Device and method for amplifying laser radiation

DE102025102744A1Undetermined Publication Date: 2026-07-30TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
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Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
Filing Date
2025-01-27
Publication Date
2026-07-30

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Abstract

The present invention relates to a device (2) for amplifying laser radiation (11) comprising a hollow cylindrical cavity (20) filled with a gaseous laser medium and having two annular end faces (22, 23) on which mirror elements (24, 25) for reflecting a laser beam are arranged such that the laser beam is reflected and thereby deflected in a circumferential direction (U) of the hollow cylindrical cavity (20), so that the laser beam passes through the hollow cylindrical cavity (20) multiple times in the region between the two end faces (22, 23) and is thereby amplified, wherein within the hollow cylindrical cavity (20) in the region of a first of the two end faces (22) a first aperture device (27) with several recesses (29) is arranged in front of the mirror elements (24), in particular arranged in front of the mirror elements (24),that the laser beam enters in a forward direction through one of the recesses (29) into an area between the aperture device (27) and the mirror elements (24), is reflected by one of the mirror elements (24) and thereby deflected in the circumferential direction (U) and can then exit through the same recess (29). Furthermore, the invention relates to a method for operating such a device (2).
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