Drive seal, supply interface and transport arrangement as well as procedures

Abstract

Drive seal (202d), comprising: • a rotor and a stator (504), the sealing surfaces (902f, 904f) of which are pressed against each other in a vacuum-tight manner; • several first through-holes (502o) arranged in the rotor and several second through-holes (504o, 514o) arranged in the stator (504), which adjoin each other at the sealing surfaces (902f, 904f); • ​​an additional sealing surface (504f) of the stator (504) opposite the sealing surfaces (902f, 904f), which is arranged between two through-holes of the several second through-holes (504o, 514o) for separating the gases from each other.

Description

[0001] The invention relates to a drive seal, a supply interface and a transport arrangement as well as a method.

[0002] In general, a substrate can be treated (processed), for example by coating, in such a way that its chemical and / or physical properties can be altered. Various coating processes can be used to coat a substrate, such as vapor deposition, e.g., chemical vapor deposition (CVD) or physical vapor deposition (PVD).

[0003] In general, flexible substrates in the form of a strip (e.g., metal strip, foil strip, or glass strip) can be processed in a continuous flow system, for example, coated (and / or otherwise treated) in a foil coating system. A strip substrate can be transported through a processing area by means of a transport system. The transport system can be configured, for example, to process the strip substrate from roll to roll (also known as R2R), whereby the strip substrate is unwound from a first substrate reel, transported through the coating area, and, after coating, rewound onto a second substrate reel (also known as rewinding). The coating system can include a vacuum chamber so that the strip substrate can be processed under vacuum.The substrate winding can, for example, be fed into or out of the vacuum chamber, so that the vacuum chamber must be cyclically ventilated to exchange the tape substrate.

[0004] For some transport devices, it may be necessary for the transport roller to provide particularly high thermal contact with the substrate in order to heat and / or cool it. This thermal contact can be improved, for example, by introducing a gas between the substrate and the transport roller, which convectively overcomes the low thermal conductivity of the vacuum. In essence, the gas fills any remaining voids between the substrate and the transport roller, thus improving heat transfer between them. In such cases, it may also be necessary to remove the introduced gas from the vacuum, for example, to maintain a vacuum with a specific composition or at a specific pressure.

[0005] When a transport roller is supplied with a gas, the gas must be coupled from a stationary feeder into the rotating transport roller via a supply interface. Special requirements may be placed on the supply interface, for example, that it be particularly abrasion-resistant, vacuum-tight, and / or wear-resistant. Conventionally, the supply interface is located on an end face of the transport roller, so that the gas is introduced directly into the rotating side wall of the transport roller.

[0006] According to various embodiments, it has been recognized that a conventional supply interface has low process reliability, i.e., it carries a high risk of contaminating or interrupting the process.

[0007] It was clearly demonstrated that if the supply interface is located on the side of the conveyor roller, significant effort is required to reliably seal it. For example, the supply interface can leak and / or exhibit high wear, leading to process contamination from escaping gas and / or abrasion. Generally, achieving a high degree of sealing reliability requires intensive physical contact between the supply interface and the conveyor roller, resulting in high wear and / or abrasion (e.g., particle generation). This necessitates frequent maintenance and incurs high costs due to the associated process downtime. Conversely, minimizing abrasion carries a high risk of the supply interface developing a leak on its own and / or the contact becoming faulty.

[0008] Furthermore, it was recognized that if the supply interface itself develops a leak, the gas can also escape unhindered into the vacuum region. This typically necessitates the maintenance and / or replacement of the supply interface, which incurs high costs due to the associated process downtime.

[0009] According to various embodiments, a sealing arrangement, a drive seal, a supply interface, a supply housing and a transport arrangement as well as a method are provided, which provide a higher level of process reliability.

[0010] In various embodiments, the transport roller is supplied through its shaft, which simplifies sealing and minimizes abrasion (e.g., due to the smaller circumference).

[0011] According to various embodiments, a sealing arrangement, e.g., a drive seal, can comprise: a rotor and a stator, whose two sealing surfaces are pressed against each other in a vacuum-tight manner; several first through-holes arranged in the rotor and several second through-holes arranged in the stator, which border each other at the two sealing surfaces (e.g., at least partially align with each other and / or are arranged in a ring-shaped area); an additional sealing surface opposite the two sealing surfaces, which is arranged between two through-holes of the several second through-holes for separating the gases from each other.

[0012] Exemplary embodiments of the invention are shown in the figures and are explained in more detail below.

[0013] They show Fig. 1. A transport arrangement according to various embodiments in a schematic perspective view; Fig. 2 a transport arrangement according to various embodiments in a schematic perspective cross-sectional view, as well as Fig. 3 these in a cross-sectional view; Fig. 4 a transport arrangement according to different embodiments in a schematic detail view; Fig. 5 a transport arrangement according to various embodiments in a schematic side view (with viewing direction towards the front); Fig. 6 a sealing arrangement according to various embodiments in a schematic top view, as well as Fig. 7 these in a perspective view, as well as Fig. 8 and Fig. 9 these in a schematic cross-section; Fig. 10 a transport arrangement according to different embodiments in a schematic cross-sectional view; Fig. 11A and Fig. 11B each a transport arrangement according to different embodiments in a schematic side view or cross-sectional view; and Fig. 12A and Fig. 12B each a vacuum arrangement according to different embodiments in a schematic side view or cross-sectional view.

[0014] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0015] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0016] Depending on the specific embodiment, the term "coupled" or "coupling" can be understood as a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), whether direct or indirect. Several elements can, for example, be coupled along an interaction chain, which transmits the interaction. Depending on the specific embodiment, "coupled" can also be understood as a mechanical (e.g., physical) coupling, for example, by means of direct physical contact. A coupling can be designed to transmit a mechanical interaction (e.g., force, torque, etc.).

[0017] According to various embodiments, a transport arrangement can provide roll-to-roll transport (visually, a wrapping) of a tape substrate, e.g., by means of a first wrapping roll unwinding from a first substrate winding and by means of a second wrapping roll winding onto a second substrate winding.

[0018] According to various embodiments, the substrate (e.g., the ribbon substrate) can comprise or be formed from at least one of the following: a ceramic, a glass, a semiconductor (e.g., an amorphous, polycrystalline, or monocrystalline semiconductor, e.g., silicon), a metal (e.g., aluminum, copper, iron, steel, platinum, gold, etc.), a polymer (e.g., plastic), and / or a mixture of different materials, such as a composite material (e.g., carbon fiber-reinforced carbon or carbon fiber-reinforced plastic). For example, the substrate (e.g., the ribbon substrate) can comprise or be formed from a plastic film, a semiconductor film, a metal film, and / or a glass film, and may optionally be coated. Alternatively or additionally, the substrate can, for example, comprise fibers, e.g., glass fibers, carbon fibers, metal fibers, and / or plastic fibers.in the form of a woven fabric, a net, a knitted fabric, a knitted fabric or as felt or fleece.

[0019] According to various embodiments, a substrate can be transported as a strip (also called a strip substrate) from roll to roll (i.e., wound between the winding rollers). The strip substrate can, for example, have a width (extent perpendicular to the transport direction) ranging from approximately 30 cm to approximately 500 cm, or a width (also called substrate width) greater than approximately 500 cm. Furthermore, the strip substrate can be flexible. In essence, a strip substrate can be any substrate that can be wound onto a roll and / or processed, for example, from roll to roll. Depending on the elasticity of the material used, the strip substrate can have a thickness (also called substrate thickness) ranging from approximately a few micrometers (e.g., approximately 1 µm) to approximately a few millimeters (e.g., up to approximately 10 mm), for example, from approximately 0.01 mm to approximately 3 mm.The transport rollers of the transport arrangement can be axially longer than the width of the belt substrate.

