shape of a truncated cone). The magnet 110It is polarized along its axis of symmetry. That is, the elementary magnetic moments of the magnet are polarized. 110 (also known as elementary or microscopic magnets) are oriented (aligned) along the axis of symmetry. In other words, the magnetic poles of the magnet follow this axis. 110 each other along the axis of symmetry 120 For example, the north pole of the magnet 110 the magnetic component 170 be facing towards, while the south pole of the magnet 110 away from the magnetic component 170 It is oriented (north-south magnetization) and vice versa (south-north magnetization). A recess 130 is inside the magnet 110 along the axis of symmetry 120 educated. As in Fig. As shown in 1, the recess can 130 through the entire magnet 110 extend.

[0014] Furthermore, the magnetic sensor component includes 100includes a first magnetic sensor element 140 , that within the recess 130 is arranged and on the axis of symmetry 120 is arranged (e.g. coaxial to the axis of symmetry) 120 Additionally, the magnetic sensor component includes 100 a second magnetic sensor element 150 , that within the recess 130 is arranged and on the axis of symmetry 120 is arranged (e.g. coaxial to the axis of symmetry) 120 The first and second sensor elements 140 , 150 They can be any type of sensor element suitable for measuring a magnetic field. Using the first and second sensor elements... 140 , 150 A first measurement of the magnetic field is determined at a first measurement position, and a second measurement of the magnetic field is determined at a second measurement position. Since the measurement points lie on the axis of symmetry... 120When arranged in a way that makes the measurement insensitive to rotations of the magnetic sensor component, the measurement is insensitive to these rotations. 100 around the axis of symmetry 120 That is, the magnetic sensor component 100 is insensitive to twisting.

[0015] The magnetic sensor component also includes an integrated circuit. 160 , which are within the recess 130 is arranged. The integrated circuit 160 is designed to control the rotational speed, direction of rotation and / or angle of rotation of the magnetic component 170 based on a first output signal from the first magnetic sensor element 140 and a second output signal from the second magnetic sensor element 150 to determine. For example, the integrated circuit 160 be designed to control the rotational speed, direction of rotation and / or angle of rotation of the magnetic component 170based on a difference between the first output signal and the second output signal of the magnetic sensor elements 140 , 150 to determine the rotational speed, direction of rotation and / or angle of rotation of the magnetic component. 170 Based on the difference between the first and second output signals, a conventional signal analysis can be performed.

[0016] The magnetic sensor component 100 uses a differential detection principle based on magnetic sensor elements 140 , 150 and a simple rotationally symmetric magnet 110 That is, no complicated back-bias magnet is used. The magnetic field at the location of the first magnetic sensor element 140 (the one that is near the magnetic component 170 (arranged) is caused by the magnetic component 170modulated, whereas the magnetic field at the second magnetic sensor element 150 (that is located at the opposite pole, i.e., away from the magnetic component) 170 ) almost not through the magnetic component 170 is influenced by combining the first output signal of the first magnetic sensor element. 140 and the second output signal of the second magnetic sensor element 150 The differential magnetic offset can be eliminated. Furthermore, external stray fields can be eliminated by combining the first output signal of the first magnetic sensor element. 140 and the second output signal of the second magnetic sensor element 150 , since a component relating to the external stray fields is present in both signals. The magnetic sensor component 100 Furthermore, it is insensitive to twisting due to the coaxial arrangement of the magnet. 110 and the magnetic sensor elements 140 ,150 Furthermore, the entire sensor assembly is located inside the magnet. 110 arranged. Accordingly, the magnetic sensor component can be 100 It may be superior in terms of performance and cost. Furthermore, it can offer TPO capability (TPO = True-Power-On), meaning the magnetic sensor component 100 can control the rotation speed, rotation direction and / or rotation angle of the magnetic component 170 Determine immediately after starting, as the magnetic offset can be eliminated due to the differential detection principle.

[0017] The magnetic sensor elements 140 , 150 can be arranged symmetrically within the recess so that both magnetic sensor elements 140 , 150 for the same magnetic operating points are exposed. For example, an orthogonal projection of the magnet extends 110 on the axis of symmetry 120(i.e., a projection where the connecting line between a point of the magnet 110 and the corresponding projection of the point onto the axis of symmetry 120 perpendicular to the axis of symmetry 120 is) from a first point P1 on the axis of symmetry 120 to a second point P2 on the axis of symmetry 120 A minimum distance from the first magnetic sensor element 140 Regarding the first point P1 on the axis of symmetry 120 This can therefore lead to a minimal distance from the second magnetic sensor element. 150 Regarding the second point P2 on the axis of symmetry 120 be.

