Device and method for processing a workpiece with an ion beam

Abstract

A device for processing a workpiece (14) with an ion beam (34) comprises a holder (12) for receiving the workpiece (14), an ion source (24) for generating ions, and an extraction grid (28) for accelerating the ions so that a directed ion beam (34) emerges from the extraction grid (28). Behind the extraction grid (28) is an aperture (36; 36a, 36b) that limits the cross-section of the ion beam (34) and is adjustable such that the angular distribution of the ion beam (34) changes when the aperture (36) is adjusted.

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