SUB-BOARD FOR CORRECTION, OPTICAL DETECTION UNIT AND OPTICAL DETECTION SYSTEM

Abstract

An optical path correction subassembly (C) designed for use with a light detector (D); wherein the optical path correction subassembly (C) comprises a holder structure (1) and an optical path correction structure (2) supported by the holder structure (1), the optical path correction structure (2) having a light beam guiding surface (2000) arranged as a reverse inclination on a vertical line (V); wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to guide a predetermined light beam (B) to a light entry surface (D100) of the light detector (D) to facilitate the collection of the predetermined light beam (B), and the holder structure (1) is designed to be removable on the light detector (D);wherein the light beam guiding surface (2000) of the optical path correction structure (2) is arranged at an acute angle to the light entrance surface (D100) of the light detector (D), and the holder structure (1) is designed to be removable on the light detector (D); wherein the light beam guiding surface (2000) is generated by an optical coating layer additionally formed on the optical path correction structure (2) or by a material surface layer that the optical path correction structure (2) itself possesses.

Description

CROSS-REFERENCE TO RELATED PATENT APPLICATION This application claims priority to U.S. Provisional Patent Application Ser. No. 63 / 276,671, filed November 8, 2021, which is incorporated by reference in its entirety into this application. Some references, including patent specifications, patent applications, and various publications, may be cited and discussed in the description of the present invention. The citation and / or discussion of such references is provided solely to clarify the description of the present invention and does not constitute an admission that such reference is "prior art" to the present invention described herein. All references cited and discussed in this specification are incorporated in their entirety and to the same extent as if each reference were incorporated individually. ENVIRONMENT OF THE INVENTION The present invention relates to an optical path correction subassembly, an optical detection unit and an optical detection system, in particular to an optical path correction subassembly having a light beam guiding surface, wherein the optical detection unit employs the optical path correction subassembly and the optical detection system employs the optical path correction subassembly. BACKGROUND OF THE INVENTION In the prior art, an optical probe system can be used to optically detect the operating performance of a device under test (DUT), such as a semiconductor device and / or an integrated circuit. In addition, a photodiode (PD) is an electronic component that receives a light source and converts it into an electrical output signal. When a predetermined light beam generated by an optical probe of the optical probe system is supplied to the photodiode, the electronic characteristics of the photodiode can be analyzed by receiving the electrical signal generated by the photodiode. Before, during, and after the DUTs are detected by the optical probe system, the user must continuously use a light detector (e.g., a photodiode) to optically detect the quality of the optical probe (i.e., an optical fiber) of the optical probe system. Before, during, and after the application of the optical probe system for optical detection of DUTs, the quality of the optical probe is optically detected by manually holding the light detector in the prior art means. The optical probe can be arranged at various orientations (e.g., different angles and / or heights) to optically detect the quality of the optical probe. However, since the light detector is held manually, the quality of the optical probe cannot be automatically detected. This results in poor detection performance, and the detection efficiency cannot be effectively improved. Before, during, and after the application of the optical probe system for optically detecting DUTs, in order to automatically detect the quality of the optical probe by the light detector, an external adjustment mechanism is used to adjust the light detector in various orientations (such as different angles and / or heights) in the prior art technical embodiments, so that the light detector adjusted by the external adjustment mechanism can be used to optically detect the quality of the optical probe arranged in various orientations (such as different angles and / or heights). Fig.However, Fig. 1 shows that when the light detector is adjusted to be arranged at a predetermined inclined angle by an external adjustment mechanism (not shown), an upper part of the light detector is higher than the tips of two optical probes (respectively adjacent to two opposite sides of a cross table of the semiconductor wafer) of the optical probe system, so that the optical probe adjacent to the light detector will easily collide with the angle-adjustable light detector during movement, while the other optical probe far from the light detector is blocked by the angle-adjustable light detector and cannot be optically detected by the light detector. In order to solve the above-mentioned problems that "the optical probe next to the light detector is easy to collide with the angle-adjustable light detector during movement" and that "the other optical probe which is far away from the light detector is blocked by the angle-adjustable light detector and cannot be optically detected by the light detector", the optical probe system needs to be equipped with a more complicated external adjustment mechanism, which not only increases the manufacturing cost of the optical probe system but also increases the difficulty of the optical probe system during operation. OBJECT OF THE INVENTION To solve the above-mentioned disadvantages, the present invention provides an optical path correction subassembly, an optical detection unit that applies the optical path correction subassembly, and an optical detection system that applies the optical detection unit, so that in the case where the orientation of the light detector provided by the present invention (e.g., using a photodiode) does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to determine the quality of an optical probe (i.e., an optical fiber) of an optical probe assembly arranged in different orientations (e.g.,different angles and / or heights) by using the optical path correction subassembly having a light beam guiding surface for effectively or accurately guiding a predetermined light beam onto a light entrance surface of the light detector. Therefore, the present invention can automatically detect the quality of the optical probe of the optical probe arrangement before, during, and after the application of the optical detection system for optically detecting a plurality of predetermined objects (such as test pieces) by using the optical path correction subassembly having the light beam guiding surface without the assistance of the external adjustment mechanism, in order to simplify the mechanical structure and achieve the advantage of cost reduction. Since the alignment of the optical detection unit does not need to be adjusted (e.g.the optical detection unit does not need to be tilted), it should be noted that the entire optical detection unit may be located at a lower position than the entire cross table of the semiconductor wafer or at the same height as the entire cross table of the semiconductor wafer (ie, an upper surface of the optical path correction structure may be equal to or lower than a surface for supporting the semiconductor wafer), so that the optical probe of the optical probe assembly adjacent to the optical detection unit does not collide with the relatively low optical detection unit during movement, while another optical probe of the optical probe assembly far from the optical detection unit is not blocked by the relatively low optical detection unit and can be optically detected by the same light detector. To solve the above-mentioned problems, one of the technical aspects of the present invention is to provide an optical path correction subassembly optionally configured to be applied to a light detector. The optical path correction subassembly is composed of a holder structure and an optical path correction structure supported by the holder structure, the optical path correction structure having a light beam guiding surface inclined at a reverse inclination on a vertical line. When the holder structure is optionally configured to be detachably mounted on the light detector, the light beam guiding surface of the optical path correction structure is configured to effectively or accurately guide a predetermined light beam onto a light incident surface of the light detector to facilitate collection of the predetermined light beam.When the holder structure is optionally designed to be detachably mounted on the light detector, the light beam guiding surface of the optical path correction structure is arranged at an acute angle to the light entrance surface of the light detector. In the optical path correction subassembly provided by one of the technical aspects of the present invention, the optical path correction structure has a light beam guiding surface arranged at a reverse inclination on a vertical line, while the light beam guiding surface of the optical path correction structure is arranged at an acute angle to the light entrance surface of the light detector, so that when the holder structure is optionally designed to be detachably mounted on the light detector, the light beam guiding surface of the optical path correction structure can be designed to effectively or accurately guide a predetermined light beam onto the light entrance surface of the light detector to collect the predetermined light beam by the light entrance surface of the light detector. Therefore, in the case where the orientation of the light detector (e.g., using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to optically detect the quality of an optical probe (i.e., an optical fiber) of an optical probe assembly arranged at different orientations (e.g., different angles and / or heights) by using the optical path correction subassembly having a light beam guiding surface for effectively or accurately guiding a predetermined light beam onto a light entrance surface of the light detector. Therefore, the present invention can be used before, during, and after the application of the optical detection system for optically detecting a plurality of predetermined objects (such asDUTs) can automatically detect the quality of the optical probe of the optical probe assembly by using the optical path correction subassembly with the light beam guiding surface without the assistance of the external adjustment mechanism, so as to simplify the mechanical structure and achieve the advantage of cost reduction. To solve the above-mentioned problems, another technical aspect of the present invention is to provide an optical detection unit including a light detector and an optical path correction subassembly. The light detector has a light entrance surface. The optical path correction subassembly consists of a holder structure detachably mounted on the light detector and an optical path correction