[0020] Within the context of this description, the term "metallic" can be understood as containing or being formed from a metal. Within this context, a metal (also referred to as a metallic material) can contain (or be formed from) at least one metallic element (i.e., one or more metallic elements), for example, at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni), silver (Ag), chromium (Cr), platinum (Pt), gold (Au), magnesium (Mg), aluminum (Al), zirconium (Zr), tantalum (Ta), molybdenum (Mo), tungsten (W), vanadium (V), barium (Ba), indium (In), calcium (Ca), hafnium (Hf), samarium (Sm), silver (Ag), and / or lithium (Li). Furthermore, a metal can contain or be formed from a metallic compound (e.g., an intermetallic compound or an alloy), for example, a compound of at least two metallic elements (e.g., from the group of elements), such as bronze or brass, or, for example,a compound consisting of at least one metallic element (e.g. from the group of elements) and at least one non-metallic element (e.g. carbon), such as steel.

[0021] Depending on its application and configuration, a transport roller can be designed in various ways. For example, a transport roller can serve as a guide (e.g., active or passive) and / or deflector of the transport path, for temperature control (e.g., cooling), or for driving the substrate transport. Such a temperature control roller (also called a temperature roller), e.g., a cooling roller, can be driven, and its rotation can drive the substrate transport. The temperature roller can, for example, have a metal surface (e.g., a steel roller), be ground, and / or polished. This can minimize mechanical stress on the strip substrate caused by the temperature roller and / or slippage.

[0022] According to various embodiments, a controlled gas supply and exhaust to a temperature control roller (in which case also referred to as a gas temperature control roller or gas cooling roller), e.g., a cooling roller (in which case also referred to as a gas cooling roller or gas cooling roller), is provided by means of gas exchange openings in the temperature control roller. Such a gas temperature control roller can be used, for example, in a vacuum system for coating metal strips and / or film strips. This system can implement the gas supply or extraction depending on the wrap angle (the angle along which the substrate and transport roller are in contact).

[0023] The (e.g., regulated) gas supply and discharge of a gas temperature control roller prevents unwanted flooding of the vacuum system with gas. According to various embodiments, the gas is not coupled in at the end faces of the gas temperature control roller, which are located in the process area and thus emit abrasion (e.g., particles) into the process area and, in the event of a leak, contaminate the process area. Instead, the gas is coupled in via (e.g., on and / or within) the shaft by which the gas temperature control roller is mounted, e.g., in or on its own atmosphere.

[0024] According to various embodiments, a transport roller (e.g., as a process roller for film coating systems) is provided, by means of which a gas (e.g., argon) can be guided between the outer surface (also referred to as the outer surface or circumferential surface) of the transport roller (e.g., process roller) and the substrate. For this purpose, the outer surface of the transport roller has radial exchange openings. A series of exchange openings (e.g., arranged collinearly) can be interconnected and / or supplied with gas via a cavity (e.g., extending parallel to the axis of rotation of the process roller), e.g., a bore. Optionally, an elbow fitting can be arranged on the end face of the process roller for each cavity, screwed into the process roller. Each elbow fitting can be connected, for example, by means of a gas line (e.g., a hose and / or pipe) to an opening (e.g., a bore) in the rotating part of a sealing assembly (also referred to as a rotor), e.g.,a drive seal and / or a direct (e.g. physical) connection (e.g. with the shaft as described below), e.g. by means of the shaft.

[0025] The surface area (also called enveloping surface) can be understood as the (e.g. circumferential) surface that is created by rotating a line around an axis of rotation.

[0026] The static part of the sealing assembly (also called the stator) can have corresponding openings (the number of which differs from the rotor), which are divided into two groups. A first group can be connected to a gas supply (e.g., an argon supply). A second group can be connected to a pressure sink (e.g., a pump, such as a turbomolecular pump).

[0027] The arrangement of openings (e.g., bores) in the stator can be configured such that the first group supplies those exchange openings where a substrate is in contact with the transport roller (e.g., process roller), while the second group is connected to the exchange openings where no substrate is in contact with the transport roller (e.g., process roller), where the substrate detaches from the transport roller, and / or where the substrate is applied to the transport roller. For example, the second group can also be connected to the openings where the substrate is just barely or just no longer in contact with the transport roller (e.g., cooling roller). In this way, the gas can be extracted before it flows into the process chamber.

[0028] Gas supply and / or exhaust can be regulated by means of a sealing arrangement (e.g., a track seal) with openings (e.g., bores or milled recesses). The openings can be located on the lapped sealing surfaces of the sealing arrangement and extend perpendicularly into the sealing arrangement. Depending on the angle of rotation, an opening can be positioned opposite a ventilation area (to which gas is supplied) or an evacuation area (to which gas is extracted), thus gassing or venting the transport roller.

[0029] The openings can optionally differ in their spatial distribution (e.g. number and / or arrangement) in the two sealing elements (e.g. drive seal rings) of the sealing arrangement.

[0030] The spatial distribution of the openings (e.g., bore distribution) of the drive shaft sealing ring that rotates with the gas cooling roller (or more generally: the rotor) can be uniform, for example, by having adjacent openings spaced at the same angle and thus the same radian measure (i.e., angularly equidistant). The spatial distribution of the openings of the drive shaft sealing ring (or more generally: the stator) that is statically mounted (i.e., fixed in position and / or rotationally secured, e.g., by means of a torque arm) can be irregular (e.g., more irregular than on the rotor). This allows for continuous (e.g., interval-free and / or continuous) gas supply and extraction. Alternatively or additionally, the spatial angular distribution of the openings of the drive shaft sealing ring can have a different spacing than that of the rotor.

[0031] According to various embodiments, a fluid can contain or be formed from a gas or a liquid and / or be gaseous and / or liquid (e.g. at room temperature).

[0032] Fig. Figure 1 illustrates a transport arrangement 100 according to various embodiments in a schematic perspective view.

[0033] The transport arrangement 100 may feature: a transport roller 112 (e.g. a gas cooling roller) 112 or gas cooling roller), which has a (e.g. cylindrical) outer surface 112m features, and a supply housing 114 The supply housing 114 and the transport roller 112 They can be provided together, e.g. mounted next to each other, or individually, e.g. separately from each other.

[0034] The transport roller 112It may, for example, also have a temperature control device, as will be described in more detail later.

[0035] The supply housing 114 can make an initial connection 114e (e.g. an evacuation connection) and a second connection 124b (e.g., a ventilation connection). In a mounted state and / or during operation, the first connection may 114e with a pump arrangement 116 The pump assembly must be connected via a fluid-conducting (e.g., gas-conducting) connection. 116 The pump arrangement may include, for example, a pump, e.g., a backing pump (not shown) and / or a high-vacuum pump (not shown), such as a turbomolecular pump. Optionally, the pump arrangement may include 116 a pipeline 116e have which connect the pump (e.g., pre-pump and / or high-vacuum pump) to the first connection 114e fluid-conducting connection. Alternatively or additionally, the second connection can be 124bbe fluid-conducting (e.g., gas-conducting) with a gas supply arrangement (not shown). The gas supply arrangement can, for example, be a gas source (not shown, see below). Fig. 12A and Fig. 12B), such as a gas tank, a gas cylinder, or similar. Optionally, the gas supply arrangement may include a pipeline (not shown) connecting the gas source to the second connection. 124b connects fluid-conducting components and / or is designed to control (and / or regulate) a gas flow within it (e.g. by means of a valve), e.g. based on a pressure in the vacuum chamber and / or a temperature of the substrate.

[0036] The transport arrangement 100 can also be a wave 118 exhibit which the transport roller 112 (e.g., rotatably) mounted. The shaft 118 can enter the supply housing 114extend into it and / or be rotatably supported within it.

[0037] In an assembled state and / or in operation, the transport arrangement 100 optionally include a drive (not shown) which is connected to the shaft 118 is coupled, for example on the supply housing 114 opposite side of the wave 118 .

[0038] The lateral surface 112m can be from several initial openings 112o (also known as replacement openings) 112o (designated) be penetrated. The exchange openings 112o For example, they can have several groups of openings, all of which are arranged collinearly (e.g. extending in the axial direction).

[0039] The transport arrangement 100 Furthermore, a management structure can 120 exhibiting which the first connection 114e and / or the second connection 124bwith the exchange openings 112o fluid-conducting connection, e.g. by means of a shaft 118 , as will be described in more detail later.