[0018] Furthermore, the magnetic sensor elements can 140 , 150 near the edges of the magnet 110 be positioned. For example, the minimum distance from the first magnetic sensor element can be 140 Regarding the first point P1less than 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10% of a distance from the first point on the axis of symmetry P1 on the axis of symmetry 120 Regarding the second point P2 on the axis of symmetry 120 be. In other words, the minimum distances from the magnetic sensor elements can be 140 , 150 to the edges of the magnet 110 along the direction through the axis of symmetry 120 is defined as being smaller than 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10% of the extent of the magnet. 110 along this direction. Consequently, the magnetic sensor elements 140 , 150 exposed for small magnetic operation points (e.g. less than 30mT along the direction through the axis of symmetry) 120is defined, and significantly smaller, e.g., 3 mT or less, along directions perpendicular to the axis of symmetry). Absolute vanishing of the magnetic field in the plane can be achieved where the directions are perpendicular to the axis of symmetry. 120 the axis of symmetry 120 cross.

[0019] As previously described, any type of magnetic detection principle can be used for the magnetic sensor elements. 140 , 150 Magnetoresistive sensors can be used. For example, magnetoresistive sensors can be used. That is, at least one of the first magnetic sensor elements. 140 and the second magnetic sensor element 150It may potentially have a magnetoresistive structure. The magnetoresistive structures can be (highly) linear, i.e., exhibit a (highly) linear transfer function when not operated in saturation. Accordingly, highly precise measurements can be achieved. In some examples, the magnetoresistive structure may be based on a vortex sensor principle. That is, the magnetoresistive structure may include a magnetic free layer configured to generate a closed-flux magnetization pattern in the magnetic free layer and a magnetic reference layer with an open-flux reference magnetization pattern. Exemplary vortex sensors are described in US patent application no. 14 / 141,660, German patent application no. 10 2016 102 214.4, German patent application no. 10 2016 112 008.1, or German patent application no. 10 2017 112 546.9, the contents of the applications herein are incorporated in their entirety by reference. Compared, for example, to sensors based on the Hall effect, vortex-based sensors offer many times (e.g., ten times) higher sensitivity (detectability). Accordingly, a distance (air gap) between the magnetic sensor element . 100 and the rotating magnetic component 170 will be increased.

[0020] However, in some examples, magnetic sensor elements based on the Hall effect can be used. That is, at least one of the first magnetic sensor elements 140 and the second magnetic sensor element 150 It may have a Hall effect region where the Hall effect occurs when a magnetic field is present.

[0021] A more detailed example of a magnetic sensor component 200 According to the proposed architecture, in Fig. 2 shown. The magnetic sensor component 200 includes a ring magnet 110 (e.g. made from anisotropic ferrite), which is rotationally symmetric with respect to the axis of symmetry 120 is. A recess 130 is inside the ring magnet 110 along the axis of symmetry 120 formed. The recess 130 extends through the entire magnet 110 The ring magnet 110 is along the axis of symmetry 120 polarizing, which is in Fig. 2 by the sequence of magnetic poles 110-1 , 110-2 of the ring magnet 110 along the axis of symmetry 120 is displayed.

[0022] A first magnetic sensor element 140 and a second magnetic sensor element 150 are within the recess 130 and / or on the axis of symmetry 120The sensor assembly is arranged accordingly. A first measurement of the magnetic field is taken at a first measuring position, and a second measurement of the magnetic field is taken at a second measuring position. The entire sensor assembly is thus located within the magnet. 110 arranged.

[0023] The magnetic sensor elements 140 , 150 are arranged symmetrically within the recess so that both magnetic sensor elements 140 , 150 for the same magnetic operating points. Minimum distances d1, d2 from the magnetic sensor elements. 140 , 150 to the edges of the magnet 110 along the direction through the axis of symmetry 120 As defined, are less than 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10% of the magnet's extent. 110 along this direction. Consequently, the magnetic sensor elements 140 , 150 Exposed for small magnetic operating points. This is in Fig. 3 shown as examples.

