Microelectromechanical system, method for manufacturing and using such a

Abstract

The present invention relates to a microelectromechanical system (MEMS) (1) comprising a frame structure (2) spanning an xy-plane, a layer (4) with at least one fluid opening (6a), and at least one first actuator (8) attached to a first side wall (12) of the frame structure (2) and comprising at least one first lamella (10a), in particular a first set of lamellae (10a, 10b, 10n). The microelectromechanical system (1) is designed and configured such that, upon actuation of the first actuator (8) in the z-direction, a deflection and / or displacement (14) of the at least one first lamella (10a), in particular of the first set of lamellae (10a, 10b, 10n), occurs in the x- and / or y-direction. The invention further relates to a method for manufacturing a microelectromechanical system (1) in which at least one first actuator (8) with a lamellar structure is created.The invention further relates to the use of the microelectromechanical system (1) according to the invention in systems for displacing and / or steering fluids (72).

Images