[0040] The transport roller 112 can be clearly illustrated using the power supply housing 114 It can be supplied with a fluid (e.g., a gas). For example, the fluid (e.g., the gas) can be supplied via the supply housing. 114 the transport roller 112 supplied and / or extracted (i.e., removed). The supply housing 114 This ensures that the area where the fluid is transferred between the static and rotating components is sealed to the outside in a vacuum-tight manner. This reduces the risk of gas escaping into the vacuum and thus increases process reliability.

[0041] Fig. Figure 2 illustrates a transport arrangement 200 e.g. transport arrangement 100, according to various embodiments in a schematic perspective cross-sectional view and Fig. 3 these in a schematic side cross-sectional view 300 (both cut along the axis of rotation) 111d the transport order 200 ; 300 The transport arrangement 200 can a sealing arrangement 202 (e.g. a drive seal) 202d) exhibiting, which will be described in more detail later. The wave 118 For example, it can have two shaft segments between which the transport roller 112 is coupled and / or held together. For example, the two shaft segments can be joined or will be joined. Alternatively, the shaft can 118 be designed as a single piece, i.e. the two wave segments can be part of a single body.

[0042] Optionally, the transport arrangement can be 200 at least one temperature control device 1124exhibiting, which may include, for example, a heat sink and / or heat source, e.g., a heat exchanger, a (e.g., electrical) heat radiation source, and / or a cooling device. The temperature control device 1124 and / or at least one of its components can, for example, be located within the transport roller 112 be arranged. Alternatively or additionally, the or an additional temperature control device can be used. 1124 (and / or any other component thereof) outside the transport roller 112 be arranged.

[0043] The (e.g. rotationally symmetric) lateral surface 112m the transport roller 112 can be vividly described as the outer surface of the roller casing 112h (e.g. provided in the form of a hollow cylinder) the transport roller 112 be understood. For example, the transport roller 112 a (e.g. cylindrical) chamber whose roller shell 112ha hollow cylinder which is connected by means of end walls 112s (frontally and / or vacuum-tight) is sealed and / or closed.

[0044] The management structure 120 can contain one or more cavities 112v (also as a distributor) 112v (designated) in the transport roller 112 (e.g. the roller coat) 112h) exhibiting, each of which is a distributor 112v all openings of a group of exchange openings 112o connects them in a fluid-conducting (gas-conducting) manner. The cavities 112v They can be designed, for example, as a blind hole (e.g., a blind hole bore) or as a through hole (e.g., a through hole bore). A through hole bore can be easier to manufacture and / or clean than a blind hole bore. Optionally, the through hole bore can be sealed on one side, e.g., by a seal and / or a plug.

[0045] Optionally, the line structure can be 120several pipelines 120r (e.g. hoses) which are at least partially outside the transport roller 112 run and / or each pipeline has at least one distributor 112v The wave is connected to the gas-conducting shaft, e.g., bijectively assigned to each other. Alternatively or additionally, the conduit structure can be... 120 several cavities 120b (also known as axial conductor) 120b (designated) in the wave 118 exhibiting which (for example, by means of the pipelines) 120r) with the distributors 112v are connected. For example, any axial conductor can 120b with at least (e.g., exactly) one distributor 112v to be connected or become connected, e.g., bijectively assigned to each other.

[0046] Fig. Figure 4 illustrates a transport arrangement 400 e.g. transport arrangement 100 or 200, according to various embodiments in a schematic detail view (sectioned along the axis of rotation) 111d the transport order 400 The supply housing 114 can a receiving opening 114o exhibiting one of the housing walls of the supply housing 114 formed cavity 114h outside the supply housing 114 connects.

[0047] The cavity 114h can provide an initial supply area 414a (e.g. an evacuation area) and a second supply area 414b (e.g. a ventilation area) which, for example, is attached to the wave 118 adjacent. The first connection 114e can be used with the first supply area 414a and the second connection 124b (not visible in the view) can be connected to the second supply area 414b be fluid-conducting.

[0048] The supply housing 114 can also create a sealing area 114d feature, in which the sealing arrangement is optionally 202 is arranged. The sealing arrangement 202 can, for example, at the wave 118 be installed and the first supply area 414a from the second supply area 414b Fluid separation (e.g., vacuum-tight separation), e.g., gas separation.

[0049] For example, the sealing arrangement can 202 a drive seal 202d exhibit or be formed from it. The sealing arrangement 202 An elastomer seal can be optionally used. 402 (e.g. a ring seal, e.g. an O-ring) which has a gap between the drive seal 202d and the housing wall of the supply housing 114 and / or between the drive seal 202d and the wave 118 (not shown) seals.

[0050] Furthermore, the supply housing 114 (e.g. in their recording area) 414c) , e.g., the case wall, a first paragraph 404n (e.g. a fold) in which a bearing 404 (e.g., a rotary bearing) which supports the shaft so that it can rotate (e.g., braces it). Alternatively or additionally, the supply housing can 114 (e.g. in their recording area) 414c) e.g., its housing wall, a second groove 414n or a second paragraph 414n (e.g. a fold) in which an additional elastomer seal 412 (e.g. ring seal) 412 ) is recorded, which creates a gap between the wave 118 and the cavity 114h seals. The additional elastomer seal 412 can between the warehouse 404 and the cavity 114h be arranged or the warehouse 404 can be used to choose between the additional elastomer seal 412 and the cavity114h be arranged. In general, any other vacuum sealing ring can be used instead of an elastomer seal, which is, for example, vacuum-tight and / or vacuum-compatible.

[0051] One or each fold can, for example, be set up as a stepped fold (i.e., limited by only two surfaces).

[0052] Optionally, the line structure can be 120 multiple connections 120a in the wave 118 exhibit, into which the several pipelines 120r are plugged in. Alternatively or additionally, the cable structure 120 several connections (not shown) in the transport roller 112 exhibit, into which the several pipelines 120r are plugged in.

[0053] The sealing arrangement 202 e.g. the drive seal 202d , can a first sealing element 502 (e.g. a rotor) 502, e.g. a rotor drive seal ring) and a second sealing element 504 (e.g., a stator, e.g., a stator drive seal). The first sealing element 502 can reach the wave 118 be mounted and / or between the second sealing element 504 and the wave 118 be arranged. The second sealing element 504 can be mounted to and / or held against the housing wall, e.g. by means of the elastomer seal 402 and / or by means of a torque support.

[0054] Fig. Figure 5 illustrates a transport arrangement 500 e.g. transport arrangement 100 , 200 or 400 , according to various embodiments in a schematic rear view (e.g. with viewing direction along the axis of rotation of the transport arrangement) 500 According to various embodiments, the pipelines can 120rextend radially and / or in a star shape and / or on the transport roller 112 be attached.

[0055] Fig. Figure 6 illustrates a sealing arrangement. 202 e.g. the sealing arrangement 202 in transport arrangement 100 , 200 , 400 or 500 , according to various embodiments in a schematic top view (e.g. with a view along the axis of rotation of the transport arrangement) 600 ), Fig. 7 these in a perspective view 700 and Fig. 8 of these in a schematic cross-section 800 (e.g., with a viewing direction perpendicular to the axis of rotation) 111d the transport arrangement and along a flat surface in which the axis of rotation 111d lies, cut) as well as Fig. 9 in a schematic cross-section 900 (e.g., with a viewing direction perpendicular to the axis of rotation) 111d the transport arrangement and along a rotational surface of the axis of rotation 111dcut).

[0056] The sealing arrangement 202 can the first sealing element 502 and the second sealing element 504 exhibit, for example, their sealing surfaces 904f , 902f (also referred to as sliding sealing surfaces) lie against each other and / or can be pressed against each other. To the second sealing element 504 The elastomer seal can optionally be used. 402 to, for example, its first sealing element 502 opposite sealing surface 504f (also known as third sealing surface or separation sealing surface) 504f designated).

[0057] The second sealing element 504 can be accessed from multiple openings 504o , 514o (also referred to as second openings or second through-openings) which can be visualized as several fluid lines 504o , 514o (hereinafter also referred to simply as stator fluid lines) 504o , 514o(designated) provide.