[0024] Assume the axis of symmetry 120 is equal to the z-axis in a Cartesian coordinate system, represents Fig. 3 the magnetic field component B z along the z-axis, i.e., the axis of symmetry 120 , measured by the magnetic sensor elements 140 , 150 , which are arranged on the z-axis. Since the magnet 110 is rotationally symmetric with respect to the z-axis and since the magnetic sensor elements 140 , 150 are arranged on the z-axis (i.e., coaxial to the axis of symmetry) 120 ), are the corresponding magnetic field components B x , B y The values ​​along the x-axis and y-axis are zero. The strength of the magnetic field component B z The field strength is represented in arbitrary units. Furthermore, the positioning along the z-axis is given in arbitrary units of length.

[0025] The magnetic field component Bz is suitable for different recess diameters 130 depicted, which are in the ring magnet 110 is formed. Lines 310 until 350 represent the magnetic field component B z for increasing diameter of the recess 130 dar.

[0026] In the example of Fig. 3 the ring magnet extends 110 from z-position 2.00 in any length units to z-position 8.00 in any length units. That is, the ring magnet 110 It has a length of 6.00 arbitrary length units along the z-axis. From Fig. 3. It is obvious that the magnetic field component B z in the direction of the axial ends of the ring magnet 110 decreases and in the middle part of the ring magnet 110 is highest. From Fig. 3. It is furthermore obvious that the magnetic offset (i.e., the displacement of the magnetic field component B) zfrom zero at the edges of the ring magnet 110 ) for increasing diameter of the recess 130 decreases.

[0027] By setting the distances d1, d2 to small values, the magnetic sensor elements can 140 , 150 For small magnetic operating points, it may be exposed. Accordingly, a small drift in the offset of the magnetic field component B can occur. z This can be ensured. Furthermore, the diameter of the recess can be determined. 130 The desired magnetic operating point must be selected. A certain minimum diameter of the recess is required. 130 can be used to place the magnetic sensor elements 140 , 150 inside the ring magnet 110 This must be ensured. That is, the diameter of the recess. 130 It can be used to adjust the magnetic operating point. Furthermore, it can be used to increase the diameter of the recess. 130reducing the sensitivity of the magnetic sensor elements 140 , 150 allow (slight) shifts along the z-axis.

[0028] For example, the ring magnet 110 a diameter of 8 mm and a height (i.e., an extent along the axis of symmetry) 120 ) of 6 mm. The recess 130 It can be a hole with a diameter of 4 mm. The magnetic sensor elements 140 , 150 For example, minimum distances d1, d2 = 0.1mm within the magnet can be used. 110 be positioned. However, it should be noted that the above numerical example is for illustrative purposes only and is therefore not limiting. The dimensions / distances of the individual components of the magnetic sensor assembly 200 can be chosen to be larger and / or smaller compared to the numerical example above.

[0029] The magnetic sensor component 200It also includes an integrated circuit 160 , which are within the recess 130 is arranged. The integrated circuit 160 is designed to control the rotational speed, direction of rotation and / or angle of rotation of the magnetic component 170 based on a first output signal from the first magnetic sensor element 140 (indicating the first measured value) and a second output signal from the second magnetic sensor element 150 (indicating the second measured value). As discussed above, the difference between the first output signal of the first magnetic sensor element can be determined. 140 and the second output signal of the second magnetic sensor element 150 The differential signal can be used in many ways through the integrated circuit. 160 can be calculated. For example, the integrated circuit 160use a Wheatstone bridge or feed the first output signal and the second output signal directly to differential amplifiers.

[0030] Exemplary differential signals are in Fig. Figure 4 shows the amplitude (strength) of the differential signal in arbitrary units for different distances (air gaps) between the magnetic sensor element. 200 and the magnetic component 170 depicted lines 410 until 450 represent the differential signal for increasing distances between the magnetic sensor element 200 and the magnetic component 170 dar.

