MEASURING DEVICE AND PROGRAM

Abstract

Measuring device (1) designed to measure an operating state of a galvanograph (2) that scans a laser beam (L) emitted by a laser light source (P) and reflected by a first mirror (21) and a second mirror (22), each driven to rotate by a motor (23, 24), and designed to operate according to an operating command (M1), wherein the measuring device (1) comprises: a position information retrieval unit (11) that retrieves a rotational position of the first mirror (21) and the second mirror (22) as position information in temporal sequence; an irradiation position specification unit (16) that specifies an irradiation position (M2) of the laser beam (L) emitted onto a workpiece (W) based on the retrieved position information; and an output unit (18) that outputs the specified irradiation position (M2) of the laser beam (L) in a form that can be visually confirmed;wherein the irradiation position specification unit (16) specifies the irradiation position (M2) of the laser beam (L) emitted by the laser light source (P) at an origin of the XY plane of the workpiece (W), wherein the irradiation position (M2) of the laser beam (L) is expressed by the following formula: X=Dtan2θ2Y=(D12+D32)tan2θ1+(D2+X2)tan2θ1Assuming that D=D3+D2+d+WDwhere θ1 denotes a rotation angle with respect to a reference position of the first mirror (21);where θ2 denotes a rotation angle with respect to a reference position of the second mirror (22);where D1 denotes a distance between an axis of the first mirror (21) and an axis of the second mirror (22) in an X-direction; where D2 denotes a distance between a condenser lens (25) designed to focus the laser beam (L) and radiate it onto the XY plane of the workpiece (W), and an impact position of the laser beam (L) from the laser light source (P) on the first mirror (21) in a Z-direction; where D3 denotes a distance between the impact position of the laser beam (L) on the first mirror (21) and an impact position of the laser beam (L) on the second mirror (22) in the Z-direction; and where d+WD denotes a distance between a top surface of the condenser lens (25) and the XY plane in the Z-direction.

Description

BACKGROUND OF THE INVENTION Area of ​​the invention

[0001] The present invention relates to a measuring device and a program. Related technology

[0002] A laser processing system is known that performs a processing operation, such as welding, by emitting a laser beam onto a workpiece (an object). For example, a laser processing system is known that includes a galvanic scanner emitting a laser beam from the front end of an articulated robot arm.

[0003] The electroplating scanner comprises at least two mirrors that can rotate independently around two axes. The scanner performs a scan using a laser beam emitted from a laser light source by rotating these mirrors via servo motors. The scanner, for example, directs the motors to operate according to command values ​​that define the processing method.

[0004] Depending on the motor's response performance (moment of inertia and friction), the electroplating scanner can cause deviations from the command value. These deviations manifest as overshoots in the position (path) of the laser beam or similar phenomena. To reduce such overshoots, a drive pattern generation method for the electroplating scanner system has been presented (see, for example, patent specification 1).

[0005] Patent specification 1: International PCT Publication No. 2009 / 139026 SUMMARY OF THE INVENTION

[0006] To compensate for the deviation, however, a setting appropriate to the processing conditions, which include processing accuracy, processing content, and processing speed, is preferable. In the method disclosed in patent specification 1, the deviation between the specified position (the command value) and the actually obtained coordinate position is calculated. However, it is not possible to confirm the actually obtained coordinate position. Therefore, to facilitate the setting process, it is preferable to be able to output the irradiation position of a laser beam in a visually easily verifiable manner.

[0007] A first aspect of the present disclosure is a measuring device ( 1), which measures an operating state of a galvanoscanner which performs a scanning with the laser beam by reflecting a laser beam emitted from a laser light source by means of mirrors driven by motors and operates according to an operating command, wherein the measuring device comprises: a position information retrieval unit which retrieves a rotational position of the mirror in temporal sequence as position information; an irradiation position specification unit which specifies an irradiation position of the laser beam emitted onto a workpiece on the basis of the retrieved position information; and an output unit which outputs the specified irradiation position of the laser beam in a form to be visually confirmed.