structure supported by the holder structure. The optical path correction structure has a light beam guiding surface facing the light entrance surface of the light detector in the vertical direction at a reverse inclination, while the light beam guiding surface of the optical path correction structure is arranged at an acute angle relative to the light entrance surface of the light detector.The light beam guiding surface of the optical path correction structure is designed to effectively or accurately guide a given light beam onto a light entrance surface of the light detector to facilitate the collection of the given light beam. In the optical detection unit provided by one of the technical aspects of the present invention, the optical path correction structure has a light beam guiding surface arranged as a reverse inclination opposite to the light entrance surface of the light detector in a vertical direction, while the light beam guiding surface of the optical path correction structure is arranged at an acute angle to the light entrance surface of the light detector, so that when the holder structure is optionally designed to be detachably mounted on the light detector, the light beam guiding surface of the optical path correction structure can be designed to effectively or accurately guide a predetermined light beam onto the light entrance surface of the light detector to collect the predetermined light beam by the light entrance surface of the light detector. Therefore, in the case where the orientation of the light detector (e.g., using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to optically detect the quality of an optical probe (i.e., an optical fiber) of an optical probe array arranged at different orientations (e.g., different angles and / or heights) by using the optical path correction subassembly having a light beam guiding surface for effectively or accurately guiding a predetermined light beam onto a light entrance surface of the light detector. Therefore, the present invention can be used before, during, and after application of the optical detection system for optically detecting a plurality of predetermined objects (such asDUTs) can automatically detect the quality of the optical probe of the optical probe assembly by using the optical path correction subassembly with the light beam guiding surface without the assistance of the external adjustment mechanism, so as to simplify the mechanical structure and achieve the advantage of cost reduction. To solve the above-mentioned problems, another technical aspect of the present invention is to provide an optical detection system comprising a chuck, an optical probe assembly, and an optical detection unit. The chuck includes a substrate holder for supporting a plurality of predetermined objects. The optical probe assembly is configured to be arranged above the substrate holder to optically detect the predetermined object. The optical detection unit is arranged near the substrate holder of the chuck to optically detect a predetermined light beam generated by the optical probe assembly.The optical detection unit consists of a light detector and an optical path correction subassembly, wherein the light detector has a light entrance surface, and the optical path correction subassembly includes a holder structure detachably mounted on the light detector and an optical path correction structure supported by the holder structure. The optical path correction structure has a light beam guiding surface facing the light entrance surface of the light detector in the vertical direction at a reverse inclination, while the light beam guiding surface of the optical path correction structure is arranged at an acute angle to the light entrance surface of the light detector. The light beam guiding surface of the optical path correction structure is configured to guide the predetermined light beam onto a light entrance surface of the light detector to facilitate the collection of the predetermined light beam.An upper surface of the optical path correction structure of the optical path correction subassembly is equal to or lower than a wafer supporting surface of the substrate holder of the chuck. In the optical detection system provided by one of the technical aspects of the present invention, the optical path correction structure has a light beam guiding surface arranged as a reverse inclination facing the light entrance surface of the light detector in a vertical direction, while the light beam guiding surface of the optical path correction structure is arranged at an acute angle to the light entrance surface of the light detector, so that when the holder structure is optionally designed to be detachably mounted on the light detector, the light beam guiding surface of the optical path correction structure can be designed to effectively or accurately guide a predetermined light beam onto the light entrance surface of the light detector to collect the predetermined light beam by the light entrance surface of the light detector.In addition, when the optical path correction subassembly is optionally arranged adjacent to the substrate holder of the chuck, the upper surface of the optical path correction structure of the optical path correction subassembly may be equal to or lower than the wafer supporting surface of the substrate holder of the chuck to prevent the optical probe assembly from being contacted by the optical path correction subassembly. Therefore, in the case where the orientation of the light detector (e.g., using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to optically detect the quality of an optical probe (i.e., an optical fiber) of an optical probe array arranged at different orientations (e.g., different angles and / or heights) by using the optical path correction subassembly having a light beam guiding surface for effectively or accurately guiding a predetermined light beam onto a light entrance surface of the light detector. Therefore, the present invention canDuring and after the application of the optical detection system for the optical detection of multiple predetermined objects (such as test pieces), the quality of the optical probe of the optical probe assembly can be automatically detected by using the optical path correction subassembly with the light beam guide surface without the assistance of the external adjustment mechanism, in order to simplify the mechanical structure and achieve the advantage of cost reduction. It should be noted that since the orientation of the optical detection unit does not need to be adjusted (for example, the optical detection unit does not need to be tilted), the entire optical detection unit can be arranged at a lower position than the entire cross table of the semiconductor wafer or at the same height as the entire cross table of the semiconductor wafer (that is,an upper surface of the optical path correction structure may be equal to or lower than a wafer-supporting surface of the wafer-supporting stage), so that the optical probe of the optical probe assembly adjacent to the optical detection unit does not collide with the relatively low optical detection unit during movement, while another optical probe of the optical probe assembly far from the optical detection unit is not blocked by the relatively low optical detection unit and can be optically detected by the same light detector. In one of the possible or preferred embodiments, if the holder structure is optionally designed to be movably arranged on the light detector, a relative vertical height of the light beam guiding surface of the optical path correction structure at the light entry surface of the light detector is adjustable. If the holder structure is optionally designed to be adjustably arranged at various predetermined positions of the light detector by at least one fastening element, the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entry surface of the light detector is adjustable according to the holder structure, which is adjustably arranged at the various predetermined positions of the light detector.When the at least one fastening element passes through at least one lateral through-hole of the holder structure to cooperate with one of a plurality of matching holes of the light detector, the holder structure is adjustably arranged at the various predetermined positions of the light detector by cooperation of the at least one fastening element and the matching holes, so that the holder structure is designed to adjust the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector by cooperation of the at least one fastening element and the matching holes.If the holder structure is optionally designed to be adjustably arranged at various predetermined positions of the light detector by rotating it, the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector is adjustable according to the holder structure adjustably arranged at the various predetermined positions of the light detector.When an internal thread of the holder structure and an external thread of the light detector cooperate with each other, the holder structure is adjustably arranged at the various predetermined positions of the light detector by cooperation of the internal thread of the holder structure and the external thread of the light detector, so that the holder structure is designed to adjust the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector by cooperation of the internal thread of the holder structure and the external thread of the light detector. In the above-mentioned possible or preferred embodiments, the relative vertical height of the light beam guiding surface of the optical path correction structure is adjustable with respect to the light entrance surface of the light detector, so that in the case where the alignment of the light detector (e.g. using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to determine the quality of an optical probe (i.e. the light detector can still be used to determine the quality of an optical probe (i.e.an optical fiber) of an optical probe array arranged at different orientations (such as different angles and / or heights) by using the optical path correction subassembly having a light beam guiding surface to effectively or accurately guide a predetermined light beam generated by the optical probe of the optical probe array onto a light entrance surface of the light detector. Therefore, the present invention can automatically detect the quality of the optical probe of the optical probe array before, during, and after application of the optical detection system for optically detecting a plurality of predetermined objects (such as DUTs) by using the optical path correction subassembly having the light beam guiding surface without the assistance of the external adjustment mechanism, to simplify the mechanical structure and achieve the advantage of cost reduction.For example, the holder structure may be adjustably arranged at the various predetermined positions of the light detector through the cooperation of the at least one fastening element and the matching holes, so that the holder structure may be flared to adjust the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector through the cooperation of the at least one fastening element and the matching holes.Alternatively, the holder structure may be adjustably arranged