[0058] As in Fig. 8 and Fig. As illustrated in 9, the stator fluid lines can 504o , 514o from its sliding sealing surface 904f or the first sealing element 502 out into the second sealing element 504 its extension.

[0059] Of the several stator fluid lines 504o , 514o can at least one (i.e., exactly one or more than one) first opening occur 504o through the second sealing element 504 (e.g., section by section in a radial direction, kinked and / or curved) to a first area 504b extend through (hereinafter also referred to simply as radial stator fluid line) 504o (referred to as). Alternatively or additionally, at least one (i.e., exactly one or more than one) second opening may be present. 514o through the sealing element 504(e.g., extending section by section or completely in the axial direction) to a second area 514b extend through (hereinafter also referred to simply as axial stator fluid line) 514o (designated). The second area 514b for example, on one of the sealing surfaces 904f or the side of the second sealing element opposite the first sealing element 504 be arranged. The first area 504b for example, on one of the sealing surfaces 904f or the first sealing element 502 facing side of the second sealing element 504 and / or between these and the second area 514b be arranged.

[0060] The at least one radial stator fluid line 504o and / or the first area 504b can (e.g., in the assembled state and / or in operation) connect to the first supply area 414aadjacent (e.g., in the radial direction). Alternatively or additionally, at least one axial stator fluid line can be used. 514o and / or the second area 514b (e.g. in the assembled state and / or in operation) to the second supply area 414b adjacent (e.g. in the axial direction).

[0061] Between the first area 504b and the second 514b can the second sealing element 504 a sealing surface 504f exhibit, for example, the elastomer seal 402 is located (shown here in section). For example, the sealing surface 504f by means of a groove (or more generally a recess or notch) in the second sealing element 504 be or will be provided.

[0062] For example, the first area can 504bbe segment-shaped and / or have a segment-shaped surface to which at least one radial stator fluid line is attached 504o adjacent and / or open. Alternatively or additionally, the second area 514b be annular (e.g., annular-segmental) and / or have an annular (e.g., annular-segmental) surface to which at least one axial stator fluid line is attached. 514o adjacent and / or open.

[0063] The at least one radial stator fluid line 504o For example, multiple radial stator fluid lines can be used. 504o (also known as the first group of stator fluid lines) 504o designated) exhibit which are at a distance from the axis of rotation 111d (also referred to as the axis of rotation), for example all radial stator fluid lines. 514o equidistant from the axis of rotation 111dAlternatively or additionally, adjacent radial stator fluid lines can be used. 514o be or become equidistant from one another, e.g. according to an angle with respect to the axis of rotation 111d (i.e., angular equidistant).

[0064] The at least one axial stator fluid line 514o For example, multiple axial stator fluid lines can be used. 514o (also known as the second group of stator fluid lines) 514o designated) exhibit which are at a distance from the axis of rotation 111d (also referred to as the axis of rotation), for example all axial stator fluid lines. 514o equidistant from the axis of rotation 111d Alternatively or additionally, adjacent axial stator fluid lines can be used. 514o be or become equidistant from one another, e.g. according to an angle with respect to the axis of rotation 111d (i.e., angular equidistant).

[0065] The first sealing element502 can be accessed from multiple openings 502o (also referred to as first openings or first through-openings) which can be visualized as several fluid lines 502o (hereinafter also referred to as rotor fluid lines) 502o (designated) provide.

[0066] As in Fig. 8 and Fig. As illustrated in 9, the rotor fluid lines can 502o from the coupling area 502k into the first sealing element 502 It extends into. Of the several rotor fluid lines 502o can at least one (i.e., exactly one, more than one, or every) opening 502o through the first sealing element 502 (e.g., extending section by section or completely in the axial direction) to its sealing surface 902f extend through it.

[0067] According to various embodiments, the sealing surface 902f of the first sealing element 502(also as the first sealing surface) 902f (designated) and / or the sealing surface 904f of the second sealing element 504 (also as a second sealing surface) 904f (designated) ring-shaped and / or surfaces of revolution with respect to the axis of rotation 111d be.

[0068] For example, the first sealing surface can 902f have a different number (e.g. more or fewer) of fluid lines than the second sealing surface 904f This allows for a more uniform gas exchange, since at least two fluid lines are aligned or at least overlapping at every rotational angle. For example, the sealing arrangement 202 a different number (e.g. more or less) of stator fluid lines 514o exhibit as rotor fluid line 512o or vice versa.

[0069] To the first sealing element 502 The wave can optionally be 118coupled, e.g. mounted, be, e.g. on its second sealing element 504 opposite coupling area 502k For example, any axial conductor can then 120b with (e.g., exactly) one rotor fluid line 512o which at least has a rotor fluid line 512o to be connected, e.g. bijectively assigned to each other.

[0070] Fig. Figure 10 illustrates a transport arrangement 1000 e.g. transport arrangement 100 , 200 , 400 , 500 or 600 , according to various embodiments in a schematic cross-sectional view (e.g. with viewing direction perpendicular to the axis of rotation) 111d the transport order 1000 ), e.g. in a process according to various embodiments.

[0071] According to various embodiments, the sealing arrangement can 202 e.g. with its first sealing element 502 (e.g. the rotor), to the shaft 118be coupled, for example, by means of a coupling structure 1002 (e.g. having holes, bores, threads and / or other positive locking devices).

[0072] Operating the transport arrangement 1000 e.g. transport arrangement 100 , 200 , 400 , 500 or 600 , can in a process according to various embodiments: transporting and / or deflecting a substrate by means of a transport roller (not shown), e.g. along a transport path and / or through a processing area; introducing 1003 of gas between the substrate and the transport roller (e.g., its outer surface); extraction 1005 of gas via the transport roller (e.g. from an area next to the substrate); whereby the introduction 1003 and the withdrawal 1005The transfer of gas is achieved through a bearing arrangement (e.g., its adjacent and / or sliding sealing surfaces), by means of which the transport roller is rotatably mounted, and simultaneously transports and / or deflects it. The bearing arrangement 202 , 118 can at least the sealing arrangement 202 , as described herein, and / or the wave 118 exhibit, as described herein.

[0073] For example, initiating 1003 and / or the withdrawal 1005 exhibit: Provide pressure in the first supply area 414a of smaller than in the second supply area 414b and / or smaller than in the processing range, e.g., smaller than approximately 1 mbar, e.g., 10 -2 mbar, e.g. 10 -3 mbar (millibar). Alternatively or additionally, the introduction 1003 and / or the withdrawal 1005exhibit: Provide pressure in the second supply area 414b greater than in the processing area, e.g. greater than approximately 1 mbar, e.g. in a range from approximately 1 mbar to approximately 10 mbar.

[0074] The gas may, for example, be an inert gas and / or a noble gas, or be formed from one of these, e.g., argon.

[0075] For example, the substrate may consist of or be composed of a ribbon substrate. Alternatively or additionally, the substrate may consist of or be composed of a multitude of filaments.

[0076] Optionally, the substrate can be processed, for example, in the processing area. Processing (also referred to as treatment) of the substrate (e.g., a ribbon substrate) can include at least one of the following: cleaning the substrate, coating the substrate with a coating material, irradiating the substrate (e.g., with light, such as coherent light or UV light, or with particles, such as electrons and / or ions, etc.), modifying the substrate surface, heating the substrate, etching the substrate, and inducing glowing in the substrate. For example, the front surface of the substrate can be processed, e.g., modified. Alternatively or additionally, the substrate can be temperature-controlled using the transport roller, e.g., cooled and / or heated. For example, temperature control of the substrate can be achieved by adding and / or removing thermal energy from the outer surface of the transport roller.Optionally, the temperature of the substrate can be controlled and / or regulated.

[0077] The coating material may consist of or be composed of at least one of the following materials: a metal; a transition metal; an oxide (e.g., a metal oxide or a transition metal oxide); a dielectric; a polymer (e.g., a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a metalloid (e.g., carbon); a perovskite; a glass or glass-like material (e.g., a sulfide glass); a semiconductor; a semiconductor oxide; a semi-organic material; and / or an organic material. The coating material for coating the substrate may be provided by a coating material source, e.g., in a gaseous state.