[0008] Furthermore, a second aspect of the present invention is a program that causes a computer to act as a measuring device that measures an operating state of a galvanic scanner which performs scanning with the laser beam by reflecting a laser beam emitted by a laser light source by means of a mirror driven by a motor and operates according to an operating command, wherein the program causes the computer to act as: a position information retrieval unit ( 11 ), which in temporal sequence a rotational position of the mirror ( 21 , 22 ) retrieves position information; irradiation position specification unit ( 16 ), which, based on the retrieved position information, determines an irradiation position ( M2 ) of the laser beam emitted onto a workpiece ( L ) specified; and output unit ( 18 ), which is the specified irradiation position ( M2) of the laser beam ( L ) in a visually verifiable form.

[0009] According to one aspect, it is possible to provide a measuring device and a program that can output the irradiation position of a laser beam in a visually easily verifiable way. List of characters Fig. Figure 1 is a schematic drawing showing the setup of a galvanic scanner measured by a measuring device according to a first embodiment; Fig. Figure 2 is a schematic drawing showing the relationship between the angle of a mirror of a galvanograph scanner measured by the measuring device according to the first embodiment and the irradiation position of a laser beam; Fig. Figure 3 is a schematic drawing showing the relationship between the measuring device according to the first embodiment and the electroplating scanner; Fig. Figure 4 is a block diagram showing the configuration of the measuring device according to the first embodiment; Fig. Figure 5 is a view of a screen showing a path of the laser beam output by the measuring device according to the first embodiment and status information about a laser beam; Fig. Figure 6 is a schematic drawing showing an example of the irradiation position and operating command output by the measuring device according to the first embodiment; and Fig. Figure 7 is a schematic drawing showing another example of the irradiation position and operating command output by the measuring device according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] The following are, with reference to the Fig. 1 to Fig. 7 a measuring device 1and a program according to an embodiment of the present disclosure is explained. First, before explaining the measuring device, the measuring device is described. 1 and the program according to the present embodiment, the configuration of a conventional electroplating scanner 2 explained.

[0011] The electroplating scanner 2 indicates how in Fig. 1 shown, two mirrors 21 , 22 , which successively emit a laser beam L from a laser light source P reflect, and two engines 23 , 24 , which the mirrors 21 , 22 each rotating around its respective axes of rotation X1 , X2 drive, and a condenser lens 25 on, which the laser beam L bundles and emits. The mirrors 21 , 22 , the engines 23 , 24 and the condenser lens 25 form an emitting unit 20 .

[0012] The mirrors 21 , 22 are configured to rotate independently around the two axes X1 , X2 They are rotatable. The motors 23 , 24 are formed, for example, by servomotors and are achieved by rotating the mirrors 21 , 22 a scan using the laser light source P emitted laser beam L out of.

[0013] As in Fig. As shown in 1, the laser beam L from the laser light source P of the two mirrors 21 , 22 reflected one after the other. The laser beam L is from the condenser lens 25 The light is focused and projected onto the workpiece W. At this point, the rotation of the two mirrors changes. 21 , 22 through the engines 23 , 24 the angle of impact of the light on these mirrors 21 , 22incident laser beam L continuously. This leads to the reflection from the mirrors. 21 , 22 to reach the workpiece W, successively reflected laser beam L a scanning along a predefined scanning path on the workpiece W. As in Fig. Figure 2 shows the irradiation position (the X-coordinate and the Y-coordinate) of the laser beam. L during the emission of the laser beam L from the laser light source P to the origin of the XY plane (the workpiece W) in the reference position (the rotational position) of the mirror 21 and the mirror 22 for example, expressed by the following formula. X = D tan 2 θ 2 Y = ( D 1 2 + D 3 2 ) tan 2 θ 1 + ( D 2 + Here, θ1 denotes the angle of rotation relative to the reference position of the mirror. 21 . 92denotes the angle of rotation in relation to the reference position of the mirror. 22 . D1 denotes the distance between the axes of the mirrors 21 , 22 in the X direction. D2 denotes the distance between the condenser lens 25 and the point of impact of the laser beam from the laser light source P on the mirror 21 in the vertical direction (the Z-direction). D3 denotes the distance between the point where the laser beam hits the mirror 21 and the point of impact of the laser beam on the mirror 22 in the vertical direction (the Z-direction). d + WD denotes the distance between the top of the condenser lens. 25 and the XY plane in the vertical direction (the Z direction).