at the various predetermined positions of the light detector by cooperation of the internal thread of the holder structure and the external thread of the light detector, so that the holder structure may be designed to adjust the relative vertical height of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector by cooperation of the internal thread of the holder structure and the external thread of the light detector. In one of the possible or preferred embodiments, when the optical path correction subassembly is optionally designed to be replaceably mounted on the light detector, or when the optical path correction structure is designed to be replaceably mounted on the holder structure, a relative inclination angle of the light beam guiding surface of the optical path correction structure at the light entrance surface of the light detector is adjustable. The optical path correction structure consists of a single-piece optical element or a combined-type optical element composed of multiple optical matching parts.The optical path correction structure includes a through-hole for accommodating the light beam guide surface. The through-hole is formed as a closed shape or an open shape, while the through-hole is formed by the integral optical element or by combining the optical matching parts of the combined-type optical element. The through-hole includes an uppermost opening and a lowermost opening, wherein a size of the uppermost opening is smaller than a size of the lowermost opening, while the size of the uppermost opening and the size of the lowermost opening have a proportional relationship within a predetermined range.The light beam guiding surface of the optical path correction structure has a plurality of light beam guiding regions, wherein the light beam guiding regions are designed to be arranged on the integral optical element or are designed to be arranged respectively on the optical matching parts of the combined type optical element, while the light beam guiding regions have a same inclination angle or different inclination angles on a vertical line. In the above-mentioned possible or preferred embodiments, the relative inclination angle of the light beam guiding surface of the optical path correction structure is adjustable at the light entrance surface of the light detector, so that in the case where the orientation of the light detector (e.g. using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector can still be used to optically detect the quality of an optical probe (i.e. an optical fiber) of an optical probe assembly arranged in different orientations (such as different angles and / or heights) by using the optical path correction subassembly,which has a light beam guiding surface for effectively or accurately guiding a predetermined light beam onto a light entrance surface of the light detector. Therefore, before, during, and after the application of the optical detection system to optically detect multiple predetermined objects (e.g., DUTs), the present detection system can automatically detect the quality of the optical probe of the optical probe assembly by using the optical path correction subassembly with the light beam guiding surface without the assistance of the external adjustment mechanism, thus simplifying the mechanical structure and achieving the advantage of cost reduction. For example, the present invention can adjust the relative inclination angle of the light beam guiding surface of the optical path correction structure on the light entrance surface of the light detector by the following different method:to meet different specific requirements. The different methods for adjusting the relative tilt angle may be at least one or more of the following possible solutions: (1) the optical path correction structure may be a single-piece optical element or a combined-type optical element composed of multiple optical matching parts; (2) the through-hole may be formed by the single-piece optical element or by combining the optically matching parts of the combined-type optical element; (3) in the through-hole, the size of the uppermost opening may be smaller than the size of the lowermost opening, and the size of the uppermost opening and the size of the lowermost opening have a proportional relationship within a predetermined range; and (4) the light beam guiding portions may be arranged on the single-piece optical element.or be designed to be arranged respectively at the optical matching parts of the combined type optical element, while the light beam guiding regions have a same inclination angle or a different inclination angle on a vertical line., These and other aspects of the present invention will become more apparent from the following description of the embodiment with reference to the following drawings and description thereof, although variations and modifications may also be made without departing from the spirit and scope of the novel concepts of the present invention. Character list The described embodiments will become clearer with reference to the following description and the accompanying drawings. Fig. 1 shows a partially schematic cross-sectional view of a first optical detection unit employing an optical path correction subassembly according to the first embodiment of the present invention; Fig. 2 shows a schematic bottom view of a first optical path correction subassembly according to the first embodiment of the present invention; Fig. 3 shows a schematic partially cross-sectional view of a second optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention (when a predetermined light beam from an optical probe assembly cannot be guided to a light entrance surface of a light detector); Fig.4 is a partially schematic cross-sectional view of the second optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention (when the predetermined light beam from the optical probe assembly can be guided to a light entrance surface of the light detector); FIG. 5 is a partially schematic cross-sectional view of a third optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention (when a predetermined light beam from an optical probe assembly cannot be guided to a light entrance surface of a light detector); FIG.6 is a partially schematic cross-sectional view of the third optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention (when the predetermined light beam from the optical probe assembly can be guided to a light entrance surface of the light detector); FIG. 7 is a partially schematic cross-sectional view of a fourth optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention (when a predetermined light beam from an optical probe assembly cannot be guided to a light entrance surface of the light detector); FIG.8 is a partially schematic cross-sectional view of the fourth optical detection unit using the optical path correction subassembly according to the first embodiment of the present invention (when the predetermined light beam can be guided by the optical probe assembly onto a light entrance surface of the light detector); 9 is a schematic bottom view of a second optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention; 10 is a schematic bottom view of a third optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention; 11 is a schematic bottom view of a fourth optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention;12 shows a schematic bottom view of a fifth optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention; FIG. 13 shows a schematic bottom view of a sixth optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention; FIG. 14 shows a schematic bottom view of a seventh optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention; FIG. 15 shows a schematic bottom view of an eighth optical path correction structure of the optical path correction subassembly according to the first embodiment of the present invention;16 is a partially schematic cross-sectional view of a fifth optical detection unit employing the optical path correction subassembly according to the first embodiment of the present invention; FIG. 17 is a partially schematic cross-sectional view of an optical detection system employing the optical detection unit of a second embodiment of the present invention (when the optical probe assembly is designed to be disposed above a substrate holder for optical detection of a predetermined object); FIG. 18 is a partially schematic cross-sectional view of the optical detection system employing the optical detection unit of the second embodiment of the present invention (when an optical probe assembly needs to be moved to a position above the optical detection unit in order to perform optical detection by the optical detection unit); and FIG.19 shows a partially schematic cross-sectional view of the optical detection system employing the optical detection unit of the second embodiment of the present invention (when another optical probe assembly needs to be moved to another position above the optical detection unit in order to perform optical detection by the optical detection unit). WAYS OF IMPLEMENTING THE PREFERRED EMBODIMENTS The present invention is more particularly described in the following examples, which are given by way of illustration only, since numerous modifications and changes will be apparent to those skilled in the art. Like numbers in the drawings refer to the same components throughout the views. As used in this specification and the following claims, the meaning of "a", "an" and "the" includes the plural, with the meaning of "in" referring to "in" and "on", unless the context clearly dictates otherwise. For clarity of understanding, titles or subtitles may be used herein, but are not intended to affect the scope of the present invention. The terms used herein generally have their ordinary meanings. In case of conflict, this document, including the definitions contained therein, shall prevail. The same thing may be expressed in more than one way. Alternative terms and synonyms may be used for any terms discussed herein, and it is not of particular importance whether a term is explained or discussed here. The mention of one or more synonyms does not preclude the use of other synonyms. The use of examples anywhere in this specification, including examples of any term, is for the purpose of illustration only and in no way limits the scope and meaning of the present invention or any exemplary term. Likewise, the present invention is not limited to the various embodiments described herein.Numbering terms such as "first", "second", or "third" may be used to describe different components, signals, or the like, which are intended solely to distinguish one component / signal from another and are not intended, nor should they be construed, to impose any content limitations on the components, signals, or the like. [First embodiment] 1 to 11 show that, according to a first embodiment of the present invention, an optical detection unit S1 including a light detector D and an optical path correction subassembly C (or an optical path adjustment subassembly) is provided. FIG. 1 shows that the light detector D has a light entrance surface D100 (such as a light entrance surface including a photodiode), while the optical path correction subassembly C consists of a holder structure 1 detachably mounted on the light detector D and an optical path correction structure 2 (or an optical path adjustment structure 2) supported by the holder structure 1. It should be noted that the optical path correction subassembly C can optionally be designed to be applied to the light detector D according to various requirements. In particular, Fig. 1 shows that the holder structure 1 comprises a matching part 11 and a supporting part 12 arranged on the matching part 11, wherein the matching part 11 of the holder structure 1 can be designed to cooperate with the light detector D, while the supporting part 12 of the holder structure 1 can be designed to support the optical path correction structure 2. For example, the matching part 11 and the light detector D can be moved or rotated together, while the optical path correction structure 2 can be removably or fixedly arranged outside the holder structure 1 and located on an upper side of the holder structure 1 (see Fig. 1 ), or the optical path correction structure 2 can be removably or fixedly arranged within the holder structure 1 and surrounded by the holder structure 1.However, the above information serves only as examples and is not intended to limit the scope of the present invention. 