[0078] Fig. 11A illustrates a transport arrangement 1100 e.g. transport arrangement100 , 200 , 400 , 500 , 600 or 1000 according to various embodiments in a schematic side view or cross-sectional view (e.g. with viewing direction along an axis of rotation) 111d the transport order 1100 ) and Fig. 11B the transport order 1100 with embedded substrate 102 in a wrapping configuration 1100b .

[0079] According to various embodiments, the transport arrangement can 1100 several rotatably mounted winding sleeve couplings 112a , 112b , 112c have, for example, at least three winding sleeve couplings 112a , 112b , 112c Each winding sleeve coupling 112a , 112b , 112c the multiple winding sleeve couplings 112a , 112b , 112cIt can be configured to receive and store (couple) a winding sleeve. Each winding sleeve coupling of the multiple winding sleeve couplings 112a , 112b , 112c can rotate around an axis 101a be mounted on a rotatable bearing.

[0080] A winding sleeve (also called a coil) can be understood as a tubular support through which a flexible material can be stored or wound in the form of a coil, i.e., wound onto or unwound from a coil. The flexible material can, for example, be a substrate. 102 to form, or at least be part of, something that can be processed later. For example, a substrate can be formed using a winding sleeve. 102 wrapped around, e.g., wound onto or unwound from, (also called substrate winding sleeve). The flexible substrate 102 can be connected between two winding sleeve couplings 112a , 112bthe multiple winding sleeve couplings 112a , 112b , 112c be wrapped, e.g. from a first substrate wrapping sleeve to a second substrate wrapping sleeve.

[0081] Alternatively or additionally, a flexible material can serve as an optional intermediate layer. 104 to form, or at least be part of, an intermediate layer. This layer can be located between individual layers of a winding. 102w of the substrate 102 (also as substrate wrapping) 102w (designated) be or become arranged. In other words, the substrate can 102 and the intermediate layer 104 be or become intertwined. By means of the intermediate layer 104 Can physical contact between individual layers of the substrate wrap occur? 102w This prevents the substrate from being affected. 102 and / or protects its coating.

[0082] According to various embodiments, the optional intermediate layer can be created by means of an additional winding sleeve. 104 wrapped, e.g. wound onto it or unwound from it (also called an interlayer winding sleeve).

[0083] Furthermore, the transport arrangement can 1100 at least one rotatable transport roller 112 (e.g. a gas cooling roller) 112 ) exhibit, as described herein. Which includes at least one transport roller 112 can rotate around an axis 111d be mounted on rotatable bearings. The axes of rotation 101a the winding sleeve couplings 112a , 112b , 112c can be parallel to each other, e.g. parallel to the axis of rotation 111d the transport roller 112 .

[0084] The transport roller 112 can create a curved transport path 111define (various possibilities illustrated by dashed lines) along which the transport 111w e.g., wrapping 111w , of the substrate 102 can be achieved by means of at least one rotatably mounted transport roller 112 be redirected, guided and / or pulled. The transport path 111 can in a processing area 111b e.g. vacuum range 306b and / or 308b , be arranged (cf. Fig. 12A and Fig. 12B).

[0085] Diverting the transport path 111 by means of each transport roller 112 which has at least one rotatable transport roller 112can have an angle (visually, the difference between the incoming and outgoing transport paths). This angle can also be called the minimum wrap. The minimum wrap can be greater than approximately 10°, e.g., greater than approximately 20°, e.g., greater than approximately 30°, and / or smaller than an angle (also called the central angle) that defines the circular segment 504b of the stator 504 spans, i.e., in which all fluid lines of the first group stator fluid lines 504o are arranged.

[0086] Fig. 12A and Fig. Figures 12B each illustrate a vacuum arrangement 1200a , 1200b according to various embodiments in a schematic side view or cross-sectional view (with viewing direction along the axis of rotation) 111d) , wherein the vacuum arrangement 1200a , 1200b a transport arrangement 1200 e.g. transport arrangement 100 ,200 , 400 , 500 , 600 , 1000 or 1100 , exhibits.

[0087] Wrapping and / or processing (e.g. coating) the substrate 102 This can be done in a vacuum according to various embodiments, e.g. in a vacuum arrangement. 1200a , 1200b .

[0088] According to various embodiments, the vacuum arrangement 1200a , 1200b a vacuum chamber housing 802 The vacuum chamber housing should have a structure in which a vacuum can be created and / or maintained. 802 The vacuum chamber housing can, for example, be or become airtight, dustproof, and / or vacuum-tight. 802 It can have one or more vacuum chambers. Each vacuum chamber can have one or more vacuum zones. 306b , 308b e.g. processing areas 306b , 308b, provide. The multiple vacuum chambers and / or the multiple vacuum zones 306b , 308b of the vacuum chamber housing 802 They can optionally be at least partially separated from each other.

[0089] Furthermore, the vacuum chamber housing 802 with a pump system 804 (featuring at least one rough vacuum pump and optionally at least one high vacuum pump) coupled. The pump system 804 can be set up, the vacuum chamber housing 802 to remove a gas (e.g. the process gas) so that inside the vacuum chamber housing 802 a vacuum (i.e., a pressure less than 0.3 bar) and / or a pressure in a range of approximately 1 mbar to approximately 10 -3 mbar (in other words, fine vacuum) and / or a pressure in the range of approximately 10 -3 mbar to approximately 10 -7mbar (in other words, high vacuum) or a pressure smaller than high vacuum, e.g., less than approximately 10 -7 mbar (in other words, ultra-high vacuum) can be provided or made available.

[0090] The pump system 804 For example, the pump arrangement 116 exhibit or be formed from it. Alternatively or additionally, the vacuum arrangement can 1200a , 1200b a gas supply arrangement 1716 exhibit. By means of the gas supply arrangement 1716 can the vacuum chamber housing 802 A process gas is supplied to create a process atmosphere in the vacuum chamber housing. 802The process gas can be, for example, an inert gas or be composed of one. Alternatively or additionally, the process gas can be a reactive gas or be composed of one, such as oxygen, nitrogen, hydrogen, argon, and / or carbon. The process pressure can be established by an equilibrium of process gas, which is controlled by the gas supply system. 1716 supplied and via the pump system 804 is withdrawn.

[0091] Furthermore, the vacuum chamber housing 802 be set up in such a way that the vacuum conditions (the process conditions) within the vacuum chamber housing 802 (e.g. process pressure, process temperature, chemical process gas composition, etc.) can be set or controlled (e.g. locally), e.g. by means of a control system. 508 For example, the vacuum chamber housing can be used 802 multiple vacuum zones 306b , 308bThey may be provided or will be provided with different vacuum conditions. For example, the control system may 508 for controlling and / or regulating the gas supply arrangement 1716 and / or the pump system 804 It must be set up so that process pressure and / or process gas composition can be controlled and / or regulated. For example, the control system can... 508 be set up to control and / or regulate a standard volume flow of process gas, which is achieved by means of the gas supply arrangement 1716 supplied and / or via the pump system 804 is withdrawn.

[0092] According to various embodiments, the control 508 for controlling and / or regulating an optional substrate temperature control device 1124 (e.g., having a heating device and / or a cooling device) must be set up so that a process temperature (e.g., of the substrate) is maintained. 102and / or the process gas), for example during processing (e.g., during coating), can be controlled and / or regulated. For example, the control 508 be set up to control and / or regulate a thermal output which is supplied by means of the substrate temperature control device 1124 supplied and / or withdrawn by means of this.

[0093] Optionally, the vacuum arrangement can be 1200a , 1200b a supply device for supplying the temperature control device 1124 They may have features such as a supply of a temperature-controlled fluid or electrical energy. For example, the supply device can be located outside the processing chamber. 802 be arranged. For example, a heating or cooling medium can be supplied to the temperature control device. 1124 (e.g. the transport roller) 112 ) are supplied to and removed from it.

[0094] In the vacuum chamber housing 802(e.g. in a first vacuum chamber) at least one vacuum region can be created 306b e.g. a first vacuum region 306b , arranged. Furthermore, the vacuum chamber housing can 802 (e.g. in the first vacuum chamber) a first processing source 306 e.g. a coating material source 306 , be arranged. The coating material source 306 can be used to emit a gaseous coating material into the first vacuum region 306b be set up inside. The substrate can be coated with the coating material. 102 be or become coated. In other words, the coating of the substrate can 102 in a vacuum. The first vacuum region 306b can a coating area 306b be.

