Semiconductor device with a sensor device

Abstract

A semiconductor device is provided. The semiconductor device comprises a semiconductor substrate and an active cell region, which has a plurality of active cell trenches extending from a first major surface of the semiconductor substrate into the semiconductor substrate. The semiconductor device further comprises a sensor region, which includes a sensor device and a sensor pad formed above the first major surface of the semiconductor substrate and electrically connected to a first terminal of the sensor device. A semiconductor substrate region is formed below the sensor pad. A plurality of capacitance trenches are formed below the sensor pad and extend from the first major surface of the semiconductor substrate into or through the semiconductor substrate region.One of the capacitance electrodes formed in one of the multiple capacitance trenches, or the semiconductor substrate area, is electrically connected to the sensor pad and forms a first electrode of an input capacitance.

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