1 and 2 show in particular that the optical path correction structure 2 has a light beam guiding surface 2000 arranged at a reverse inclination with respect to the light entrance surface D100 of the light detector D in the vertical direction, wherein the optical path correction structure 2 has a through-hole 2001 for receiving the light beam guiding surface 2000. That is, as shown in Fig. 1, the optical path correction structure 2 has a light beam guiding surface 2000 arranged at a reverse inclination on a vertical line V, wherein the light beam guiding surface 2000 can be inclined counterclockwise with respect to the vertical line V, while the perpendicular projection of the light beam guiding surface 2000 can be projected onto the light entrance surface D100 of the light detector D.For example, the optical path correction structure 2 has an upper surface 2002, a lower surface 2003 opposite to the upper surface 2002, an upper connection interface 2004 (i.e., an uppermost side of the light beam guide surface 2000) connected between the upper surface 2002 and the light beam guide surface 2000, and a lower connection interface 2005 (i.e., a lowermost side of the light beam guide surface 2000) connected between the lower surface 2003 and the light beam guide surface 2000, wherein an upper connection interface 2004 (i.e., an uppermost side of the light beam guide surface 2000) connected between the upper surface 2002 and the light beam guide surface 2000, and a lower connection interface 2005 (i.e.,a lowermost side of the light beam guiding surface 2000) connected between the lower surface 2003 and the light beam guiding surface 2000, while the upper connection interface 2004 and the lower connection interface 2005 may directly face the light detector D in a perpendicular direction (i.e., both the perpendicular projection of the upper connection interface 2004 and the perpendicular projection of the lower connection interface 2005 may be projected onto the light entrance surface D100 of the light detector D). Specifically, the upper connection interface 2004 is closer to the centerline of the through-hole 2001 than the lower connection interface 2005, while the upper connection interface 2004 is closer to the centerline of the light detector D than the lower connection interface 2005.It should be noted that the light beam guiding surface 2000 may be formed by an optical coating layer additionally formed (for example, by plating, electroplating, vapor deposition, or any other forming method) on the optical path correction structure 2 (i.e., the optical path correction structure 2 consists of an optical coating layer having a light beam guiding surface 2000), or the light beam guiding surface 2000 may be formed by a material surface layer that the optical path correction structure 2 itself has (i.e., the material surface layer of the optical path correction structure 2 has a light beam guiding surface 2000). However, the above statements are merely examples and are not intended to limit the scope of the present invention. In particular, Fig. 1 and Fig. 2 show that when the holder structure 1 is optionally designed to be detachably mounted on the light detector D, the light beam guiding surface 2000 of the optical path correction structure 2 is arranged at an acute angle θ to the light entrance surface D100 of the light detector D. Fig. 1 further shows that when the holder structure 1 is optionally designed to be detachably mounted on the light detector D, the light beam guiding surface 2000 of the optical path correction structure 2 can be designed to effectively or accurately reflect (or guide, direct, transmit) a predetermined light beam B generated by the optical probe assembly S3 onto the light entrance surface D100 of the light detector D in order to collect the predetermined light beam B through the light entrance surface D100 of the light detector D.It should be noted that the light beam guiding surface 2000 of the optical path correction structure 2 may be configured to be located on an optical path between an optical probe assembly S3 for generating the predetermined light beam B and the light entrance surface D100 of the light detector D, so that the light beam guiding surface 2000 of the optical path correction structure 2 may be configured to effectively or accurately reflect (or guide, direct, transmit) the predetermined light beam B generated by the optical probe assembly S3 onto the light entrance surface D100 of the light detector D to collect the predetermined light beam B through the light entrance surface D100 of the light detector D. 3 to 6 show that, in one of the possible embodiments, a relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entry surface D100 of the light detector D is adjustable if the holder structure 1 is optionally designed such that it is movably arranged on the light detector D. The relative vertical height H can be defined, for example, as the distance between the lower connection interface 2005 of the light guiding surface 2000 and the light entry surface D100 of the light detector D (see FIGS. 3 to 6 ) or the relative vertical height H can also be defined as the distance between the upper connection interface 2004 of the light guiding surface 2000 and the light entry surface D100 of the light detector D.As another example, the relative vertical height H can also be defined as the distance between any reference point of the light guide surface 2000 and the light entrance surface D100 of the light detector D. However, the above statements serve only as examples and are not intended to limit the scope of the present invention. Fig. 3 and Fig. 4 show, for example, when the holder structure 1 is designed such that it can be adjustably arranged at various predetermined positions of the light detector D by means of at least one fastening element F (such as a bolt, a screw nail, or any type of fastening element), the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjusted according to the holder structure 1, which can be adjustably arranged at the various predetermined positions of the light detector D. In particular, when the at least one fastening element F passes through at least one lateral through-hole 1000 of the holder structure 1 to cooperate with one of several corresponding holes D101 of the light detector D (for example, Fig.3 shows at least one fastening element F passing through at least one lateral through-hole 1000 to cooperate with the uppermost one of the matching holes D101, and Fig. 4 shows at least one fastening element F passing through at least one lateral through-hole 1000 to cooperate with the lowermost one of the matching holes D101), the holder structure 1 can be adjustably arranged at the various predetermined positions of the light detector D by the cooperation of the at least one fastening element F and the matching holes D101, so that the holder structure 1 can be designed to adjust the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D by the cooperation of the at least one fastening element F and the matching holes D101.Therefore, if the holder structure 1 is optionally designed so that it can be adjustably arranged at various predetermined positions of the light detector D by at least one fastening element F, the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjustable (for example, the relative vertical height H shown in Fig. 3 can be adjusted to that shown in Fig.4, thereby reducing the relative vertical height H), so that the light beam guiding surface 2000 of the optical path correction structure 2 can be designed to effectively or accurately reflect (or guide, direct, transmit) the predetermined light beam B generated by the optical probe assembly S3 onto the light entrance surface D100 of the light detector D to collect the predetermined light beam B through the light entrance surface D100 of the light detector D. In another example, the matching holes D101 are not required, that is, the fastening member F can be screwed directly to the wall of the light detector D, thereby enabling stepless adjustment. However, the above statements are merely examples and are not intended to limit the scope of the present invention. Fig. 5 and Fig. 6 show, for example, when the holder structure 1 is optionally designed so that it can be adjustably arranged at various predetermined positions of the light detector D by rotating it (for example, the holder structure 1 can be rotated on the light detector D, or the light detector D can be rotated on the holder structure 1), the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjusted according to the holder structure 1, which can be adjustably arranged at the various predetermined positions of the light detector D. In particular, when an internal thread 1001 of the holder structure 1 and an external thread D102 of the light detector D cooperate with each other (e.g., Fig.5 that the holder structure 1 and the light detector D are relatively far apart from each other due to the rotation of the internal thread 1001 and the external thread D102, while Fig. 6 shows that the holder structure 1 and the light detector D are closer to each other due to the rotation of the internal thread 1001 and the external thread D102), the holder structure 1 can be adjustably arranged at the various predetermined positions of the light detector D by the cooperation of the internal thread 1001 of the holder structure 1 and the external thread D102 of the light detector D, so that the holder structure 1 can be designed such that it adjusts the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D by the cooperation of the internal thread 1001 of the holder structure 1 and the external thread D102 of the light detector D.Therefore, if the holder structure 1 is optionally designed to be adjustably arranged at various predetermined positions of the light detector D by rotating it, the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjustable (for example, the relative vertical height H shown in Fig. 5 can be adjusted to the relative vertical height H shown in Fig. 6, thereby reducing the relative vertical height H), so that the light beam guiding surface 2000 of