[0031] In the example of Fig. 4. Let it be assumed that the magnetic component 170 a gear. Fig. Figure 4 represents the rotation of the gear around its axis of rotation by 50°. Initially (i.e., at small rotation angles), a groove is formed for the magnetic sensor component. 200Facing towards. With increasing rotation angle, one tooth of the magnetic component 170 the magnetic sensor component 200 Facing the surface. At large rotation angles, a groove is again present for the magnetic sensor component. 200 turned towards. From Fig. 4 It is obvious that for the different distances between the magnetic sensor component 200 and the magnetic component 170 the amplitude of the differential signal rises to a maximum while the tooth moves against the magnetic sensor element. 200 It moves past. On the other hand, the amplitude is minimal while the groove (notch) is on the magnetic sensor component. 200 moved past. For the short distance 410 between the magnetic sensor component 200 and the magnetic component 170 Overshoots of the tooth edges are visible. These overshoots can be reduced by increasing the distance between the magnetic sensor element. 200and the magnetic component 170 This should be avoided. The distance between the magnetic sensor component 200 and the magnetic component 170 can generally be based on the sensitivity of the magnetic sensor elements 140 , 150 can be selected (e.g., increased distance for magnetic sensor elements with increased sensitivity). For example, the distance between the magnetic sensor element can be adjusted. 200 and the magnetic component 170 will be increased if the magnetic sensor elements 140 , 150 , which have a vortex-based magnetoresistive structure, are used, in contrast to the use of magnetic sensor elements 140 , 150 , which exhibit a Hall effect region.

[0032] The distance between the magnetic sensor component 200 and the magnetic component 170 can be achieved, for example, by using a spacer 295can be enlarged. For example, the spacer can be enlarged. 295 part of the housing (not shown) that holds the magnet 110 includes. The housing can be made from any type of molding compound (e.g., plastic). The spacer 295 It can also serve as a holder for the magnet and the sensor assembly.

[0033] In the example of Fig. 2 are the first magnetic sensor element 140 , the second magnetic sensor element 150 and the integrated circuit 160 integrated on separate chips. The chips themselves are on a substrate. 290 (e.g., on a printed circuit board (PCB), a connector frame, or a chip terminal area). However, it should be noted that the arrangement of the sensing elements is not limited to this specific implementation. For example, the first magnetic sensor element can be 140, the second magnetic sensor element 150 and the integrated circuit 160 be integrated on the same chip, i.e., on a single chip. Alternatively, the integrated circuit can 160 be integrated on a first chip, together with one of the first magnetic sensor elements. 140 and the second magnetic sensor element 150 , the other being one of the first magnetic sensor element 140 and the second magnetic sensor element 150 is integrated on a second (satellite) chip. This means that one, two, or more chips in separate packages can be placed on the carrier. 290 must be fixed. In each of the above examples, the magnetic sensor elements are exposed for the same magnetic operating point, and stray fields can be canceled out by differential field calculation based on both sensor signals.

[0034] The magnetic sensor component 200further includes at least one electrical contact 280 (e.g., a connecting cable) for connecting to an external circuit. The electrical contact 280 and the magnetic component 170 are on opposite sides of the magnet 110 arranged. That is, the magnetic sensor component 200 This shows excellent readout. For example, one or more electrical contacts can... 280 from a surface of the housing that faces a second surface of the housing and the magnetic component 170 The excellent readout capability can enable the electrical contact to be guided around large sections of the magnetic sensor component. 200 to avoid this. Accordingly, the manufacturing of the magnetic sensor component can 200The process steps required, manufacturing time, and costs can be improved. Furthermore, the dimensions of the magnetic sensor component can be optimized. 200 compared to conventional techniques, because the electrical contacts do not surround the magnet. 110 They need to be bent. For example, offset reading can be used to compensate for the positioning tolerances of the magnetic sensor elements. 140 , 150 to deal with it and to enable a finely programmable TPO sampling rate.