[0095] In the vacuum chamber housing 802 (e.g. in a second vacuum chamber or in the first vacuum chamber) at least one second vacuum region can be created. 308bbe arranged. Furthermore, the vacuum chamber housing can be 802 (e.g. in the second vacuum chamber) a second processing source 308 e.g. an exposure device 308 , be arranged. The second processing source 308 It can be set up to process the coating material with which the substrate is coated. 102 is coated or becomes coated, e.g., using light. For example, the processing source can be 308 be set up for structuring or chemically transforming the coating material with which the substrate 102 is coated or will be coated. The second vacuum area 308b can a processing area 308b be.

[0096] According to various embodiments, the vacuum chamber housing can 802 a chamber opening to expose the interior of the vacuum chamber housing 802 exhibiting the chamber opening. The interior of the vacuum chamber housing may be visible. 802for example in the direction of the axis of rotation 111d Expose. To close the chamber opening, the vacuum chamber housing can be used. 802 have a chamber lid.

[0097] For example, the second processing source can 308 have at least one exposure device, for example a light source (e.g. a laser, a lamp, a flash lamp or an X-ray source), a heat radiation source or a particle source (e.g. an electron source or a proton source or an ion source).

[0098] According to various embodiments, the control 508 to control and / or regulate the first processing source 306 and / or the second processing source 308 be set up, for example, by controlling and / or regulating a quantity of material and / or thermal energy (e.g., radiation energy) per unit of time in a particular direction 105 of the substrate 102 is emitted.

[0099] Furthermore, the vacuum arrangement 1200a , 1200b one or more than one transport roller 112 (e.g. gas cooling rollers) 112 ) and optionally one or more leadership roles 122 exhibit which have a transport path 111 define, along which the substrate 102 (e.g. a ribbon-shaped substrate) between the unwind roller 112a , 112b and the winding roller 112c , 112d through at least one vacuum area 306b , 308b is transported through it, e.g. in a transport direction 111w (which are perpendicular to the axis of rotation) 111d (may be).

[0100] The vacuum arrangement 1200a can have at least two transport wheels 112 (or alternatively two pulleys) 122 ) exhibit, between which a straight section of the transport path 111 is stretched out.

[0101] The vacuum arrangement1200b can exactly one transport roller 112 exhibiting features that redirect the transport path. The transport roller 112 The temperature control device can be optionally installed. 1124 exhibit, e.g. as a processing role 112 be set up by means of which the substrate 102 It can be tempered, e.g., heated and / or cooled.

[0102] Furthermore, the vacuum arrangement 1200a , 1200b a drive system 518 exhibiting which at least some of the multitude of roles 112 , 112a , 112b , 112c , 112d , 122 coupled 518k is, for example, at least with some of the multiple gas cooling rollers 122 and with each of the multiple winding sleeve couplings 112a , 112b , 112c , 112d The drive system 518 can handle multiple drives 506 exhibit, for example, the drive system 518by waves 118 , 518k Chains 518k , belt 518k or gears 518k with part of the multitude of roles 112 , 112a , 112b , 112c , 112d , 122 They must be coupled, which are driven. The drive system 518 and the part of the multitude of roles 112 , 112a , 112b , 112c , 112d , 122 can be part of a positioning device used to position the substrate 102 is set up.

[0103] The control 508 can be used for steering 518k and / or rules 518k of the drive system 518 be set up, e.g. for controlling 518k and / or rules 518k a transport characteristic, e.g. a transport speed, a mechanical tensile stress on the substrate 102 , and / or a position of the substrate 102 . Steering518k and / or rules 518k of the drive system 518 can occur during the processing of the substrate 102 This can occur, for example, during coating and / or irradiation, for example, based on a processing progress (e.g., a coating progress and / or a structuring progress) and / or based on a transport characteristic.

[0104] The following are various examples that refer to what has been described previously and depicted in the figures.

[0105] Example 1 is a sealing arrangement 202 , comprising: a first sealing element (e.g. rotor) 502 or rotating drive seal ring), which has: a (circumferential, metallic and / or ceramic) first sealing surface 902f , one of the first sealing surfaces 902f opposite coupling area 502k for coupling with a wave 118 , several initial openings 502o, which extends from the first sealing surface 902f from to the coupling area 502k extend through the first sealing element; a second sealing element (e.g. stator or static drive seal ring) which has: a (circumferential, metallic and / or ceramic) second sealing surface 904f , several second openings 504o , 514o , of which at least one initial opening 504o from a first area of ​​the second sealing element and at least a second opening 514o from a second area of ​​the second sealing element through the second sealing element to the second sealing surface 904f extend to include a (circumferential, metallic and / or ceramic) third sealing surface 504f , which is arranged between the first area and the second area to seal them against each other; wherein the first sealing surface 902f and second sealing surface 904fare set up (e.g., congruent in shape to each other and / or lapped and / or have a lower roughness than the third sealing surface) 504f exhibiting), being pressed against each other in a vacuum-tight manner and / or sliding away from each other.

[0106] Example 2 is a sealing arrangement 202 (e.g. a drive seal) 202d) , comprising: a first sealing element 502 (e.g. a rotor) 502 ) and a second sealing element 504 (e.g. a stator), which are pressed against each other in a vacuum-tight manner, e.g. with their sealing surfaces 902f , 904f (e.g., those that are congruent to each other and / or lapped and / or have a lower roughness than the third sealing surface) 504f exhibit); several in the first sealing element 502 arranged first through openings 502o (i.e., several of the first sealing element) 502 penetrating first openings 502o)and several in the second sealing element 504 arranged second passage openings 504o , 514o (i.e., several of the second sealing element) 504 penetrating second openings 504o , 514o) , which are located on the two sealing surfaces 902f , 904f adjacent to each other; one of the two sealing surfaces 902f , 904f opposite (circumferential, metallic and / or ceramic) third sealing surface 504f , which is arranged between two passage openings of the multiple second passage openings to separate these from each other.

[0107] Example 3 is a sealing arrangement 202 according to Example 2, wherein of the several second through-openings, at least one first through-opening is from a first area (e.g. first surface area or first segment, e.g. first circular ring segment) of the second sealing element. 504 and at least one second through-opening 504o, 514o from a second area (e.g. second surface area or second segment, e.g. second circular ring segment) of the second sealing element 504 out through the second sealing element 504 through to its sealing surface 904f extend, with the third sealing surface 504f It is positioned between the first area and the second area to seal them against each other.

[0108] Example 4 is a sealing arrangement 202 according to one of examples 1 to 3, wherein the at least one first opening extends along a non-linear (e.g. angled and / or curved) path into the first sealing element 502 into and / or through it (e.g., where at least one first opening is angled and / or curved).

[0109] Example 5 is a sealing arrangement 202according to one of examples 1 to 4, further comprising: an axis of rotation with respect to which the first sealing surface 902f (i.e. the sealing surface) 902f of the first sealing element 502 ) and the second sealing surface 904f (i.e. the sealing surface) 904f of the second sealing element 504 ) corresponding surfaces of revolution.

[0110] Example 6 is a sealing arrangement 202 according to one of examples 1 to 5, wherein the sealing surfaces 902f , 904f of the first and second sealing element 504 are arranged to be pressed against each other in a vacuum-tight manner and / or to slide away from each other.

[0111] Example 7a is a sealing arrangement 202 according to one of examples 1 to 6, wherein a nominal size of at least one (i.e. one, more than one or each) opening of the several first openings 502ois different from a (e.g., is larger than a) distance between adjacent openings of the several second openings 504o , 514o and / or equal to a nominal size of at least one (i.e., one, more than one, or each) opening of the multiple second openings 504o , 514o is.

