Method for temperature-controlling an image sensor, image sensor device, mask inspection system

DE102025100170A1Undetermined Publication Date: 2026-07-09CARL ZEISS SMT GMBH
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Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
CARL ZEISS SMT GMBH
Filing Date
2025-01-06
Publication Date
2026-07-09

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Abstract

A method for temperature-controlling an image sensor (24) to a set temperature, in which a temperature control fluid (31) is guided along a channel (30). The channel (30) has a heat exchange section (35) that is in thermal interaction with the image sensor (24). The temperature control fluid (31) exists in a two-phase state in the heat exchange section (35). The invention also relates to an image sensor device and a mask inspection system.
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Citation Information

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