[0014] In the actual scanning path of the laser beam L However, the deviation occurs in relation to the operating command of the electroplating scanner. 2set scanning path. In the actual operating path of the laser beam. L This occurs depending on the response power (moment of inertia and friction) of the mirror. 23 , 24 for example, an overshoot or the like. The measuring device 1 and the program according to the present embodiment enables the output of which scanning path is actually followed in relation to the set scanning path, in a form that can be confirmed visually.

[0015] Next, with reference to the Fig. 3 to Fig. 7 the measuring device 1 and the program according to the present embodiment is explained. The measuring device 1 is a device that monitors the operating status of a galvanic scanner 2 measures by causing the laser light source to reflect P emitted laser beam L through the engines 23 ,24 rotating driven mirror 21 , 22 a scan with a laser beam L executes and operates according to an operating command. The measuring device 1 is with the electroplating scanner 2 connected, as in Fig. 3 shown. As in Fig. The measuring device, as shown in section 4, includes 1 : a position information retrieval unit 11 , an operating command retrieval unit 12 , a machine information setting unit 13 , a status information retrieval unit 14 , an irradiation position specification unit 16 , a timing unit 15 , an output content creation unit 17 and an output unit 18 .

[0016] The position information retrieval unit 11 This is achieved, for example, through a communication interface such as a modem. The position information retrieval unit 11calls up the rotation positions of the mirrors 21 , 22 in chronological order as position information. The position information retrieval unit 11 For example, it calls up the rotational position of the motors. 23 , 24 off, which the mirrors 21 , 22 Rotate synchronously. More precisely, the position information retrieval unit calls up the position information. 11 in chronological order the output from the motors 23 , 24 The designated value transmitters retrieve position information. In other words, the position information retrieval unit retrieves 11 the rotational positions of the motors in chronological order 23 , 24 , each of which mirrors 21 , 22 The rotating drive transmits position information. The position information retrieval unit 11 calls the rotational positions of the motors 23 , 24 for example, as the timer unit described later 15Position information assigned to the measured time.

[0017] The operating command retrieval unit 12 This is implemented, for example, through a communication interface such as a modem. The operating command retrieval unit 12 calls before activating the electroplating scanner 2 a pre-set operating command is executed. The operating command retrieval unit 12 For example, it calls up the scanning path, which describes a circle, as an operating command.

[0018] The machine information setting unit 13 This is achieved, for example, through the operation of a CPU. The machine information setting unit. 13 sets the machine information that determines the irradiation position of the laser beam. L with regard to the mechanical positions of the mirrors 21 , 22 to demonstrate. The machine information setting unit. 13For example, it sets machine information that defines the relationship between the rotational position of the mirror. 21 , 22 and the irradiation position of the laser beam L to demonstrate. Furthermore, the machine information setting unit provides 13 the mechanism of the electro-scanner 2 relevant information such as the distance between the plane (the workpiece W) onto which the laser beam is emitted and the mirrors 21 , 22 and input the angle of the mirror's axis of rotation as machine information.

[0019] The status information retrieval unit 14 This is implemented, for example, through a communication interface such as a modem. The status information retrieval unit 14 calls up the time series change of the laser beam's output state L as status information. The status information retrieval unit 14For example, it calls out the strength (power level) of the laser beam in chronological order. L from the (not shown) control unit that controls the operation of the electroplating scanner 2 It controls the system by transmitting status information. The status information retrieval unit 14 For example, the change in the emission state of the laser beam causes L as the timer unit described later 15 Status information assigned to the measured time.

[0020] The timer unit 15 This is achieved, for example, through the operation of the CPU. The timer unit 15 For example, it measures time.