the optical path correction structure 2 can be designed to effectively or accurately reflect (or guide, direct, transmit) the predetermined light beam B generated by the optical probe assembly S3 onto the light entrance surface D100 of the light detector D to collect the predetermined light beam B through the light entrance surface D100 of the light detector D.However, the above information serves only as examples and is not intended to limit the scope of the present invention. Fig. 3 to Fig. 6 show that in one of the possible embodiments, the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 can be adjusted relative to the light entrance surface D100 of the light detector D, so that in the case where the orientation of the light detector D (e.g. using a photodiode) provided by the present invention does not have to be adjusted by an external adjustment mechanism, the light detector D can still be used to determine the quality of an optical probe S30 (i.e. an optical fiber) of the optical probe assembly S3, which can be arranged in different orientations (such asdifferent angles and / or heights) by using the optical path correction subassembly C having a light beam guiding surface 2000 to effectively or accurately reflect (or guide, direct, transmit) a predetermined light beam B generated by the optical probe S30 of the optical probe assembly S3 to a light entrance surface D100 of the light detector D. Therefore, the present invention can automatically detect the quality of the optical probe S30 of the optical probe assembly S3 before, during, and after application of the optical recognition system S to optically recognize a plurality of predetermined objects (such as DUTs) by using the optical path correction subassembly C having the light beam guiding surface 2000 without the assistance of the external adjustment mechanism, to simplify the mechanical structure and achieve the advantage of cost reduction.For example, the holder structure 1 can be adjustably arranged at the various predetermined positions of the light detector D through the cooperation of the at least one fastening element F and the matching holes D101, so that the holder structure 1 can be designed to adjust the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D through the cooperation of the at least one fastening element F and the matching holes D101 (it should be noted that the at least one fastening element F can be actuated by the user's hand or a screwdriver, but both the user's hand and the screwdriver are used to generate a power source to drive the at least one fastening element F instead of the external adjustment mechanism).Alternatively, the holder structure 1 can be adjustably arranged at the various predetermined positions of the light detector D by the cooperation of the internal thread 1001 of the holder structure 1 and the external thread D102 of the light detector D, so that the holder structure 1 can be designed to adjust the relative vertical height H of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D by the cooperation of the internal thread 1001 of the holder structure 1 and the external thread D102 of the light detector D. 7 and 8 show that in another of the possible embodiments, when the optical path correction subassembly is optionally designed to be replaceably arranged on the light detector D (or when the optical path correction structure 2 can be designed to be replaceably arranged on the holder structure 1), a relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjustable. For example, Fig. 7 shows that the light beam guiding surface 2000 of the optical path correction structure 2 is inclined with respect to the light entrance surface D100 of the light detector D to have a relative inclination angle θ1, while Fig.8 shows that the light beam guiding surface 2000 of the optical path correction structure 2 is inclined with respect to the light entrance surface D100 of the light detector D to have a relative inclination angle θ2. Another example shows that the relative inclination angle θ1 and the relative inclination angle θ2 may be inclined with respect to the upper surface 2002 or the lower surface 2003 of the optical path correction structure 2. However, the above statements are merely examples and are not intended to limit the scope of the present invention. For example, Fig. 7 and Fig. 8 show that the optical path correction structure 2 consists of a single-piece optical element (see Fig. 2) or a combined-type optical element consisting of a plurality of optical matching parts 20S (as shown in Fig. 9, the combined-type optical element may consist of three optical matching parts 20S). In particular, when the optical path correction subassembly C is optionally designed to be replaceably arranged on the light detector D (or when the optical path correction structure 2 may be designed to be replaceably arranged on the holder structure 1), the optical path correction subassembly C (i.e., the optical path correction structure 2) may be replaced by a plurality of different single-piece optical elements or a plurality of different combined-type optical elements (e.g.,the light beam guiding surfaces 2000 of the different integral optical elements each have different inclination angles or the light beam guiding surfaces 2000 of the different combined type optical elements each have different inclination angles), so that the relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjustable or selectable. Therefore, if the optical path correction subassembly C is optionally designed to be replaceably disposed on the light detector D (or if the optical path correction structure 2 can be designed to be replaceably disposed on the holder structure 1), the relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjustable (for example, the relative inclination angle θ1 of the light beam guiding surface 2000 at the light entrance surface D100, such as the relative inclination angle θ1 of the light beam guiding surface 2000 at the light entrance surface D100 shown in Fig. 7, is larger than that shown in Fig.8), so that the light beam guiding surface 2000 of the optical path correction structure 2 can be designed to effectively or accurately reflect (or guide, direct, transmit) the predetermined light beam B generated by the optical probe assembly S3 onto the light entrance surface D100 of the light detector D to collect the predetermined light beam B through the light entrance surface D100 of the light detector D. However, the above details are described for exemplary purposes only and are not intended to limit the scope of the present invention. It should be noted that the optical path correction structure 2 (see Fig. 2 , Fig. 10 and Fig. 11 ) has a through hole 2001 for receiving the light beam guiding surface 2000, wherein the through hole 2001 may be formed as a closed shape (such as a circle in Fig. 2 , a square or any closed shape) or an open shape (such as a 1 / 2 circle shown in Fig. 10, a 3 / 4 circle shown in Fig. 11 or any open shape), while the through hole 2001 may be formed by the one-piece optical element (see Fig. 1 ) or by combining the optical matching parts 20S of the combined type optical element (see Fig. 9 ). In particular, the number of through holes 2001 formed by the present invention may not be only one as shown in Fig. 2 and Fig. 10, for example, the number of through holes 2001 shown in Fig. 12 and Fig.13, the plurality of light beam guiding surfaces 2000 may also be multiple, wherein the plurality of light beam guiding surfaces 2000 may have the same or different inclination angles. When the through-hole 2001 may be formed as an open shape, the optical path correction structure 2 has a stripe-shaped light beam guiding surface 2000 and an open through-hole 2001 adjacent to the stripe-shaped light beam guiding surface 2000 (see FIG. 14), or the optical path correction structure 2 has at least two stripe-shaped light beam guiding surfaces 2000 and a through-hole 2001 located between the two stripe-shaped light beam guiding surfaces 2000 (see FIG. 15). However, the above statements are merely examples and are not intended to limit the scope of the present invention. For example, Figs. 7 and 8 show that the through-hole 2001 has an uppermost opening 2001P and a lowermost opening 2011B, wherein a size of the uppermost opening 2001P is smaller than a size of the lowermost opening 2011B. Furthermore, the size of the uppermost opening 2001P and the size of the lowermost opening 2011B are proportional to each other within a predetermined range, so that the relative inclination angle of the light beam guide surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D is adjustable.That is, assuming that the distance between the uppermost opening 2001P and the lowermost opening 2001B is fixed, when the ratio of the opening of the uppermost opening 2001P to the opening of the lowermost opening 2001B is larger (or when the opening of the uppermost opening 2001P is smaller than the opening of the lowermost opening 2001B), the relative inclination angle of the light beam guide surface 2000 of the optical path correction structure 2 with respect to the light entrance surface D100 of the light detector D is larger. However, the above statements are merely examples and are not intended to limit the scope of the present invention. For example, Fig. 9 shows that the light beam guiding surface 2000 of the optical path correction structure 2 has a plurality of light beam guiding regions 2000R, wherein the light beam guiding regions 2000R may be configured to be arranged on the integral optical element (as shown in Fig. 2, three light beam guiding regions 2000R are distributed on the light beam guiding surface 2000) or configured to be arranged respectively on the optical matching parts 20S of the combined-type optical element (as shown in Fig. 9, three light beam guiding regions 2000R are respectively formed on the three optical matching parts 20S), while the light beam guiding regions 2000R have a same inclination angle or different inclination angles on the vertical line V.Therefore, the relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D can be adjusted based on "the same or different inclination angles formed by the light beam guiding portions 2000R of the integral optical element" or "the same or different inclination angles formed by the light beam guiding portions 2000R of the combined optical element." However, the above are merely examples and are not intended to limit the scope of the present invention. For example, Fig. 16 shows that when the optical path correction structure 2 adopts one of the patterns shown in Fig. 10, Fig. 11, Fig. 13, Fig. 14 and Fig. 15, the optical probe assembly S3 can be set very close to a horizontal plane (that is, the inclination angle of the optical probe assembly S3 at the light entrance surface D100 of the light detector D can be very small), so that the optical probe assembly S3 can be used more flexibly in cooperation with the optical path correction structure 2. Finally, in another of the possible embodiments with reference to Fig. 7 to Fig. 11, the relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D is adjustable, so that in the case where the orientation of the light detector D (e.g. using a photodiode) provided by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector D can