[0112] Example 7b is a sealing arrangement 202 according to one of examples 1 to 7a, wherein adjacent openings of the several first openings 502o at the first sealing surface 902f a first angular distance with respect to an axis of rotation of the sealing arrangement 202 each other (e.g., their centers enclose a first angle with each other), and wherein adjacent openings of the several second openings 504o , 514o on the second sealing surface 904fhave a second angular distance from each other with respect to the axis of rotation (e.g., their centers enclose a second angle with each other), and wherein the first angular distance (e.g., the first angle) and the second angular distance (e.g., the second angle) are different from each other.

[0113] Example 7c is a sealing arrangement 202 according to one of Examples 1 to 7b, wherein at least one (i.e. exactly one, more than one or each) opening of the several first openings 502o and / or the multiple second openings 504o , 514o have a cylindrical cross-section.

[0114] Example 8 is a sealing arrangement 202 according to one of examples 1 to 7c, wherein the first sealing element 502 and / or the second sealing element 504 have or are formed from a (e.g. metallic) sealing ring, which forms their sealing surface 902f , 902f exhibits.

[0115] Example 9 is a sealing arrangement 202 according to one of examples 1 to 8, wherein the first sealing element 502 and / or the second sealing element 504 have or are formed from a (e.g. metallic) drive sealing ring.

[0116] Example 10 is a sealing arrangement 202 according to one of examples 1 to 9, wherein in a circular segment area in which the first sealing surface 902f and the second sealing surface 904f adjacent to one another, a first number of openings of the several first openings 502o and a second number of openings of the several second openings 504o , 514o are arranged, with the first number and the second number being different from each other.

[0117] Example 11 is a sealing arrangement 202 according to one of examples 1 to 10, wherein the multiple first openings 502o and the several second openings 504o , 514obe arranged in such a way that at least one (e.g., at least one first and / or at least one second) opening of the several first openings 502o at least (i.e., at least) two openings of the several second openings 504o , 514o overlaps, e.g., when an additional opening of the several first openings502o and an additional opening of the several second openings 504o , 514o align with each other and / or completely overlap each other.

[0118] Example 12 is a sealing arrangement 202 according to one of Examples 1 to 10, wherein the at least one first opening has a radially extending first section and a substantially axially extending second section, and / or wherein the second section is located between the first section and the sealing surface 902f is arranged.

[0119] Example 13 is a sealing arrangement 202according to one of examples 1 to 12, wherein at least one second opening (e.g. completely) extends axially.

[0120] Example 14 is a sealing arrangement 202 according to one of examples 1 to 13, further comprising a coupling structure (e.g. having at least a positive locking means) for coupling to the shaft 118 .

[0121] Example 15 is a sealing arrangement 202 according to one of examples 1 to 14, wherein the multiple first openings 502o several separate first fluid lines (e.g. gas lines) are formed.

[0122] Example 16 is a sealing arrangement 202 according to one of examples 1 to 15, wherein the multiple second openings 504o , 514o several separate second fluid lines (e.g. gas lines) are formed.

[0123] Example 17 is a sealing arrangement 202 according to one of examples 1 to 16, wherein the third sealing surface504f has a recess (e.g. groove, fold, step and / or depression) for receiving a seal (e.g. a sealing ring).

[0124] Example 18 is a sealing arrangement 202 according to one of examples 1 to 17, wherein the first area is attached to a radial and / or lateral outer surface (e.g. a shell surface) or radial side of the second sealing element 504 adjacent; and / or wherein at least one first opening is located on the radial and / or lateral outer surface or radial side of the second sealing element 504 extends into this.

[0125] Example 19 is a sealing arrangement 202 according to one of examples 1 to 18, wherein the second area is connected to an axial outer surface (e.g. end face) or axial side of the second sealing element. 504 adjacent; and / or wherein at least one second opening extends from the axial outer surface or axial side of the second sealing element 504extends into this.

[0126] Example 20 is a sealing arrangement 202 according to one of examples 1 to 19, a coating which in each case forms the first sealing surface 902f and / or the second sealing surface 904f provides, whereby the coating has a greater mechanical hardness (e.g. according to a Rockwell scale) than a material of the respective sealing element. 502 , 504 , which borders the coating.

[0127] Example 21 is a supply housing 114 , having: a receiving opening 114o for receiving and storing a shaft 118 ; a cavity 114h , whereby the cavity 114h from the intake opening 114o into the supply housing 114 extends into; wherein the cavity 114h a first supply area 414a and a second supply area 414b exhibits; a first connection 114e(e.g. evacuation connection) for exchanging a fluid (e.g. evacuation) with the first supply area 414a ; a second connection 124b (e.g., ventilation connection) for exchanging a fluid (e.g., ventilation) with the second supply area 414b ; and optionally a sealing area for receiving a sealing arrangement 202 , which constitutes the first supply area 414a from the second supply area 414b separated.

[0128] Example 22 is a supply housing 114 according to Example 21, wherein the sealing area has a (circumferential) sealing surface and / or a (circumferential) groove.

[0129] Example 23 is a supply housing 114 as in example 21 or 22, further comprising: a receiving area in which the receiving opening 114ois formed, wherein the receiving area has a first recess (e.g. groove, rebate, depression and / or shoulder) for receiving a seal and / or a second recess (e.g. groove, depression, rebate and / or shoulder) for receiving a rotary bearing (e.g. for the shaft). 118 ) exhibits.

[0130] Example 24 is a supply housing 114 according to one of examples 21 to 23, wherein the first supply area 414a between the second supply area 414b and is located in the recording area.

[0131] Example 25 is a supply housing 114 according to one of examples 21 to 24, wherein the sealing area between the first supply area 414a and the second supply area 414b is arranged and / or spatially separated from each other.

[0132] Example 26 is a supply housing 114 according to one of examples 21 to 25, wherein the first connection114e provides a lower flow resistance and / or has a larger nominal diameter (e.g. larger than approximately 15 mm, approximately 30 mm or approximately 60 mm) than the second connection 124b The nominal diameter can, for example, define the corresponding conductor cross-section.

[0133] Example 27 is a supply housing 114 according to one of examples 21 to 26, wherein the first connection 114e has a vacuum connection flange and / or is designed as a pump connection or pipe connection for a vacuum pipe.

[0134] Example 28 is a supply housing 114 according to one of Examples 21 to 27, further comprising: a pump and / or a vacuum tube connected to the first port 114e is connected.

[0135] Example 29 is a supply housing 114 according to one of examples 21 to 28, wherein the first connection 114eon a radial side of the supply housing 114 is arranged and / or wherein the second connection 124b on one axial side of the supply housing 114 is arranged.

[0136] Example 30a is a supply interface for a transport roller 112 , featuring: a supply housing 114 according to one of examples 21 to 30, and a sealing arrangement 202 according to one of examples 1 to 20, which are located in the sealing area of ​​the supply housing 114 is arranged.

[0137] Example 30b is a supply interface for a transport roller 112 , featuring: a supply housing 114 according to one of examples 21 to 30a, and one between the first supply area 414a and the second supply area 414b e.g., sealing arrangement located in the sealing area 202 , wherein the sealing arrangement 202 features: a stator504 and a rotor 502 , where the 502 rotor has a coupling area 502k for coupling one in the receiving opening 114o recorded wave 118 features; several in the rotor 502 arranged first through openings 502o and several in the stator 504 arranged second passage openings 504o , 514o (which, for example, overlap each other at least partially), of which a first through-opening 504o the clutch area 502k by means of the first through-openings 502o with the first supply area 414a and at least one second passageway 514o the clutch area 502k by means of the first through-openings 502o with the second supply area 414b fluid-conducting connects

[0138] Example 31 is a supply interface according to Example 30a or 30b, further comprising: the shaft 118, whereby the wave 118 features: an additional coupling area 502k , which is attached to the sealing arrangement 202 (whose rotor 502 ) adjacent; several additional first openings 120b (e.g., through-openings) which are aligned with the several secondary openings and / or connected to conduct gas; and optionally a piping structure 120 (e.g. fluid piping structure), which includes the several additional initial openings 120b with an area outside the cavity 114h fluid-conducting connection.