[0021] The irradiation position specification unit 16 This is achieved, for example, through the operation of the CPU. The irradiation position specification unit. 16Based on the retrieved position information, it specifies the irradiation position of the laser beam emitted onto the workpiece W. L The irradiation position specification unit 16 specifies the irradiation position, for example by calculating the irradiation coordinates of the laser beam. L on the surface of the workpiece W based on position information and machine information. Furthermore, the irradiation position specification unit specifies 16 which is controlled by the timer unit 15 Illumination position of the laser beam assigned to the measured time L .

[0022] The output content creation unit 17 This is achieved, for example, through the operation of the CPU. The output content creation unit. 17The output content creation unit generates the irradiation position, operating command, and status information as visually verifiable output content for the user. 17 It creates the output content through a graphical representation of the status information, such as in Fig. 5 shown. In addition, the output content creation unit creates 17 The output content is generated by superimposing the irradiation position and the operating command. The output content generation unit then creates the output content. 17 by assigning the irradiation position and the status information according to the timer unit 15 The output content to be visually confirmed at the determined time. The output content creation unit. 17For example, by selecting the irradiation position, output content is created that can display the position in a graph showing the corresponding status information, as in Fig. 5 shown. In addition, the calculated output content creation unit. 17 based on the position information retrieval unit 11 Position information for the mirrors retrieved in chronological order 21 , 22 the scanning speed of the laser beam L and creates the displayable output content.

[0023] The output unit 18 An example is a display device such as a screen. The output unit 18 gives the output content creation unit 17 The generated output content. More precisely, the output unit outputs 18 the specified irradiation position of the laser beam Lso that it can be visually confirmed. Furthermore, the output unit displays 18 The output unit provides status information along with the irradiation position. Furthermore, it outputs... 18 by superimposing the irradiation position of the laser beam as set according to the operating command. L and the irradiation position specification unit 16 The specified irradiation position produces a visually verifiable output. The output unit 18 specifies the irradiation position M2 for example, such that they are subject to the operating command M1 is laid out, describing a circle, as in Fig. 6 shown. In addition, the output unit 18 the specified irradiation position M2 for example, such that they are subject to the operating command M1 is laid down, which describes a rounded rectangle, as in Fig. 7 shown.

[0024] Next, the operating procedure of the measuring device will be described. 1 and the program is explained. First, the operating command retrieval unit calls up 12 the one in the electroplating scanner 2 discontinued operating command M1 off, and the operating command retrieval unit 12 sends the retrieved operating command M1 to the output content creation unit 17 .

[0025] Next, the machine information setting unit 13 the electro-scanner 2 The relevant machine information is entered. The machine information setting unit 13 sends the configured machine information to the irradiation position specification unit 16 .

[0026] At the start of operation of the electroplating scanner 2 calls the position information retrieval unit 11 The position information for the mirrors in chronological order 21 ,22 from the electroplating scanner 2 off. The position information retrieval unit 11 For example, it calls up the position information for the engines in chronological order. 23 , 24 off. The position information retrieval unit 11 sends the retrieved position information to the irradiation position specification unit. 16 .

[0027] Furthermore, the status information retrieval unit calls 14 the strength of the laser beam in chronological order L as status information from the electroplating scanner 2 off. The status information retrieval unit 14 sends the retrieved status information to the output content creation unit. 17 .

[0028] The irradiation position specification unit 16 specifies the irradiation position M2 of the laser beam Lwith respect to workpiece W, based on machine information and position information. The irradiation position specification unit. 16 sends the specified irradiation position M2 to the output content creation unit 17 .

[0029] The output content creation unit 17 creates output content that reflects the sent operating command M1 , the irradiation position M2 and assign the status information. The output content creation unit. 17 The output content is created, for example, by superimposing the operating command. M1 and the irradiation position M2 Furthermore, the output content creation unit creates 17 For example, visually confirmable output content, such as the time of the irradiation position. M2and assign the timing of the status information to each other. The output content creation unit 17 sends the generated output content to the output unit 18 .

[0030] The output unit 18 Outputs the output content in a visually verifiable state. The output unit 18 The output content is displayed, for example, by showing the output content in a visually confirmable state.