still be used to improve the quality of an optical probe S30 (i.e. an optical fiber) of the optical probe assembly S3 arranged in different orientations (such as different angles and / or heights) by using the optical path correction subassembly C with a light beam guiding surface 2000 for effectively or accurately reflecting (or guiding, directing, transmitting) a given light beam B,formed by the optical probe S30 of the optical probe assembly S3, to a light entrance surface D100 of the light detector D. Therefore, the present invention can automatically detect the quality of the optical probe S30 of the optical probe assembly S3 before, during, and after the application of the optical detection system S for optical detection of a plurality of predetermined objects (such as DUTs) by using the optical path correction subassembly C with the light beam guide surface 2000 without the assistance of the external adjustment mechanism, to simplify the mechanical structure and achieve the advantage of cost reduction. For example, the present invention can adjust the relative inclination angle of the light beam guide surface 2000 of the optical path correction structure 2 to the light entrance surface D100 of the light detector D by the following different method:to meet the various specific requirements. The various methods for adjusting the relative tilt angle may be at least one or more of the following possible solutions: (1) the optical path correction structure 2 may be a single-piece optical element or a combined-type optical element composed of a plurality of optical matching parts 20S; (2) the through-hole 2001 may be formed by the single-piece optical element or by combining the optical matching parts 20S of the combined-type optical element; (3) for the through-hole 2001, the size of the uppermost opening 2001P may be smaller than the size of the lowermost opening 2011B, while the size of the uppermost opening 2001P and the size of the lowermost opening 2011B are in a proportional relationship within a predetermined range; and (4) the light beam guiding regions 2000R may be designedthat they are arranged on the one-piece optical element, or may be designed so that they are respectively arranged on the optical matching parts 20S of the combined-type optical element, while the light beam guiding regions 2000R have a same inclination angle or different inclination angles on a vertical line V. In summary, in the first embodiment, with reference to Fig. 1 to Fig. 11, the optical path correction structure 2 has a light beam guiding surface 2000 arranged as a reverse slope facing the light entrance surface D100 of the light detector D in a vertical direction (that is, the optical path correction structure 2 has a light beam guiding surface 2000 arranged as a reverse slope inclined on a vertical line V), while the light beam guiding surface 2000 of the optical path correction structure 2 is arranged at an acute angle θ to the light entrance surface D100 of the light detector D, so that when the holder structure 1 is optionally designed to be detachably arranged on the light detector D, the light beam guiding surface 2000 of the optical path correction structure 2 can be designedthat it guides a given light beam B to the light entrance surface D100 of the light detector D in order to effectively or accurately collect the given light beam B through the light entrance surface D100 of the light detector D., Therefore, in the case where the orientation of the light detector D (e.g., using a photodiode) formed by the present invention does not need to be adjusted by an external adjustment mechanism, the light detector D can still be used to improve the quality of the optical probe S30 (i.e., an optical fiber) of an optical probe array S3 arranged at different orientations (e.g., different angles and / or heights) by using the optical path correction subassembly C having a light beam guiding surface 2000 (e.g., wherein at least one of the relative perpendicular heights H and the relative inclination angle of the light beam guiding surface 2000 of the optical path correction structure 2 at the light entrance surface D100 of the light detector D is adjustable) to guide a predetermined light beam B onto a light entrance surface D100 of the light detector D.Therefore, the present invention can automatically detect the quality of the optical probe S30 of the optical probe array S3 before, during, and after the application of the optical recognition system S for optically recognizing a plurality of predetermined objects (such as DUTs) by using the optical path correction subassembly C having the light beam guiding surface 2000 without the assistance of the external adjustment mechanism, to simplify the mechanical structure and achieve the advantage of cost reduction. Second embodiment] 17 to 19 show that, according to a second embodiment of the present invention, an optical detection system S is provided, which system consists of an optical detection unit S1 (which may be provided by the first embodiment), a chuck S2, and two optical probe assemblies S3 (or only one optical probe assembly S3). In particular, the chuck S2 consists of a substrate holder S20 for supporting a plurality of predetermined objects W (e.g., a semiconductor wafer with a plurality of chips). The optical probe assembly S3 may be configured to be arranged above the substrate holder S20 to optically detect the predetermined object W (see Fig. 17). The optical detection unit S1 may be arranged near the substrate holder S20 of the chuck S2 to optically detect a predetermined light beam B generated by the optical probe assembly S3.Furthermore, the optical detection unit S1 consists of a light detector D and an optical path correction subassembly C, wherein the light detector D has a light entrance surface D100 and the optical path correction subassembly C comprises a holder structure 1 detachably arranged on the light detector D and an optical path correction structure 2 carried by the holder structure 1.Further, the optical path correction structure 2 has a light beam guiding surface 2000 arranged as a reverse slope facing the light entrance surface D100 of the light detector D in a vertical direction, wherein the light beam guiding surface 2000 of the optical path correction structure 2 is arranged at an acute angle θ to the light entrance surface D100 of the light detector D, while the light beam guiding surface 2000 of the optical path correction structure 2 can be configured to guide the predetermined light beam B onto a light entrance surface D100 of the light detector D to facilitate the collection of the predetermined light beam B. 17 to 19 show that when the optical path correction subassembly C is optionally arranged next to the substrate holder S20 of the chuck S2, an upper surface 2002 of the optical path correction structure 2 of the optical path correction subassembly C may be equal to or lower than the wafer supporting surface S2000 of the substrate holder S20 of the chuck S2 in order to prevent the optical path correction subassembly C from contacting or colliding with the optical probe assembly S3. For example, FIG. 18 shows that in order to perform optical detection by the optical detection unit S1, one of the two optical probe assemblies S3 (such as the optical probe assembly S3 shown on the right side of FIG. 18) needs to be moved to a position above the optical detection unit S1, wherein the optical probe assembly S3 located on the right side of FIG.18 does not collide with the optical detection unit S1 during movement because the upper surface 2002 of the optical path correction structure 2 of the optical path correction subassembly C is equal to or lower than the wafer supporting surface S2000 of the substrate holder S20 of the chuck S2. When another of the two optical probe assemblies S3 (such as the optical probe assembly S3 shown on the left side of Fig. 19) needs to be moved to a different position above the optical detection unit S1 in order to perform optical detection by the optical detection unit S1, the optical probe assembly S3 located on the left side of Fig.19, will not collide with the optical detection unit S1 during the movement, since the upper surface 2002 of the optical path correction structure 2 of the optical path correction subassembly C is equal to or lower than the wafer support surface S2000 of the substrate holder S20 of the chuck S2. Figure 17 shows that after the two optical probe assemblies S3 complete the optical detection by the optical detection unit S1, the optical probe assembly S3 can be returned to a position above the substrate holder S20 to optically detect the predetermined object W. Since the orientation of the optical detection unit S1 does not need to be tilted, the entire optical detection unit S1 can be arranged at a lower position than the entire chuck S2 or at the same height as the entire cross table of the semiconductor wafer (ie, the upper surface 2002 of the optical path correction structure 2 can be equal to or lower than the surface for supporting the semiconductor wafer S2000 of the chuck S2), so that the optical probe S30 of the optical probe assembly S3 adjacent to the optical detection unit S1 does not collide with the relatively low optical detection unit S1 during movement, while another optical probe S30 of the optical probe assembly S3 far from the optical detection unit S1 is not blocked by the relatively low optical detection unit S1 and can be optically detected by the same light detector D.That is, there is only a relative horizontal movement between the optical probe assembly S3 and the substrate holder S20, so that even if the detection of the quality of the optical probe S30 of the optical probe assembly S3 is frequent, the detection efficiency is improved. The foregoing description of exemplary embodiments of the present invention is for purposes of illustration and description only and is not intended to be exhaustive or to limit the present invention to the precise forms discussed. Numerous modifications and variations are possible in light of the above teachings. The embodiments were chosen and described to explain the principles of the present invention and their practical application so that others skilled in the art may utilize the present invention and the various embodiments with various modifications as are suitable for particular uses. Other embodiments will become apparent to those skilled in the art to which the present invention belongs without departing from the spirit and scope thereof. List of reference symbols S Optical detection system S1 Optical detection unit D Light detector D100 Light entrance surface D101 Matching hole D102 External thread C Optical path correction subassembly 1 Holder structure 11 Matching part 12 Supporting part 1000 Side through hole 1001 Internal thread 2 Optical path correction structure 2000 Light beam guiding surface 2000R Light beam guiding area 2001 Through hole 2001P Topmost hole 2001B Bottommost hole 2002 Upper surface 2003 Lower surface 2004 Upper terminal interface 2005 Lower terminal interface 20S Optically matching part V Vertical line H Relative vertical height F Fixing member S2 Chuck S20 Substrate holder S2000 Surface for supporting semiconductor wafers W Specified object S3 Optical probe assembly S30 Optical probe needle B Specified light beam θ Acute angle θ1, θ2 Relative inclination angle QUOTES CONTAINED IN THE DESCRIPTION This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature US 63276671

