VENTING A HEAT TRANSFER CHANNEL

Abstract

Method (V1, V2) for venting a liquid-filled heat transfer channel (101) formed in and / or on an optical element (115; 19, 20, 22, M1-M6) and in particular an optical element (115; 19, 20, 22, M1-M6) of a projection exposure system (1), wherein the heat transfer channel (101) has several channel sections (108 - 113) of different channel cross-sections, comprising: a) providing (S12) at least one flow quantity which is indicative of a resonant flow state (120) in a respective channel section (109, 112); and b) generating (S14) a liquid flow (122) through the heat transfer channel (101) such that the liquid flow (122) corresponds successively to each of the provided flow quantities.

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