[0031] Next, the program that causes the computer to act as a measuring device will be explained. 1 to work. Each in the measuring device 1 The configuration can be implemented using hardware, software, or a combination of both. Software implementation refers to implementation by a computer that reads and executes a program.

[0032] Programs can be stored and made accessible to the computer using different types of non-volatile, computer-readable media. Non-volatile, computer-readable media encompass various types of physical storage media. Examples of non-volatile, computer-readable media include magnetic media (e.g., floppy disks, magnetic tapes, hard disk drives), magneto-optical recording media (e.g., a magneto-optical disk), a CD-ROM (a solid-state memory), a CD-R, a CD-R / W, and semiconductor memory (e.g., a mask ROM, a PROM (a programmable ROM), an EPROM (a rewritable PROM), a flash ROM, or RAM (random-access memory)). Furthermore, the program can be made accessible to the computer using different types of volatile, computer-readable media. Examples of volatile, computer-readable media include electrical signals, optical signals, and electromagnetic waves.Volatile computer-readable media can make programs accessible to a computer via a wired communication path such as electrical wires and optical fibers, or via a wireless communication path.

[0033] By the aforementioned measuring device 1 According to the present embodiment, the following results are obtained. (1) In the measuring device 1 , which determine the operating status of the electroplating scanner 2 measures, which is used to perform a scan with the laser beam L by reflecting the light from the laser source P emitted laser beam L by means of the motors 23 , 24 rotating mirror 21 , 22 a scan with a laser beam L performs and in accordance with the operating command M1 The measuring device works and includes the measuring device 1 : the position information retrieval unit 11, which determines the rotational position of the mirrors 21 , 22 retrieves position information in chronological sequence; the irradiation position specification unit 16 , which determines the irradiation position based on the retrieved position information M2 of the laser beam emitted onto the workpiece W L specified; and the output unit 18 , which is the specified irradiation position M2 of the laser beam L outputs in a visually verifiable form. This makes it possible to determine the actual irradiation position. M2 of the laser beam L Visually easily recognizable. Therefore, it is possible to use the electroplating scanner. 2 with simultaneous confirmation of the irradiation position M2 To adjust the settings, you can adjust the settings of the electroplating scanner. 2 can be done easily.

[0034] (2) The measuring device 1 It also includes a machine information setting unit.13 , which sets the machine information that determines the relationship between the mechanical positions of the mirrors 21 , 22 and the irradiation position M2 of the laser beam L demonstrate, and the irradiation position specification unit 16 specifies the irradiation position M2 of the laser beam L based on machine information and position information. This makes it possible to adjust the measuring device. 1 even to use when a machine configuration is required for each electroplating scanner 2 It differs. This makes it possible to utilize the versatility of the measuring device. 1 to increase.

[0035] (3) The measuring device 1 It also includes a status information retrieval unit. 14 , which describes the time series change of the laser beam's emission state L retrieves status information, and the output unit 18provides the status information along with the irradiation position. M2 This makes it possible to, in addition to the irradiation position, M2 of the electroplating scanner 2 The operating status can be easily confirmed visually. Therefore, it is possible to adjust the setting while simultaneously and more accurately confirming the status of the electroplating scanner. 2 to do.

[0036] (4) The measuring device 1 It also includes the operating command retrieval unit. 12 , which issued the operating order M1 retrieves, and the output unit 18 by superimposing the according to the operating command M1 set irradiation position M2 of the laser beam L and the irradiation position specification unit 16 specified irradiation position M2It outputs a visually verifiable signal in a visually confirmable form. This makes it possible to detect the deviation between the scanning path of the operating command. M1 and the actual scanning path can be easily confirmed visually. Therefore, it is possible to easily confirm whether the deviation is within the permissible range.

[0037] Although a preferred embodiment of the measuring device and the program according to the present disclosure has been explained above, the present disclosure may not be limited to the above embodiment, and modifications are possible. For example, in connection with the embodiment explained above, it is explained that the measuring device 1 separate from the electroplating scanner 2 is provided for; however, there is no restriction on this. The measuring device 1 can be inserted into the electroplating scanner 2 be integrated. The measuring device1 can, for example, be used in the electroplating scanner 2 be built-in.