[0035] The magnetic sensor component 200 can be advantageous compared to conventional architectures, since the axially polarized ring magnet 110 (e.g., made from sintered ferrite) is a simple and cost-effective backbias magnet. Furthermore, the magnetic sensor component represents 200It offers the same output switching behavior as conventional Hall sensors. Accordingly, it can be used with an external circuit designed for conventional Hall sensors. The excellent readout eliminates the need to bend housing leads, thus simplifying the arrangement of the magnetic sensor component. 200 This can be made possible by the simple design of the ring magnet. 110 Together with the excellent readout capability, the small dimensions of the magnetic sensor component are possible. 200 enable (e.g. in directions perpendicular to the axis of symmetry) 120 Furthermore, when vortex-based magnetic sensor elements 140 , 150 The distance of the magnetic sensor component can be used. 200 to the magnetic component 170The detection range can be increased due to the higher sensitivity (detectability) compared to conventional architectures that use sensors based on the Hall effect. The differential detection principle of the magnetic sensor device. 200 It also enables stray field robustness and TPO capability. The magnetic sensor component 200 Furthermore, it is insensitive to twisting, since the magnetic sensor elements 140 , 150 on the axis of symmetry 120 are arranged (i.e., on the mechanical as well as the magnetic center of symmetry). From Fig. 4. It is obvious that the magnetic sensor component 200 Furthermore, it enables sufficient signal modulation.

[0036] An example of a procedure 500 To determine the rotational speed, direction of rotation and / or angle of rotation of a magnetic component about an axis of rotation, a flowchart is used. Fig. 5 shown. The procedure 500 includes determining 502 a first measurement of a magnetic field at a first measurement position within a recess formed in a magnet. The magnet is rotationally symmetric with respect to an axis of symmetry, the first measurement position being located on the axis of symmetry. Furthermore, the method comprises 500 a determination 504 a second measurement of the magnetic field at a second measurement position within the recess, wherein the second measurement position is arranged on the axis of symmetry. The method 500 additionally includes determining 506 the rotational speed, rotational direction and / or rotational angle of the magnetic component based on the first measurement and the second measurement.

[0037] As previously described, determining the rotational speed, direction of rotation and / or angle of rotation of the magnetic component can involve determining the rotational speed, direction of rotation and / or angle of rotation of the magnetic component based on a difference between the first measurement and the second measurement.

[0038] Further details and aspects of the procedure will be mentioned in connection with the proposed technique or one or more of the examples described above (e.g. Fig. 1 to Fig. 4) The method may include one or more additional optional features corresponding to one or more aspects of the proposed technique or to one or more of the examples described below.

[0039] The aspects and features described together with one or more of the previously detailed examples and figures can also be combined with one or more of the other examples to replace an identical feature of the other example or to additionally introduce the feature into the other example.

[0040] The descriptions and drawings illustrate only the principles of revelation. Furthermore, all examples presented here are expressly intended for teaching purposes only, to assist the reader in understanding the principles of revelation and the concepts contributed by the inventor(s) to the advancement of technology. All statements made here regarding principles, aspects, and examples of revelation, as well as specific examples thereof, are intended to encompass their corresponding concepts.

[0041] It is understood that the disclosure of multiple steps, processes, operations, or functions in the description or claims should not be interpreted as being in a specific order unless explicitly or implicitly stated otherwise, for example, for technical reasons. Therefore, the disclosure of multiple steps or functions does not restrict them to a specific order unless these steps or functions are not interchangeable for technical reasons. Furthermore, in some examples, a single step, function, process, or operation may include and / or be broken down into multiple sub-steps, sub-functions, sub-processes, or sub-operations. Such sub-steps may be included and form part of the disclosure of that single step unless explicitly excluded.

[0042] Furthermore, the following claims are hereby included in the detailed description, where each claim can stand alone as a separate example. While each claim can stand alone as a separate example, it should be noted that—although a dependent claim may refer in the claims to a specific combination with one or more other claims—other examples may also include a combination of the dependent claim with the subject matter of any other dependent or independent claim. Such combinations are explicitly suggested here unless it is stated that a particular combination is not intended. Furthermore, features of a claim for any other independent claim are also to be included, even if that claim is not directly dependent on the independent claim. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] US 14141660

[0019] DE 102016102214

[0019] DE 102016112008

[0019] DE 102017112546

[0019]