[0139] Example 32 is a transport arrangement 100 , 200 , 400 , 500 , 600 , 1000 , 1100 , 1200 having the supply interface according to Example 31, and further comprising: a by means of the shaft 118 rotatable transport roller 112 for transporting and / or redirecting a substrate, wherein the transport roller112 a cladding surface which has several additional second openings for exchanging a fluid through the cladding surface; wherein the conduit structure 120 The multiple additional first openings are fluidly connected to the multiple additional second openings.

[0140] Example 33 is a transport arrangement 100 , 200 , 400 , 500 , 600 , 1000 , 1100 , 1200 , featuring: a transport roller 112 for transporting and / or redirecting a substrate, a wave 118 for rotating the transport roller 112 , whereby the wave 118 on one of the transport rollers 112 has several openings at the opposite end for exchanging a fluid through the shaft 118 through; whereby the transport roller 112a cladding surface which has several second openings for the exchange of a fluid through the cladding surface; and a conduit structure which connects the several first openings to the several second openings in a fluid-conducting manner.

[0141] Example 34 is a transport arrangement 100 , 200 , 400 , 500 , 600 , 1000 , 1100 , 1200 according to Example 32 or 33, further comprising: a temperature control device which is configured to supply and / or withdraw thermal energy (e.g. controlled and / or regulated) from the shell surface.

[0142] Example 35 is a transport arrangement 100 , 200 , 400 , 500 , 600 , 1000 , 1100 , 1200 according to one of Examples 32 to 34, further comprising: a drive which is configured to act on the shaft 118 to transmit a torque.

[0143] Example 36 includes a method: transporting (e.g., redirecting) a substrate using a transport roller. 112 through a processing area (e.g., a vacuum area); introducing gas between the substrate and the transport roller 112 Extraction of gas from the processing area using the transport roller 112 (e.g. through their openings); wherein the introduction and withdrawal of gas by a storage arrangement 202 , 118 , by means of which the transport roller 112 is rotatably mounted (and optionally simultaneously used for transport), and / or by the transport roller 112 (e.g., its lateral surface) through.

[0144] Example 37 is a method according to Example 36, wherein the introduction and removal of gas is carried out by a wave 118 , by means of which the transport roller 112 The process is carried out by mounting the bearing on a rotatable bearing.

[0145] Example 38 is a method according to Example 36 or 37, further comprising: unwinding and / or winding the substrate by means of a substrate winding.

[0146] Example 39 is a process according to one of Examples 36 to 38, further comprising: processing the substrate.

[0147] Example 39 is a method according to one of Examples 36 to 38, wherein the transport is carried out by rotating the transport roller. 112 This is done by turning the transport roller 112 at the storage arrangement 202 , 118 The introduction and extraction of gas through one of the fluid lines is reversed.

[0148] Example 40 is the use of a shaft for rotatably mounting a transport roller (e.g. in a vacuum area) and for both introducing gas into the transport roller (e.g. simultaneously with rotating the transport roller) and extracting gas from the transport roller (e.g. by means of the transport roller into or out of the vacuum area) through the shaft.

[0149] Example 41 is the use of a sealing arrangement (e.g. a drive seal) to seal a rotatably mounted shaft (e.g. in a vacuum area) and both to introduce gas into the shaft (e.g. simultaneously with rotating the shaft) and to extract gas from the shaft (e.g. by means of the shaft into or out of the vacuum area) through the drive seal.

Claims

[1] Drive seal (202d), comprising: • a rotor (502) and a stator (504) whose sealing surfaces (902f, 904f) are pressed against each other in a vacuum-tight manner; • several first through-holes (502o) arranged in the rotor (502) and several second through-holes (504o, 514o) arranged in the stator (504), which adjoin each other at the sealing surfaces (902f, 904f); • an additional sealing surface opposite the sealing surfaces (902f, 904f), which is arranged between two passage openings of the several second passage openings (504o, 514o) for separating the gases from each other. [2] Drive seal (202d) according to claim 1, wherein at least one of the two through-holes extends along a non-linear path through the stator (504). [3] Drive seal (202d) according to one of claims 1 to 2, wherein a nominal diameter of at least one through-hole of the several first through-holes (502o) is larger than a distance between adjacent through-holes of the several second through-holes (504o, 514o). [4] Drive seal (202d) according to one of claims 1 to 3, wherein at least one through-opening of the several first through-openings (502o) overlaps at least two through-openings of the several second through-openings (504o, 514o). [5] Drive seal (202d) according to one of claims 1 to 4, further comprising: a coupling structure (1002) for coupling with a shaft (118). [6] Drive seal (202d) according to any one of claims 1 to 5, wherein the additional sealing surface (504f) has a groove or a shoulder for receiving an elastomer seal. [7] Drive seal (202d) according to any one of claims 1 to 6, wherein of the two through-holes a first through-hole (504o) extends from a first surface area of ​​the stator (504) and a second through-hole (514o) extends from a second surface area of ​​the stator (504) through the stator (504) to its sealing surface (904f), and wherein the additional sealing surface (504f) is arranged between the first surface area and the second surface area. [8] Supply interface, having: a housing (114), comprising: • a receiving opening (1140); • a cavity (114h), wherein the cavity (114h) extends from the receiving opening (114o) into the housing (114); • wherein the cavity (114h) has a first supply area (414a) and a second supply area (414b); • a first port (114e) for exchanging fluid with the first supply area (414a) and a second port (124b) for exchanging fluid with the second supply area (414b); and a sealing arrangement (202) arranged between the first supply area (414a) and the second supply area (414b), wherein the sealing arrangement (202) comprises: • a stator (504) and a rotor (502), wherein the rotor (502) has a coupling area (502k) for coupling a shaft (118) received in the receiving opening (114o); • several first through-holes (502o) arranged in the rotor (502); • several second through-holes (504o, 514o) arranged in the stator (504), of which a first through-hole (504o) connects the coupling area (502k) to the first supply area (414a) by means of the first through-holes (502o) and at least a second through-hole (514o) connects the coupling area (502k) to the second supply area (414b) by means of the first through-holes (502o). [9] Supply interface according to claim 8, further comprising: a groove or step arranged between the first supply area (414a) and the second supply area (414b) for receiving an elastomer seal. [10] Supply interface according to claim 8 or 9, further comprising: a receiving area in which the receiving opening (114o) is formed, wherein the receiving area has a first groove or a first shoulder for receiving a seal and / or a second groove or a second shoulder for receiving a rotary bearing. [11] Supply interface according to one of claims 8 to 10, wherein the first connection (114e) provides a smaller flow resistance and / or has a larger nominal diameter than the second connection (124b). [12] Supply interface according to one of claims 8 to 11, wherein the first connection (114e) has a vacuum connection flange. [13] Transport arrangement (100, 200, 400, 500, 600, 1000, 1100, 1200), comprising: • a transport roller (112) for transporting and / or redirecting a substrate, • a shaft (118) for rotatably mounting the transport roller (112), wherein the shaft (118) has several first openings at one end opposite the transport roller (112) for exchanging a fluid through the shaft (118); • wherein the transport roller (112) has a lateral surface which has several second openings for exchanging a fluid through the lateral surface; and • a conduit structure (120) which fluidly connects the several first openings to the several second openings. [14] Methods comprising: • Transporting a substrate (102) through a processing area using a transport roller (112); • Introducing (1003) gas between the substrate and the transport roller (112); • Extraction (1005) of gas from the processing area by means of the transport roller (112); • wherein the introduction and extraction of gas takes place through a bearing arrangement (202, 118) by means of which the transport roller (112) is rotatably mounted. [15] Method according to claim 14, wherein the introduction (1003) and the withdrawal (1005) of gas is carried out by means of a shaft (118) by means of which the transport roller (112) is rotatably mounted. [16] Method according to claim 14 or 15, further comprising: Unwinding and / or winding the substrate (102) using a substrate winding system. [17] Method according to any one of claims 14 to 16, further comprising: Processing the substrate (102). [18] Using a drive seal (202d) to seal a rotatably mounted shaft (118) and to introduce gas into the shaft (118) as well as to extract gas from the shaft (118) through the drive seal (202d). [19] Using a shaft (118) to rotatably support a transport roller (112) and both to introduce gas into the transport roller (112) and to extract gas from the transport roller through the shaft (118).

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