Leak detection device for integral gas leak detection and corresponding method

DE102025102297A1Undetermined Publication Date: 2026-07-23INFICON GMBH
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Patent Information

Application Number
DE102025102297
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-01-22
Publication Date
2026-07-23

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Abstract

Leak detection device for detecting a gas leak in a test specimen, comprising a test port (20) for the test specimen or a test chamber (11) receiving the test specimen, a gas line (22) connected to the test port (20) which has a valve (27) for selectively closing the gas line (22), wherein the gas line (22) has a vacuum pump (32) such that the inlet of the vacuum pump (32) is connected to the test port (20) via the gas line (22) and the gas outlet of the vacuum pump (32) is connected to the valve (27) via the gas line (22), characterized in that the leak detection device has a pressure measuring device (24) connected to the vacuum pump (32) such that the pressure measuring device (24) receives information about the power consumption or the rotational speed of the vacuum pump (32) and that the pressure measuring device (24) is configured toto determine the pressure at the test port (20) from the information about the power consumption or the speed of the vacuum pump (32).
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Citation Information

Patent Citations

  • Gas leak detection device and gas leak detection method for detecting a gas leak in a test object

    DE102020134370A1

  • Leak detectors

    DE102021119256A1

  • Leak detection device and leak detection method for detecting a gas leak in a test object

    DE102022111596A1

  • Measuring low pressure in container - uses gas friction acting on turbo-molecular vacuum pump rotor with magnetic bearing

    DE2945889A1