Sensor device, manufacturing process for a sensor device and method for operating a sensor device
DE102025100541A1Undetermined Publication Date: 2026-07-09ROBERT BOSCH GMBH
Patent Information
- Application Number
- DE102025100541
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-01-09
- Publication Date
- 2026-07-09
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Abstract
The present invention relates to a sensor device comprising at least one first substrate (20) with a first substrate surface (20a), a sensor element layer (22) with at least one sensitive element arranged in the sensor element layer (22), wherein the sensor element layer (22) covers the first substrate surface (20a) and / or at least one intermediate layer (24) at least partially covering the first substrate surface (20a), and at least one capacitor arrangement (30), wherein the at least one capacitor arrangement (30) is formed in the first substrate (20) and / or in a second substrate (32), which is electrically connected to the first substrate (20) via at least one bond connection (34). The present invention also relates to a manufacturing method for a sensor device. Furthermore, the present invention relates to a method for operating a sensor device.
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Citation Information
Patent Citations
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