Claims

[1] A magnetic sensor element (100) for determining a rotational speed, a rotational direction and / or a rotational angle of a magnetic component (170) about an axis of rotation, comprising: a magnet (110) which is rotationally symmetric with respect to an axis of symmetry (120), wherein a recess (130) is formed within the magnet (110) along the axis of symmetry (120); a first magnetic sensor element (140) which is arranged within the recess and on the axis of symmetry (120); a second magnetic sensor element (150) arranged within the recess and on the axis of symmetry (120); and an integrated circuit (160) which is arranged within the recess and is configured to determine the rotational speed, rotational direction and / or rotational angle of the magnetic component (170) based on a first output signal of the first magnetic sensor element (140) and a second output signal of the second magnetic sensor element (150). [2] The magnetic sensor element according to claim 1, wherein an orthogonal projection of the magnet (110) onto the axis of symmetry (120) extends from a first point on the axis of symmetry (120) to a second point on the axis of symmetry (120), wherein a minimum distance from the first magnetic sensor element (140) to the first point on the axis of symmetry (120) is equal to a minimum distance from the second magnetic sensor element (150) to the second point on the axis of symmetry (120). [3] The magnetic sensor element according to claim 2, wherein the minimum distance from the first magnetic sensor element (140) to the first point on the axis of symmetry (120) is less than 5% of the distance from the first point on the axis of symmetry (120) to the second point on the axis of symmetry (120). [4] The magnetic sensor element according to one of claims 1 to 3, wherein the magnet (110) is polarized along the axis of symmetry (120). [5] The magnetic sensor element according to any one of claims 1 to 4, wherein the recess extends through the entire magnet (110). [6] The magnetic sensor element according to one of the preceding claims, wherein the integrated circuit (160) is configured to determine the rotational speed, direction of rotation and / or angle of rotation of the magnetic component (170) based on a difference between the first output signal and the second output signal. [7] The magnetic sensor component according to one of the preceding claims, wherein the magnetic component (170) has at least one tooth and an adjacent groove. [8] The magnetic sensor element according to one of the preceding claims, wherein at least one of the first magnetic sensor element (140) and the second magnetic sensor element (150) has a magnetoresistive structure. [9] The magnetic sensor element according to claim 8, comprising the magnetoresistive structure: a magnetic free layer designed to produce a closed-flux magnetization pattern in the magnetic free layer; and a magnetic reference layer that has a reference magnetization pattern with non-closed flux. [10] The magnetic sensor element according to claim 8 or claim 9, wherein a transfer function of the magnetoresistive structure is linear. [11] The magnetic sensor element according to any one of claims 1 to 7, wherein at least one of the first magnetic sensor element (140) and the second magnetic sensor element (150) has a Hall effect region. [12] The magnetic sensor element according to one of the preceding claims, further comprising a housing enclosing the magnet (110). [13] The magnetic sensor element according to one of the preceding claims, further comprising one or more electrical contacts for connecting to an external circuit, wherein the one or more electrical contacts and the magnetic component (170) are arranged on opposite sides of the magnet (110). [14] The magnetic sensor element according to one of the preceding claims, wherein the axis of symmetry (120) is perpendicular to the axis of rotation. [15] A method (500) for determining a rotational speed, a direction of rotation and / or a rotational angle of a magnetic component about an axis of rotation, comprising: Determining (502) a first measurement of a magnetic field at a first measurement position within a recess formed in a magnet, wherein the magnet is rotationally symmetric with respect to an axis of symmetry, and wherein the first measurement position is arranged on the axis of symmetry; Determining (504) a second measurement of the magnetic field at a second measurement position within the recess, wherein the second measurement position is arranged on the axis of symmetry; Determine (506) the rotational velocity, direction of rotation and / or angle of rotation of the magnetic component based on the first measurement and the second measurement. [16] The method according to claim 15, wherein determining (506) the rotational speed, direction of rotation and / or angle of rotation of the magnetic component comprises determining the rotational speed, direction of rotation and / or angle of rotation of the magnetic component based on a difference between the first measurement and the second measurement. [17] The method according to claim 15 or claim 16, wherein an orthogonal projection of the magnet onto the axis of symmetry extends from a first point on the axis of symmetry to a second point on the axis of symmetry, wherein a distance from the first measurement position to the first point on the axis of symmetry is equal to a distance from the second measurement position to the second point on the axis of symmetry. [18] The method according to claim 17, wherein the distance from the first measuring position to the first point on the axis of symmetry is less than 5% of the distance from the first point on the axis of symmetry to the second point on the axis of symmetry. [19] The method according to any one of claims 15 to 18, wherein the magnet is polarized along the axis of symmetry. [20] The method according to any one of claims 15 to 19, wherein the axis of symmetry is perpendicular to the axis of rotation.

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