[0001]

Claims

An optical path correction subassembly (C), optionally designed for use with a light detector (D); wherein the optical path correction subassembly (C) consists of a holder structure (1) and an optical path correction structure (2) carried by the holder structure (1), while the optical path correction structure (2) has a light beam guiding surface (2000) arranged as a reverse inclination on a vertical line (V); wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to guide a predetermined light beam (B) to a light entrance surface (D100) of the light detector (D) in order to facilitate the collection of the predetermined light beam (B) when the holder structure (1) is optionally designed to be detachably arranged on the light detector (D);wherein the light beam guiding surface (2000) of the optical path correction structure (2) is arranged at an acute angle to the light entrance surface (D100) of the light detector (D) when the holder structure (1) is optionally designed to be detachably arranged on the light detector (D); The optical path correction subassembly (C) according to claim 1, wherein a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable when the holder structure (1) is optionally designed to be movably arranged on the light detector (D); wherein, when the holder structure (1) is optionally designed to be adjustably arranged at various predetermined positions of the light detector (D) by at least one fastening element (F), the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable according to the holder structure (1) adjustably arranged at the various predetermined positions of the light detector (D);wherein, when the at least one fastening element (F) is guided through at least one lateral through-hole (1000) of the holder structure (1) to cooperate with one of the plurality of matching holes (D101) of the light detector (D), the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101);wherein, if the holder structure (1) is optionally designed so that it can be adjustably arranged by rotation at various predetermined positions of the light detector (D), the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) on the light receiving surface (D100) of the light detector (D) is adjustable according to the holder structure (1) which is adjustably arranged at the various predetermined positions of the light detector (D);wherein, when an internal thread (1001) of the holder structure (1) and an external thread (D102) of the light detector (D) cooperate with each other, the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guide surface (2000) of the light path correction structure (2) at the light entrance surface (D100) of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D). The optical path correction subassembly (C) according to claim 1, wherein, when the optical path correction subassembly (C) is optionally designed to be replaceably arranged on the light detector (D), or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1), a relative inclination angle (θ1, θ2) of the light beam guide surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein the optical path correction structure (2) is made of a one-piece optical element or a combined-type optical element comprising a plurality of optical matching parts (20S);wherein the optical path correction structure (2) has a through-hole (2001) for receiving the light beam guide surface (2000), the through-hole (2001) is formed as a closed shape or an open shape, and the through-hole (2001) is formed by the one-piece optical element or is formed by combining the optical matching parts (20S) of the combined-type optical element; wherein the through-hole (2001) has an uppermost opening (2001P) and a lowermost opening (2011B), a size of the uppermost opening (2001P) is smaller than a size of the lowermost opening (2011B), the size of the uppermost opening (2001P) and the size of the lowermost opening (2011B) having a proportional relationship within a predetermined range;wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) being designed to be arranged on the one-piece optical element or being designed to be arranged respectively on the optical matching parts (20S) of the combined-type optical element, while the light beam guiding regions (2000R) have a same inclination angle or different inclination angles on the vertical line (V); The optical path correction subassembly (C) according to claim 1, wherein, when the holder structure (1) is optionally designed to be movably arranged on the light detector (D), a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein, when the optical path correction subassembly (C) is optionally designed to be replaceably arranged on the light detector (D), or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1), a relative inclination angle (θ1, θ2) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable;wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to be located on an optical path between an optical probe arrangement (S3) for generating the predetermined light beam (B) and the light entrance surface (D100) of the light detector (D); wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) having the same inclination angle or different inclination angles on the vertical line (V); wherein the light beam guiding surface (2000) is formed by an optical coating layer additionally formed on the optical path correction structure (2) or by a material surface layer that the optical path correction structure (2) itself has;wherein the optical path correction structure (2) has an upper surface (2002), a lower surface (2003) opposite the upper surface (2002), an upper corner interface connected between the upper surface (2002) and the light beam guide surface (2000), and a lower corner interface connected between the lower surface (2003) and the light beam guide surface (2000), wherein the upper corner interface and the lower corner interface are directly opposite the light detector (D) in a perpendicular direction; wherein the holder structure (1) consists of a matching part (11) and a supporting part (12) arranged on the matching part (11), wherein the matching part (11) of the holder structure (1) is designed to cooperate with the light detector (D), while the supporting part (12) of the holder structure (1) is designed to support the optical path correction structure (2);wherein the optical path correction structure (2) is arranged outside the holder structure (1) and on an upper surface of the holder structure (1) or inside the holder structure (1) and is surrounded by the holder structure (1); wherein the holder structure (1) and the optical path correction structure (2) are formed integrally as a single optical element, and the light beam guiding surface (2000) is formed on the single optical element; wherein, when the optical path correction subassembly (C) is optionally configured adjacent to a substrate holder (S20) of a chuck (S2), the upper surface (2002) of the optical path correction structure (2) of the optical path correction subassembly (C) is equal to or lower than a surface for supporting the semiconductor wafer (S2000) of the substrate holder (S20) of the chuck (S2) in order to prevent the optical probe assembly (S3) from being contacted by the optical path correction subassembly (C). An optical detection unit (S1) comprising: a light detector (D) having a light entrance surface (D100); and an optical path correction subassembly (C) having a holder structure (1) detachably disposed on the light detector (D), and an optical path correction structure (2) supported by the holder structure (1); wherein the optical path correction structure (2) has a light beam guide surface (2000) arranged at a reverse inclination facing the light entrance surface (D100) of the light detector (D) in a vertical direction, the light beam guide surface (2000) of the optical path correction structure (2) being arranged at an acute angle to the light entrance surface (D100) of the light detector (D);wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to guide a predetermined light beam (B) to the light entrance surface (D100) of the light detector (D) to facilitate the collection of the predetermined light beam (B); The optical detection unit (S1) according to claim 5, wherein a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable when the holder structure (1) is designed to be movably arranged on the light detector (D); wherein, when the holder structure (1) is designed to be adjustably arranged at various predetermined positions of the light detector (D) by at least one fastening element (F), the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable according to the holder structure (1) adjustably arranged at the various predetermined positions of the light detector (D);wherein, when the at least one fastening element (F) is guided through at least one lateral through-hole (1000) of the holder structure (1) to cooperate with one of a plurality of matching holes (D101) of the light detector (D), the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guiding surface (2000) of the light path correction structure (2) at the light entry surface (D100) of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101);wherein, when the holder structure (1) is designed so that it can be adjustably arranged at various predetermined positions of the light detector (D) by rotating, the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) relative to the light entrance surface (D100) of the light detector (D) is adjustable according to the holder structure (1) which is adjustably arranged at the various predetermined positions of the light detector (D);wherein, when an internal thread (1001) of the holder structure (1) and an external thread (D102) of the light detector (D) cooperate with each other, the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D). The optical detection unit (S1) according to claim 5, wherein a relative inclination angle (θ1, θ2) of the light beam guiding surface (2000) of the optical path correction structure (2) on the light entrance surface (D100) of the light detector (D) is adjustable when the optical path correction subassembly (C) is designed to be replaceably arranged on the light detector (D) or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1); wherein the optical path correction structure (2) comprises a one-piece optical element or a combined-type optical element consisting of a plurality of optical matching parts (20S);wherein the optical path correction structure (2) has a through-hole (2001) for receiving the light beam guide surface (2000), the through-hole (2001) is formed as a closed shape or an open shape, and the through-hole (2001) is formed by the one-piece optical element or is formed by combining the optical matching parts (20S) of the combined-type optical element; wherein the through-hole (2001) has an uppermost opening (2001P) and a lowermost opening (2011B), a size of the uppermost opening (2001P) is smaller than a size of the lowermost opening (2011B), while the size of the uppermost opening (2001P) and the size of the lowermost opening (2011B) have a proportional relationship within a predetermined