Storage device and assembly for an optical system, optical system and mask inspection system
DE102024206013B4Active Publication Date: 2026-07-23CARL ZEISS SMT GMBH
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Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- CARL ZEISS SMT GMBH
- Filing Date
- 2024-06-27
- Publication Date
- 2026-07-23
AI Technical Summary
Technical Problem
Existing optical systems face challenges in efficiently damping vibrations of optical elements, leading to wear and contamination issues with elastomer components.
Method used
A bearing device is introduced that uses an eddy current damper with a vibration element between the optical element and the support frame, providing contactless and wear-free damping, adjustable by magnetic field strength, and eliminating the need for elastomers.
Benefits of technology
The solution effectively damps vibrations in multiple spatial directions, avoiding contamination and wear, while allowing precise adjustment of damping levels, enhancing the stability and longevity of optical systems.
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Abstract
Bearing device (33; 48) for an optical system for vibration-damped mounting of at least one optical element (32) on a support frame (31), wherein the bearing device (33; 48) comprises: - at least one vibration element that can be elastically mounted at least indirectly between the optical element (32) and the support frame (31) to absorb vibrations, and - at least one eddy current damper for damping vibrations of the vibration element, - wherein the eddy current damper comprises at least one magnet arrangement (43, 45; 50; 55, 57; 59, 61) for generating a magnetic field and an electrically conductive damping element (53), wherein the at least one magnet arrangement and the at least one damping element are arranged such that vibrations of the at least one vibration element lead to a relative movement of the damping element to the magnetic field of the magnet arrangement, characterized in that - the magnet arrangement (43, 45; 50; 55, 57;59, 61) has several magnetic elements (44, 46; 51;56ij, 58ij; 60ij, 61ij) arranged in a two-dimensional lattice structure,- wherein the magnetic elements (44, 46; 51;56ij, 58ij; 60ij, 61ij) are arranged in a two-dimensional Halbach array.;
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