[0038] Furthermore, in the embodiment described above, the position information retrieval unit calls 11 the position information for the mirrors 21 , 22 by retrieving the rotational position of the motors 23 , 24 from; however, there is no restriction on this. The position information retrieval unit 11 can change the rotation positions of the mirrors 21 , 22 Retrieve directly as position information.

[0039] Furthermore, in the embodiment described above, a stationary electroplating scanner can be used. 2 the machine information in advance in the measuring device 1 be stored. In this case, the measuring device must 1 the machine information setting unit 13 not necessarily include.

[0040] Furthermore, in the embodiment described above, the output content creation unit creates 17 the irradiated position M2 , the operating order M1 and the status information as output content; however, there is no limitation to this. The output content creation unit 17 It can be configured to create output content that at least shows the irradiation position. M2 include.

[0041] Furthermore, in the embodiment described above, a galvanic scanner mounted at the front end of an arm of an industrial machine (a robot not shown, etc.) can be used. 2 the machine information setting unit 13 and position information retrieval unit 11 be configured to retrieve machine information and position information relating to at least three motors.

[0042] Furthermore, in the embodiment described above, the output unit 18 Designed to display output content; however, there is no limitation to this. The output unit 18 It may be designed to output the output content in printed form. Reference symbol list 1 measuring device 2 electroplating scanners 11 Position Information Retrieval Unit 12 Operating command retrieval unit 13 Machine Information Setting Unit 14 Status Information Retrieval Unit 16 Irradiation Position Specification Unit 18 output units 21, 22 mirrors 23, 24 engine L laser beam P Laser light source M1 Operating command M2 irradiation position

Claims

[1] Measuring device (1) which measures an operating state of a galvanoscanner (2) which performs scanning with the laser beam (L) by means of a mirror (21, 22) driven by a motor (23, 24) by reflecting a laser beam (L) emitted by a laser light source (P) and operates according to an operating command (M1), wherein the measuring device (1) comprises: a position information retrieval unit (11) which retrieves a rotation position of the mirror (21, 22) as position information in temporal sequence; an irradiation position specification unit (16) which specifies an irradiation position (M2) of the laser beam (L) emitted onto a workpiece based on the retrieved position information; and an output unit (18) which outputs the specified irradiation position (M2) of the laser beam (L) in a form that can be visually confirmed. [2] Measuring device according to claim 1, which further comprises a machine information setting unit (13) which sets machine information which shows a relationship between a mechanical position of the mirror (21, 22) and the irradiation position (M2) of the laser beam (L), wherein the irradiation position specification unit (16) specifies the irradiation position (M2) of the laser beam (L) based on the machine information and the position information. [3] Measuring device according to claim 1 or 2, further comprising a state information retrieval unit (14) which retrieves a time series change of a delivery state of the laser beam (L) as state information, wherein the output unit (18) outputs the state information together with the irradiation position (M2). [4] Measuring device according to one of claims 1 to 3, which further comprises an operating command retrieval unit (12) that retrieves the operating command (M1), wherein the output unit (18) outputs a visually confirmable output by superimposing the irradiation position of the laser beam (L) set by the operating command (M1) and the irradiation position specified by the irradiation position specification unit (16). [5] Program that causes a computer to act as a measuring device (1) that measures an operating state of a galvanic scanner (2) which performs a scanning with the laser beam (L) by reflecting a laser beam (L) emitted by a laser light source (P) by means of a mirror (21, 22) driven by a motor (23, 24) and operates according to an operating command (M1), wherein the program causes the computer to act as: Position information retrieval unit (11) which retrieves a rotation position of the mirror (21, 22) as position information in temporal sequence; Irradiation position specification unit (16) which specifies an irradiation position (M2) of the laser beam (L) emitted onto a workpiece based on the retrieved position information; and Output unit (18) which outputs the specified irradiation position (M2) of the laser beam (L) in a form that can be visually confirmed.

Images