range;wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) being designed to be arranged on the integral optical element or being designed to be arranged respectively on the optical matching parts (20S) of the combined type optical element, while the light beam guiding regions (2000R) have a same inclination angle or different inclination angles on a vertical line (V); The optical detection unit (S1) according to claim 5, wherein, when the holder structure (1) is designed to be movably arranged on the light detector (D), a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein, when the optical path correction subassembly (C) is designed to be replaceably arranged on the light detector (D), or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1), a relative inclination angle (θ1, θ2) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable;wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed such that it is located on an optical path between an optical probe arrangement (S3) for generating the predetermined light beam (B) and the light entrance surface (D100) of the light detector (D); wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) having the same inclination angle or different inclination angles on a vertical line (V); wherein the light beam guiding surface (2000) has an optical coating layer that is additionally formed on the optical path correction structure (2) or is created by a material surface layer that the optical path correction structure (2) itself has;wherein the optical path correction structure (2) has an upper surface (2002), a lower surface (2003) opposite the upper surface (2002), an upper corner interface connected between the upper surface (2002) and the light beam guide surface (2000), and a lower corner interface connected between the lower surface (2003) and the light beam guide surface (2000), wherein the upper corner interface and the lower corner interface are directly opposite the light detector (D) in a perpendicular direction; wherein the holder structure (1) consists of a matching part (11) and a supporting part (12) arranged on the matching part (11), wherein the matching part (11) of the holder structure (1) is designed to cooperate with the light detector (D), while the supporting part (12) of the holder structure (1) is designed to support the optical path correction structure (2);wherein the optical path correction structure (2) is arranged outside the holder structure (1) and on an upper surface of the holder structure (1) or inside the holder structure (1) and is surrounded by the holder structure (1); wherein the holder structure (1) and the optical path correction structure (2) are formed integrally as a single optical element, while the light beam guiding surface (2000) is formed on the single optical element; wherein, when the optical path correction subassembly (C) is optionally configured adjacent to a substrate holder (S20) of a chuck (S2), the upper surface (2002) of the optical path correction structure (2) of the optical path correction subassembly (C) is equal to or lower than a surface for supporting the semiconductor wafer (S2000) of the substrate holder (S20) of the chuck (S2) in order to prevent the optical probe assembly (S3) from being contacted by the optical path correction subassembly (C). An optical detection system (S), comprising:a clamping frame (S2) having a substrate holder (S20) for supporting a plurality of predetermined objects (W);an optical probe assembly (S3) configured to be disposed above the substrate holder (S20) to optically detect the predetermined object (W); andan optical detection unit (S1) arranged next to the substrate holder (S20) of the chuck (S2) for optically detecting a predetermined light beam (B) generated by the optical probe assembly (S3);wherein the optical detection unit (S1) consists of a light detector (D) and an optical path correction subassembly (C), the light detector (D) has a light entrance surface (D100), and the optical path correction subassembly (C) consists of a holder structure (1) detachably arranged on the light detector (D) and an optical path correction structure (2) carried by the holder structure (1);wherein the optical path correction structure (2) has a light beam guiding surface (2000) arranged at a reverse inclination facing the light entrance surface (D100) of the light detector (D) in a vertical direction, while the light beam guiding surface (2000) of the optical path correction structure (2) is arranged at an acute angle to the light entrance surface (D100) of the light detector (D); wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to guide the predetermined light beam (B) onto the light entrance surface (D100) of the light detector (D) to facilitate the collection of the predetermined light beam (B); wherein an upper surface (2002) of the optical path correction structure (2) of the optical path correction subassembly (C) is equal to or lower than a surface for supporting the semiconductor wafer (S2000) of the substrate holder (S20) of the chuck (S2) is.; The optical detection system (S) according to claim 9, wherein, when the holder structure (1) is designed to be movably arranged on the light detector (D), a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein, when the holder structure (1) is designed to be adjustably arranged at various predetermined positions of the light detector (D) by at least one fastening element (F), the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light receiving surface (D100) of the light detector (D) is adjustable according to the holder structure (1) adjustably arranged at the various predetermined positions of the light detector (D);wherein, when the at least one fastening element (F) is passed through at least one lateral through-hole (1000) of the holder structure (1) to cooperate with one of the plurality of matching holes (D101) of the light detector (D), the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entry surface (D100) of the light detector (D) by the cooperation of the at least one fastening element (F) and the matching holes (D101);wherein, when the holder structure (1) is designed so that it can be adjustably arranged at various predetermined positions of the light detector (D) by rotating, the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable according to the holder structure (1) which is adjustably arranged at the various predetermined positions of the light detector (D);wherein, when an internal thread (1001) of the holder structure (1) and an external thread (D102) of the light detector (D) cooperate with each other, the holder structure (1) is adjustably arranged at the various predetermined positions of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D), so that the holder structure (1) is designed to adjust the relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) by the cooperation of the internal thread (1001) of the holder structure (1) and the external thread (D102) of the light detector (D). The optical detection system (S) according to claim 9, wherein, when the optical path correction subassembly (C) is designed to be replaceably arranged on the light detector (D), or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1), a relative inclination angle (θ1, θ2) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein the optical path correction structure (2) comprises a one-piece optical element or a combined-type optical element consisting of a plurality of optical matching parts (20S);wherein the optical path correction structure (2) has a through-hole (2001) for receiving the light beam guide surface (2000), the through-hole (2001) is formed as a closed shape or an open shape, and the through-hole (2001) is formed by the one-piece optical element or is formed by combining the optical matching parts (20S) of the combined-type optical element; wherein the through-hole (2001) has an uppermost opening (2001P) and a lowermost opening (2011B), a size of the uppermost opening (2001P) is smaller than a size of the lowermost opening (2011B), while the size of the uppermost opening (2001P) and the size of the lowermost opening (2011B) have a proportional relationship within a predetermined range;wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) being designed to be arranged on the one-piece optical element or being designed to be arranged respectively on the optical matching parts (20S) of the combined-type optical element, and the light beam guiding regions (2000R) having a same inclination angle or different inclination angles on a vertical line (V); The optical detection system (S) according to claim 9, wherein, when the holder structure (1) is designed to be movably arranged on the light detector (D), a relative vertical height (H) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable; wherein, when the optical path correction subassembly (C) is designed to be replaceably arranged on the light detector (D), or when the optical path correction structure (2) is designed to be replaceably arranged on the holder structure (1), a relative inclination angle (θ1, θ2) of the light beam guiding surface (2000) of the optical path correction structure (2) at the light entrance surface (D100) of the light detector (D) is adjustable;wherein the light beam guiding surface (2000) of the optical path correction structure (2) is designed to be located on an optical path between the optical probe arrangement (S3) for generating the predetermined light beam (B) and the light entrance surface (D100) of the light detector (D); wherein the light beam guiding surface (2000) of the optical path correction structure (2) has a plurality of light beam guiding regions (2000R), the light beam guiding regions (2000R) having the same inclination angle or different inclination angles on a vertical line (V); wherein the light beam guiding surface (2000) is formed by an optical coating layer additionally formed on the optical path correction structure (2) or by a material surface layer that the optical path correction structure (2) itself has;wherein the optical path correction structure (2) has a lower surface (2003) opposite the upper surface (2002), an upper corner interface connected between the upper surface (2002) and the light beam guide surface (2000), and a lower corner interface connected between the lower surface (2003) and the light beam guide surface (2000), while the upper corner interface and the lower corner interface are directly opposite the light detector (D) in a perpendicular direction; wherein the holder structure (1) comprises a matching part (11) and a supporting part (12) arranged on the matching part (11), the matching part (11) of the holder structure (1) being designed to cooperate with the light detector (D), while the supporting part (12) of the holder structure (1) is designed to support the optical path correction structure (2);wherein the optical path correction structure (2) is arranged outside the holder structure (1) and on an upper side of the holder structure (1) or inside the holder structure (1) and is surrounded by the holder structure (1);wherein the holder structure (1) and the optical path correction structure (2) are formed integrally as a single optical element and the light beam guiding surface (2000) is formed on the single optical element.;

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